JPH0581047B2 - - Google Patents
Info
- Publication number
- JPH0581047B2 JPH0581047B2 JP845086A JP845086A JPH0581047B2 JP H0581047 B2 JPH0581047 B2 JP H0581047B2 JP 845086 A JP845086 A JP 845086A JP 845086 A JP845086 A JP 845086A JP H0581047 B2 JPH0581047 B2 JP H0581047B2
- Authority
- JP
- Japan
- Prior art keywords
- resist
- filter
- pump
- air
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000576 coating method Methods 0.000 claims description 14
- 239000011248 coating agent Substances 0.000 claims description 13
- 239000007788 liquid Substances 0.000 description 21
- 238000010586 diagram Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP845086A JPS62165919A (ja) | 1986-01-17 | 1986-01-17 | レジスト供給装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP845086A JPS62165919A (ja) | 1986-01-17 | 1986-01-17 | レジスト供給装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62165919A JPS62165919A (ja) | 1987-07-22 |
| JPH0581047B2 true JPH0581047B2 (xx) | 1993-11-11 |
Family
ID=11693460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP845086A Granted JPS62165919A (ja) | 1986-01-17 | 1986-01-17 | レジスト供給装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62165919A (xx) |
-
1986
- 1986-01-17 JP JP845086A patent/JPS62165919A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62165919A (ja) | 1987-07-22 |
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