JPH058385Y2 - - Google Patents

Info

Publication number
JPH058385Y2
JPH058385Y2 JP1986117872U JP11787286U JPH058385Y2 JP H058385 Y2 JPH058385 Y2 JP H058385Y2 JP 1986117872 U JP1986117872 U JP 1986117872U JP 11787286 U JP11787286 U JP 11787286U JP H058385 Y2 JPH058385 Y2 JP H058385Y2
Authority
JP
Japan
Prior art keywords
pressure
damper
negative pressure
clean room
indoor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986117872U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6326045U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986117872U priority Critical patent/JPH058385Y2/ja
Publication of JPS6326045U publication Critical patent/JPS6326045U/ja
Application granted granted Critical
Publication of JPH058385Y2 publication Critical patent/JPH058385Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Safety Valves (AREA)
  • Ventilation (AREA)
  • Air-Flow Control Members (AREA)
JP1986117872U 1986-07-31 1986-07-31 Expired - Lifetime JPH058385Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986117872U JPH058385Y2 (en, 2012) 1986-07-31 1986-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986117872U JPH058385Y2 (en, 2012) 1986-07-31 1986-07-31

Publications (2)

Publication Number Publication Date
JPS6326045U JPS6326045U (en, 2012) 1988-02-20
JPH058385Y2 true JPH058385Y2 (en, 2012) 1993-03-02

Family

ID=31003793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986117872U Expired - Lifetime JPH058385Y2 (en, 2012) 1986-07-31 1986-07-31

Country Status (1)

Country Link
JP (1) JPH058385Y2 (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2534779B2 (ja) * 1989-09-28 1996-09-18 山口日本電気株式会社 圧力差制御装置
CN102166450B (zh) * 2005-08-09 2013-09-04 肯非法尔公司 集成的密闭系统

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5217137Y2 (en, 2012) * 1971-12-23 1977-04-18
JPS5716451U (en, 2012) * 1980-06-23 1982-01-27

Also Published As

Publication number Publication date
JPS6326045U (en, 2012) 1988-02-20

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