JPH0577967B2 - - Google Patents

Info

Publication number
JPH0577967B2
JPH0577967B2 JP4262688A JP4262688A JPH0577967B2 JP H0577967 B2 JPH0577967 B2 JP H0577967B2 JP 4262688 A JP4262688 A JP 4262688A JP 4262688 A JP4262688 A JP 4262688A JP H0577967 B2 JPH0577967 B2 JP H0577967B2
Authority
JP
Japan
Prior art keywords
grating
light source
ray
light
diffused light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4262688A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01216213A (ja
Inventor
Soji Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP4262688A priority Critical patent/JPH01216213A/ja
Priority to US07/298,430 priority patent/US4943716A/en
Priority to IN56CA1989 priority patent/IN172342B/en
Priority to GB8901266A priority patent/GB2216650B/en
Priority to CN89101060.2A priority patent/CN1014935B/zh
Priority to CN 91105460 priority patent/CN1017658B/zh
Priority to DE3901869A priority patent/DE3901869C2/de
Publication of JPH01216213A publication Critical patent/JPH01216213A/ja
Priority to US07/490,389 priority patent/US4985623A/en
Priority to US07/490,463 priority patent/US4983825A/en
Priority to GB9117366A priority patent/GB2246430B/en
Priority to GB9117368A priority patent/GB2246431B/en
Publication of JPH0577967B2 publication Critical patent/JPH0577967B2/ja
Granted legal-status Critical Current

Links

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  • Optical Transform (AREA)
JP4262688A 1987-09-16 1988-02-25 光学式変位検出器 Granted JPH01216213A (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP4262688A JPH01216213A (ja) 1988-02-25 1988-02-25 光学式変位検出器
US07/298,430 US4943716A (en) 1988-01-22 1989-01-18 Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations
IN56CA1989 IN172342B (enrdf_load_stackoverflow) 1987-09-16 1989-01-18
GB8901266A GB2216650B (en) 1988-01-22 1989-01-20 Optical encoder
CN 91105460 CN1017658B (zh) 1988-01-22 1989-01-21 光学编码器
CN89101060.2A CN1014935B (zh) 1988-01-22 1989-01-21 光学编码器
DE3901869A DE3901869C2 (de) 1988-01-22 1989-01-23 Optischer Codierer
US07/490,389 US4985623A (en) 1988-01-22 1990-03-08 Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations
US07/490,463 US4983825A (en) 1988-01-22 1990-03-08 Diffraction type optical encoder with improved detection signal insensitivity to optical grating gap variations
GB9117366A GB2246430B (en) 1988-01-22 1991-08-12 Optical encoder
GB9117368A GB2246431B (en) 1988-01-22 1991-08-12 Optical encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4262688A JPH01216213A (ja) 1988-02-25 1988-02-25 光学式変位検出器

Publications (2)

Publication Number Publication Date
JPH01216213A JPH01216213A (ja) 1989-08-30
JPH0577967B2 true JPH0577967B2 (enrdf_load_stackoverflow) 1993-10-27

Family

ID=12641225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4262688A Granted JPH01216213A (ja) 1987-09-16 1988-02-25 光学式変位検出器

Country Status (1)

Country Link
JP (1) JPH01216213A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6369042B2 (ja) * 2013-11-05 2018-08-08 日本精工株式会社 光学式エンコーダユニット及び光学式エンコーダ
JP6785092B2 (ja) * 2016-08-19 2020-11-18 株式会社Ｓｃｒｅｅｎホールディングス 変位検出装置、変位検出方法および基板処理装置

Also Published As

Publication number Publication date
JPH01216213A (ja) 1989-08-30

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees