GB2246430A

GB2246430A - Optical encoder

Info

Publication number: GB2246430A
Application number: GB9117366A
Authority: GB
Inventors: Souji Ichikawa; Hideka Oka; Naoyoshi Terao; Seiji Sakagami
Original assignee: Mitutoyo Corp
Current assignee: Mitutoyo Corp
Priority date: 1988-01-22
Filing date: 1991-08-12
Publication date: 1992-01-29
Anticipated expiration: 2009-01-20
Also published as: GB2246430B; GB2246431B; GB9117368D0; GB2246431A; GB9117366D0

Abstract

In a reflection type encoder using a diffusive light source, diffused rays from a point light source 34 is focused by a condensing lens 40 to produce a secondary point light source 54 and this secondary point light source is positioned on a plane 42 where the second gratings of the index scale 20 are formed. With this arrangement, a collimator lens can be dispensed with, so that the encoder can be rendered compact in size. Furthermore, the respective elements can be easily supported and positioned. The light receiving element(s) 24 receive two rays satisfying a pre-determined relationship. An embodiment is also disclosed whereby the index scale is leaned with respect to the main scale, so that the dependence of a S/N ratio of the detection signal on the grating gap v can be avoided. <IMAGE>

Description

Q? BL~EXCQ0ER The present invention relates to optical encoders.

More particularly, the present invention realtes to imProvements in an oPtical encoder for detecting a positional relationship between two members from a change in a photoelectric transducing signal caused by a relative displacement between a main scale formed thereon with an optical grating and an index scale formed thereon with an optical grating corresponding to the optical grating of the main scale.

In the field of measuring a feed rate and the like of a tool in a machine tool, there are widely used an optical encoder wherein a main scale formed with a first grating is fixed onto one of opposing members, an index scale formed with a second grating, a lighting system including a light source and a light-receiving element are fixed onto the other, and a detection signal periodically variable in accordance with a relative movement between the opposing members is produced.

The conventional optical encoder has used a collimated lighting system in general, whereby the first grating and the second grating have been equal in pitch.

In contrast thereto, the present applicant has proposed an encoder wherein the pitch of the second grating is 1/n (n is a natural member) of the pitch of the first grating in Japanese Patent Application No. 61-191532, in which an encoder having an even number n is constructed as shown in Fig. 11 for example.

The optical encoder shown in Fig. 11 mainly comprises: a collimated lighting system 10 including a light-eritting diode (LED) 12 and a collimator lens 14 and having an effective wave length A ; a main scale 16formed with a first grating 18 of a pitch P, an index scale 20 spaced v (gap) apart from the first grating 18 and formed with a second grating 22 of a pitch Q P/(2n) (n is a natural number); a light-receiving element 24 for photoelectrically transducing a light emitted from the collimated lighting system 10 and filtered through the first and the second gratings 18 and 22; and a preamplifier 26 for amplifying a output signal therefrom to obtain a detection signal a.

An S/N ratio of the detection signal a is normally represented by a ratio of PP/DC between an amplitude PP and a DC component DC. An example of the experimental result in a case of a pitch Q = P/2 and, when a grating gap v is varied, is indicated by a solid line A in Fig. 12.

Since the S/N ratio (= PP/DC) of the detection signal a is fluctuated by the grating gap v as apparent from Fig. 12, if the index scale 20 is fixed at a position where PP/DC is at the minimum at the time of assembling the encoder, then the S/N ratio of the detection signal a is lowered so that the resistance to noises is deteriorated. Thereby presenting the problems that the positioning accuracy becomes severe and the encoder is increased in the cost.

Furthermore, the optical encoder includes a transmission type one for detecting a light transmitted through the main scale 16 as shown in Fig. 11 and a reflection type one for detecting a light reflected br the main scale. In the latter, i.e. the reflection type one, a light-emitting element and light-receiving element are provided at one side with respect to the main scale, so that the latter features that assembling into a machine tool and the like can be facilitated.

Fig. 15 shows an example of the reflection type encoder utilizing the conventional collimated lighting rays and comprises: the emitting diode 12 as being the light source; the collimator lens 14 for making the light emitted from the light-emitting diode 12 to be the collimated lighting rays; the main scale 16 formed with the periodical first grating 18; the light-transeitting index scale 20 formed with the periodical second grating 22 corresponding to the first grating 18 of the main scale 16 and provided movably relative to the main scale 16; and the light-receiving element 24 for photoelectrically transducing reflected rays R from the collimated lighting system, said reflected raYs R reflected by the first grating 18 of the main scale 16 and transmitted through the second grating 22 of the index scale 20; whereby a periodical detection signal is produced in accordance with a relative displacement between the main scale 16 and the index scale 20.

However, the use of the collimated lighting rays requires a large collimator lens 14 having high accuracy, whereby the encoder becomes large-sized in the thicknessvise direction (D), and suffers from the problems that the methods of fixing and positioning of the elements are difficult to perform.

To solve the above-described problems, the present applicant has already proposed a reflection type encoder in which a diffusive light source is used as it is as shown in Fig 16, in Japanese Patent Application No. 61-194183.

This reflect-ion type encoder comprises: a lighting system consisting of a laser diode (LD) tip 34 itself as being the diffusive light source (a point light source); the main scale 16 formed with the periodical first grating 18; the light-transmitting index scale 20 formed with the periodical second grating 22 corresponding to the first grating 18 of the main scale 16; and a light-receiving element 24 for photoelectrically transducing a light from the lighting system, said light reflected by the first grating 18 of the main scale 16 and transmitted through the second grating 22 of the index scale 20; whereby a periodical detection signal is produced in accordance with a relative displacement in a direction X between the main scale 16 and the index scale 20.

The LD tip 34 is housed in a container 32 provided with a monitor light-receiving element for example.

Here, distances between the LD tip 34 and the first grating 18 and between the second grating 22 and the first grating 18 are set at u and v, respectively, and pitches of the first grating 18 and the second grating 22 are set at P and Q, respectively. Further, when the most practical arrangement of u = v is adopted as proposed in Japanese Patent Application No. 61-194183, if Q = 2P is adopted from the similarity, then a detection signal having a satisfactory S/N ratio can be obtained.

Further, in a coherent case where the point light source (LD tip 34) has a coherence, even under Q = P, a detection signal can be obtained due to the diffraction effect as proposed in Japanese Patent Application No. 61-194184.

Further, that, under Q = 2P/m (m is a natural number), a detection signal is obtainable in general has been made clear from Japanese Patent Application Nos. 61-208554 and 61-208555 which were proposed by the present applicant.

As described above, the reflection type encoder, in which the point light source (34) is used as it is, is effective in rendering the encoder small-sized in the thicknesswise derection (D).

However, in the use of the laser diode, although the LD tiP 34 itself is small in size, the container 32 for the LD tip 34 is relatively large in consideration of the radiant heat and the like, and particularly, in the arrangement of u v, it is difficult to place the light source and the lightreceiving element 24 close to each other, and the encoder cannot be made so small in size in a direction Parallel to a plane where the graduation (the first grating 18) of the main scale 16 is formed.

Furthermore, it is necessary to support the point light source obliquely and, normally, it is necessary to provide a plurality of pairs of the second gratings 22 and the lightreceiving elements 24 in association with phases of O" , 90" 1800 , 270" , etc. of the detection signal. However, the encoder of this type suffered from the problems that methods of arranging and supporting the above members were difficult to perform.

The present invention has been developed to obviate the above-described disadvantages of the related art and has as its first object the provision of an optical encoder in which the dependence of the S/N ratio of the detection signal on the grating gap is lower than that in the past.

It is a second object of the present invention to provide a reflection type encoder having an arrangement in which the encoder can be rendered small in size not only in the thicknesswise direction but also in a direction parallel to a plane where the graduation of the main scale is formed.

To achieve the first object, according to a first aspect of the present invention, in an optical encoder comprising: a coherent diffusive light source having an effective wave length A; a main scale provided at a position spaced u apart from the diffusive light source and formed with a first grating of a pitch P; an index scale provided at a position spaced v apart from the first grating and formed with a second grating; and a light-receiving element for photoelectrically transducing a light emitted from the diffusive light source and filtered through the first and second gratings; wherein a detection signal periodically variable in accordance with a relative displacement between the main scale and the index scale is produced, the light-receiving element is adapted to receive two rays satisfying the relationship between the following equations in order to remove a component of fluctuations due to the grating gap v of a geometric image of the first grating in the detection signal, { U2 V2 / ( U2 + V2 ) } - ( U1 v1 / ( u1 + V1 ) } # mP / # ... ... ... (1) W n { ( u2 + V 2 ) S I n 6 2 - ( U + v, ) sin6 i ) ...... ( 2 ) where n and n are integers, ul and u2 are lengths of light paths of the rays between the diffusive light source and the first grating, v1 and v2 are lengths of light paths of the rays between the first and second gratings, V is a center interval between the rays on the second grating, and #1 and #2 are angles made by a perpendicular line drawn from the diffusive light source to the gratings with the rays.

