JPH057822B2 - - Google Patents

Info

Publication number
JPH057822B2
JPH057822B2 JP59045776A JP4577684A JPH057822B2 JP H057822 B2 JPH057822 B2 JP H057822B2 JP 59045776 A JP59045776 A JP 59045776A JP 4577684 A JP4577684 A JP 4577684A JP H057822 B2 JPH057822 B2 JP H057822B2
Authority
JP
Japan
Prior art keywords
sample
signal
ray
focus
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59045776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60189856A (ja
Inventor
Yoshio Makita
Tadashi Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP59045776A priority Critical patent/JPS60189856A/ja
Publication of JPS60189856A publication Critical patent/JPS60189856A/ja
Publication of JPH057822B2 publication Critical patent/JPH057822B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Microscoopes, Condenser (AREA)
JP59045776A 1984-03-10 1984-03-10 Ｘ線マイクロアナライザー Granted JPS60189856A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59045776A JPS60189856A (ja) 1984-03-10 1984-03-10 Ｘ線マイクロアナライザー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59045776A JPS60189856A (ja) 1984-03-10 1984-03-10 Ｘ線マイクロアナライザー

Publications (2)

Publication Number Publication Date
JPS60189856A JPS60189856A (ja) 1985-09-27
JPH057822B2 true JPH057822B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-29

Family

ID=12728692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59045776A Granted JPS60189856A (ja) 1984-03-10 1984-03-10 Ｘ線マイクロアナライザー

Country Status (1)

Country Link
JP (1) JPS60189856A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616402B2 (ja) * 1986-04-11 1994-03-02 日本電子株式会社 Ｘ線マイクロアナライザ−等に使用する光学顕微鏡の自動焦点合わせ装置
JPS6391947A (ja) * 1986-10-03 1988-04-22 Jeol Ltd Ｘ線マイクロアナライザ−
JPS63149058U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-03-20 1988-09-30
JPH0754684B2 (ja) * 1987-08-28 1995-06-07 株式会社日立製作所 電子顕微鏡

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221910B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-03-31 1977-06-14
JPS5231755A (en) * 1975-09-05 1977-03-10 Hitachi Ltd Automatic forcusing device
JPS5916704B2 (ja) * 1978-09-29 1984-04-17 株式会社島津製作所 粒子線照射形分析装置

Also Published As

Publication number Publication date
JPS60189856A (ja) 1985-09-27

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