JPH058094B2 - - Google Patents
Info
- Publication number
- JPH058094B2 JPH058094B2 JP19128786A JP19128786A JPH058094B2 JP H058094 B2 JPH058094 B2 JP H058094B2 JP 19128786 A JP19128786 A JP 19128786A JP 19128786 A JP19128786 A JP 19128786A JP H058094 B2 JPH058094 B2 JP H058094B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- formula
- film
- thin film
- carbon atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Formation Of Insulating Films (AREA)
- Organic Insulating Materials (AREA)
- Laminated Bodies (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19128786A JPS6347141A (ja) | 1986-08-14 | 1986-08-14 | ポリイミド前駆体を部分的に閉環させた薄膜を含む複合物品 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19128786A JPS6347141A (ja) | 1986-08-14 | 1986-08-14 | ポリイミド前駆体を部分的に閉環させた薄膜を含む複合物品 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6347141A JPS6347141A (ja) | 1988-02-27 |
| JPH058094B2 true JPH058094B2 (enrdf_load_stackoverflow) | 1993-02-01 |
Family
ID=16272051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19128786A Granted JPS6347141A (ja) | 1986-08-14 | 1986-08-14 | ポリイミド前駆体を部分的に閉環させた薄膜を含む複合物品 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6347141A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6418760U (enrdf_load_stackoverflow) * | 1987-07-25 | 1989-01-30 | ||
| DE69737563T2 (de) | 1996-02-23 | 2007-12-27 | Ebara Corp. | Verfahren zur chemischen gasphasenabscheidung |
-
1986
- 1986-08-14 JP JP19128786A patent/JPS6347141A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6347141A (ja) | 1988-02-27 |
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