JPH0580555B2 - - Google Patents

Info

Publication number
JPH0580555B2
JPH0580555B2 JP61191232A JP19123286A JPH0580555B2 JP H0580555 B2 JPH0580555 B2 JP H0580555B2 JP 61191232 A JP61191232 A JP 61191232A JP 19123286 A JP19123286 A JP 19123286A JP H0580555 B2 JPH0580555 B2 JP H0580555B2
Authority
JP
Japan
Prior art keywords
film
plasma
substrate
thin film
ion plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61191232A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6347362A (ja
Inventor
Tetsuya Nomachi
Masanori Konno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tobi Co Ltd
Original Assignee
Tobi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tobi Co Ltd filed Critical Tobi Co Ltd
Priority to JP19123286A priority Critical patent/JPS6347362A/ja
Publication of JPS6347362A publication Critical patent/JPS6347362A/ja
Publication of JPH0580555B2 publication Critical patent/JPH0580555B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP19123286A 1986-08-15 1986-08-15 イオンプレ−テイング装置 Granted JPS6347362A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19123286A JPS6347362A (ja) 1986-08-15 1986-08-15 イオンプレ−テイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19123286A JPS6347362A (ja) 1986-08-15 1986-08-15 イオンプレ−テイング装置

Publications (2)

Publication Number Publication Date
JPS6347362A JPS6347362A (ja) 1988-02-29
JPH0580555B2 true JPH0580555B2 (cg-RX-API-DMAC7.html) 1993-11-09

Family

ID=16271097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19123286A Granted JPS6347362A (ja) 1986-08-15 1986-08-15 イオンプレ−テイング装置

Country Status (1)

Country Link
JP (1) JPS6347362A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999016924A1 (fr) * 1996-03-25 1999-04-08 Sumitomo Heavy Industries, Ltd. Appareil de plaquage ionique

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6160350A (en) * 1996-03-25 2000-12-12 Sumitomo Heavy Industries, Ltd. Ion plating apparatus
JP6054249B2 (ja) * 2013-05-27 2016-12-27 住友重機械工業株式会社 成膜装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3874588A (en) * 1974-05-28 1975-04-01 Anthony Mfg Corp Apparatus and method for improving water distribution from rotary sprinklers
DE2963534D1 (en) * 1978-07-29 1982-10-07 Beecham Group Plc Clavulanic acid derivatives, a process for their preparation, their use, and pharmaceutical compositions containing them
JPS5873770A (ja) * 1981-10-28 1983-05-04 Joshin Uramoto 磁石とコイルの磁場を利用した高能率イオンプレ−テング装置
JPS60110872A (ja) * 1983-11-21 1985-06-17 Sumitomo Electric Ind Ltd イオンプレ−テイング法
JPS60141869A (ja) * 1983-12-29 1985-07-26 Nissin Electric Co Ltd 膜形成方法および膜形成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999016924A1 (fr) * 1996-03-25 1999-04-08 Sumitomo Heavy Industries, Ltd. Appareil de plaquage ionique

Also Published As

Publication number Publication date
JPS6347362A (ja) 1988-02-29

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Legal Events

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R250 Receipt of annual fees

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EXPY Cancellation because of completion of term