Furthermore, to achieve the first object according to the first aspect of the present invention, in the optical encoder similar to the above, two of the above-described light receiving elements are provided and the respective lightreceiving elements are adapted to receive two rays satisfying the relationship between the following equations, and a sum of outputs from the respective light-receiving elements is made to be the detection signal, ( U2 V2 ) / ( U2 + V2 ) - ( u, V ) / ( u1 + Vi ) * mp2 /22 ... ...... (3) L - n { ( u2 + V2 ) sinS 2 - ( u, + v, ) sinS i ) ( 4 ) where m and n are integers, u1 and u2 are lengths of light paths of the rays between the diffusive light source and the first grating, v1 and v2 are lengths of light paths of the rays between the first and second gratings, L is a center interval between the rars on the second grating, and Ol and 6 2 are angles made by a perpendicular line drawn from the diffusive light source to the gratings with the rays.

Further, to achieve the first object, according to the first aspect of the present invention, in an optical encoder comprising; a coherent collimated lighting system having an effective wave length #; a main scale formed with a first grating of a pitch P; an index scale formedwith a second grating of a pitch Q corresponding to a higher harmonic of 2n order (n is a natural number) of the first grating; and a light-receiving element for photoelectrically transducing a light emitted from the lighting system and filtered through the first and second gratings; wherein a detection signal periodically variable in accordance with a relative displacement between the main scale and the index scale is produced, the index scale is leaned to the main scale in order to remove a component of fluctuations due to the grating gap of a geometric image of the first grating in the detection signal.

Furthermore, the pitch Q is set at P/(2n) and the leaned value S of the index scale is set at mQ2 /A (m is a natural number) Additionally, the pitch Q is set at P/(2n), the lightreceiving element is divided into two, and the leaned value 6 of the index scale between the centers of gravity of the divided light-receiving elements is set at mQ2 / (2/7) (m is a natural number).

The principle of the first aspect of the present invention will hereunder be described.

If an optical grating of a pitch P is illuminated by a coherent collimated rays or diffused rays, it is known according to the Fresnel diffraction theory that a geometric image having the same pitch P as the original grating and a diffractive image having the pitch of 1/2 of the original grating, i.e. P/2 are formed at a position spaced v (grating gap) apart from the grating. Among these, the S/N ratio of the geometric image is greatly and periodically varied by the change in the grating gaP v.

Further, in general, the optical grating is formed to provide a light-dark fringe-shaped graduation, and includes higher harmonic components to a large extent when the optical grating is Fourier-analyzed. It was made clear by the present applicant that these higher harmonic components each have the geometric image and the diffractive image, respectively, in Japanese Patent Application No. 61-208554, etc.

When consideration is given to the result of experiments (solid line A) in Fig. 12 in view of the above, it is apparent that this PP/DC curve is a composite between an S/N ratio of a diffractive image (pitch P/2) of the original grating (pitch P) of the first grating (broken line B in Fig. 12) and an S/N ratio of a geometric image (pitch P/2) of a secondary higher harmonic (pitch P/2) of the first grating (one-dot chain line C in Fig. 12).

As apparent from Fig. 12, the S/N ratio of the geometric image (one-dot chain line C) has the dependence on the gap, and peaks G1, G2, G3, G4 ... are located at positions where the grating gap v is of Q2 /A multiplied by integers, and the phases are inverted at the peaks G1, G2, G3, G4 ...

Consequently, in a case of the collimated lighting system, when a leaned value s = mQ2 / A (m is a natural number), which is the cycles of fluctuations multiplied by integers, is given to the index scale 20 as shown in Fig. 13, the geometric image is integrated by a component of cycles during which the S/N ratio varies, so that the component of variations is removed. For this reason, the dependence of the S/N ratio of the detection signal on the grating gap v is substantially eliminated.

Furthermore, in a case where two light-receiving elements 24A and 24B are provided and a sum of outputs of these lightreceiving elements is taken by an adder 28 as shown in Fig.

