JPH0583122B2 - - Google Patents
Info
- Publication number
- JPH0583122B2 JPH0583122B2 JP63130381A JP13038188A JPH0583122B2 JP H0583122 B2 JPH0583122 B2 JP H0583122B2 JP 63130381 A JP63130381 A JP 63130381A JP 13038188 A JP13038188 A JP 13038188A JP H0583122 B2 JPH0583122 B2 JP H0583122B2
- Authority
- JP
- Japan
- Prior art keywords
- rays
- ray
- optical element
- reflected
- ray optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 56
- 238000011156 evaluation Methods 0.000 claims description 38
- 238000001514 detection method Methods 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 description 8
- 239000010949 copper Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052702 rhenium Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63130381A JPH01301153A (ja) | 1988-05-30 | 1988-05-30 | Ｘ線光学素子評価装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63130381A JPH01301153A (ja) | 1988-05-30 | 1988-05-30 | Ｘ線光学素子評価装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01301153A JPH01301153A (ja) | 1989-12-05 |
| JPH0583122B2 true JPH0583122B2 (enrdf_load_stackoverflow) | 1993-11-24 |
Family
ID=15032976
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63130381A Granted JPH01301153A (ja) | 1988-05-30 | 1988-05-30 | Ｘ線光学素子評価装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01301153A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2742867B1 (fr) * | 1995-12-22 | 1998-02-06 | Commissariat Energie Atomique | Procede et dispositif interferometrique de caracterisation d'un milieu |
| FR2742866B1 (fr) * | 1995-12-22 | 1998-01-30 | Commissariat Energie Atomique | Procede et dispositif de caracterisation d'un milieu ionise mettant en oeuvre une source de rayonnement electromagnetique a duree ultracourte |
-
1988
- 1988-05-30 JP JP63130381A patent/JPH01301153A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01301153A (ja) | 1989-12-05 |
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