JPH0584673B2 - - Google Patents

Info

Publication number
JPH0584673B2
JPH0584673B2 JP60284630A JP28463085A JPH0584673B2 JP H0584673 B2 JPH0584673 B2 JP H0584673B2 JP 60284630 A JP60284630 A JP 60284630A JP 28463085 A JP28463085 A JP 28463085A JP H0584673 B2 JPH0584673 B2 JP H0584673B2
Authority
JP
Japan
Prior art keywords
region
impurity diffusion
diffusion region
substrate
memory device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60284630A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62141759A (ja
Inventor
Masayuki Nakajima
Shinichi Sato
Akira Tokui
Akira Kawai
Masao Nagatomo
Koji Ozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60284630A priority Critical patent/JPS62141759A/ja
Priority to US06/931,583 priority patent/US4702796A/en
Priority to DE19863639058 priority patent/DE3639058A1/de
Publication of JPS62141759A publication Critical patent/JPS62141759A/ja
Publication of JPH0584673B2 publication Critical patent/JPH0584673B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Memories (AREA)
JP60284630A 1985-12-16 1985-12-16 半導体記憶装置の製造方法 Granted JPS62141759A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP60284630A JPS62141759A (ja) 1985-12-16 1985-12-16 半導体記憶装置の製造方法
US06/931,583 US4702796A (en) 1985-12-16 1986-11-14 Method for fabricting a semiconductor device
DE19863639058 DE3639058A1 (de) 1985-12-16 1986-11-14 Verfahren zur herstellung einer halbleitereinrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60284630A JPS62141759A (ja) 1985-12-16 1985-12-16 半導体記憶装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62141759A JPS62141759A (ja) 1987-06-25
JPH0584673B2 true JPH0584673B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-12-02

Family

ID=17680955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60284630A Granted JPS62141759A (ja) 1985-12-16 1985-12-16 半導体記憶装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62141759A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS62141759A (ja) 1987-06-25

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