14, the leaned value & of the index scale 20 between the centers of gravity of the distribution of the values of illuminating light to the divided light-receiving elements 24A and 24B may be mQ2 /(2R ). This means that, in Fig. 12 for example, signals of a point R1 and the peak G1 are added to each other and a sum thereof is constant.

However, when the diffusive light source such as a laser diode is used as it is, if the second gratings 22 and the light-receiving elements 24 are provided in a plurality of stages in the widthwise direction of the index scale 20 particularly for the purposes of directional discrimination, phase division and the like, the inclination of the index scale 20 as a whole excessively increases differences in distances between the respective light-receiving elements 24, so that the values of received light become unbalanced disadvantageously. Furthermore, there remains the problem that this method cannot be applied to the reflection type encoder in which onlr the second grating cannot be leaned.

In contrast thereto, in an example of the first aspect of the present invention, the index scale is not leaned, and instead the position of the light-receiving element 24 is offset from a position ZO of a foot of a perpendicular line drawn from a diffusive light source 30 such as a laser dioce to the first grating 18 and the second grating 22 as shown in Fig. 1 for example, and the size (W) of the light-receiving element in a widthwise direction of the scales is set at a size capable of receiving two rays B1 and B? which satisfy the relationship between the following equations in order for the light-receiving element 24 to be able to simultaneously receive a component of cycles of fluctuations.

( U2 V2 / ( U2 + V2 ) ) - ( U Vi / ( u, + Vi ) ) = mP 2 / A ... ... ... ( 1 ) w # n ( ( u2 + v2 ) sinE 2 - ( u1 + v1 ) sinE i ) -- --- ( 2 ) where m and n are integers (1, 2, 3, ...), P is a pitch of the first grating 18, # is an effective wave length of the diffusive light source 30, ul and u2 are lengths of light paths of the rays B1 and B2 between the diffusive light source 30 and the first grating 18, v1 and v2 are lengths of light paths of the rars B1 and B2 between the first grating 18 and the second grating 22, W is a center interval between the rays B1 and B2 on the second grating 22 (= Z2 - Z1 -. the size of the light-receiving element 24 in the widthwise direction of the scales), and 61 and 62 are angles made by perpendicular line drawn from the diffusing light source 30 to the gratings 18 and 22 with the rays B1 and B2.

Particularly, in the case of the reflection type encoder, u2 = v2 and ul = vl. Therefore, when these are substituted into u2 = v2 = d2 and ul = v1 = dl, the afore-mentioned equations (1) and (2) are represented by the following equations.

( - d1 ) /2 = mP 2 / A ( 5 W n 2 n ( d2 sinS 2 - di sin# i ) ... ( 6 ) A factor of a term of the dependence of the geometric image on the grating gap is cos [th uv/fP2 (u + Consequently, when it is determined that the relationship between the optical distances ul, u2 and v1, v2 of the two rays B1 and B2 from the diffusive light source 30 satisfies the afore-mentioned equations (1), (2) or (5), (6), the components of cycles of fluctuations are simultaneously received, so that the geometric image can be substantially offset. This fact has been as certained by the experiments.

Accordingly, necessity of leaning the index scale is eliminated. Even when the diffusive light sourse is used or the reflection type encoder is used, the dependence of the S/N ratio of the detection signal on the grating gap can be decreased.

Incidentally, what is important in the above-described example of the first aspect of the present invention is that the light-receiving element 24 receives the two rays B1 and B2 which satisfy the afore-mentioned equations (1) and (2). If this condition is satisfied, then. the position of the lightreceiving element 24 need not necessarily be offset from the position ZO of the foot of the afore-mentioned perpendicular line, and the light-receiving element may be provided at a position including the position ZO of the foot of the perpendicular line. Furthermore, one of the rays, e.g. B1 may coincide with the perpendicular line.Incidentally, when the position of the light-receiving element 24 is completely offset from the position ZO of the foot of the perpendicular line as shown in the example of Fig. 1, another set of the second grating 22 and the light-receiving element 24 which have substantially the same light-receiving signal level can be provided at a symmetrical position as will be shown in a first embodiment to be described hereunder, so that two sets of the second gratings 22 different in phase from each other can be easily provided for the purposes of directional discrimination, phase division and the like.

