JPH0345176Y2 - - Google Patents

Info

Publication number

JPH0345176Y2

JPH0345176Y2 JP3020689U JP3020689U JPH0345176Y2 JP H0345176 Y2 JPH0345176 Y2 JP H0345176Y2 JP 3020689 U JP3020689 U JP 3020689U JP 3020689 U JP3020689 U JP 3020689U JP H0345176 Y2 JPH0345176 Y2 JP H0345176Y2

Authority

JP

Japan

Prior art keywords

scanning

electron beam

sample

ray

ray spectrometer

Prior art date

1989-03-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010894 electron beam technology Methods 0.000 claims description 28
• 239000013078 crystal Substances 0.000 claims description 7
• 230000005284 excitation Effects 0.000 claims 1
• 238000000034 method Methods 0.000 description 6
• 230000003287 optical effect Effects 0.000 description 5
• 230000002441 reversible effect Effects 0.000 description 4
• 238000000441 X-ray spectroscopy Methods 0.000 description 2
• 230000008859 change Effects 0.000 description 2
• 230000007246 mechanism Effects 0.000 description 2
• 238000004611 spectroscopical analysis Methods 0.000 description 2
• 238000002441 X-ray diffraction Methods 0.000 description 1
• 230000005540 biological transmission Effects 0.000 description 1
• 239000000470 constituent Substances 0.000 description 1
• 230000003247 decreasing effect Effects 0.000 description 1
• 239000006185 dispersion Substances 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 230000006870 function Effects 0.000 description 1
• 238000003384 imaging method Methods 0.000 description 1
• 230000004044 response Effects 0.000 description 1