Furthermore, the light-receiving element 24 need not necessarily have the size in which the rays B1 and B2 are simultaneously received by a single light-receiving element 24. For example, as shown in Fig. 2, a single detection signal is formed such that two light-receiving elements (24A and 24B) are provided at a predetermined center interval (L), the respective light-receiving elements receive two rays C1 and C2 which are a half cycle different in grating gap dependence from each other and satisfy the relationship between the following equations, and thereafter, a sum therebetween is calculated to obtain a detection signal.

( U2 V2 ) / ( U2 + V2 ) - ( u1 Vi ) / ( u1 + V1 ) # mP / 2 # ... ... ... (3) L 4 n ( ( U2 + V2 ) sin# 2 - ( u1 + v1 ) sinG 1 ) ( 4 ) where L is a center interval between the rays C1 and C2 on the second grating 22- ( the center interval between the lightreceiving elements 24A and 24B), and other symbols are substantially the same as in the case of the equations (1) and (2).

Particularly, in the case of the reflection type encoder, similarly to the preceding case, the afore-mentioned equations (3) and (4) are represented by the following equations.

d2 - d, = mP 2 / # ... ... ... ( 7 ) L - 2 n ( d2 sin# 2 - d1 sinG i ) ( 8 ) Accordingly, in the above-described cases, the sum between the outputs from the respective light-receiving elements 24A and 24B which are a half cycle different from each other is made to be a detection signal, so that the geometric image may be substantially offset.

As has been described hereinabove, according to the first aspect of the present invention, not only in the use of the collimated lighting, but also in the use of the diffused rays and of the reflection type encoder, the signal due to the geometric image in the detection signal can be removed, so that the dependence of the S/N ratio of the detection signal on the grating gap can be substantially avoided. Thus offering the outstanding advantages that the positioning accuracy becomes less severe, the detector can be reduced in cost, and so forth.

To achieve the second object, according to a second aspect of the present invention, in a reflection type encoder comprising: a lighting system; a main scale formed with a periodical first grating; a light transmitting index scale formed with corresponding periodical second gratings, and a light-receiving element for photoelectrically trasducing a light emitted from the lighting system, reflected by the first grating and transmitted through the second grating; wherein a periodical detection signal is produced in accordance with a relative displacement between the both scales, the lighting system includes a point light source and a condensing lens for focusing diffused rars from the point light source to form a secondary point light source; and the secondary point light source is adapted to position on a plane where the second grating of the index scale is formed.

More specifically, according to the second aspect of the present invention, when the reflection type encoder is used, in which the point light source is used as it is and the lighting rays are not collimated, the diffused rays from the primary point light source are focused by the condensing lens to produce the secondary point light source, and the secondary point light source is adapted to position on the plane where the second grating of the index scale is formed.

Consequently, the condensing lens smaller in diameter than a collimator lens is used in the reflection type encoder, so that the encoder can be reduced in shape not only in a thicknesswise direction thereof but also in a direction parallel to a plane where the graduation of the main scale is formed. Furthermore, necessity of obliquely supporting the point light source and the like is eliminated, and it becomes easy to support and Position the respective elements.

Furthermore, when a columnar distributed refractive index type lens is adopted as the condensing lens, the condensing lens can be formed Particularly small, thus enabling the encoder to be compact in size.

When the second gratings, which are divided into four sections that are 90" different in phase from one another, and the secondary point light source is formed at the center of the second gratings of the four sections, the second gratings of the four sections can be illuminated substantially uniformly, and moreover, the encoder can be made compact in size.

Furthermore, when the secondary Point light source is positioned at an opening on the plane where the second gratings are formed, no excessive diffused rays are illuminated on the gratings, so that the detection signal having a satisfactory S/N ratio can be obtained.

The exact nature of this invention, as well as other objects and advantages thereof, will be readily apparent from consideration of the following specification relating to the accompanying drawings, in which like reference characters designate the same or similar parts throughout the figures thereof and wherein:: Figs. 1 and 2 are charts in explanation of the principle of the first aspect of the present invention; Fig. 3 is a perspective view showing the general arrangement of a first embodiment of the present invention; Fig. 4 is a cross-sectional view taken along the line IV -IV in Fig. 3; Fig. 5 is a cross-sectional view taken along the line V V in Fig. 4; Fig. 6 is a sectional view showing the general arrangement of a second embodiment of the present invention; Fig. 7 is a perspective view showing the general arrangement of a third embodiment of the present invention; Fig. 8 is a cross-sectional view taken along the line VIII - VIII in Fig. 7; Fig. 9 is a cross-sectional view taken along the line IX - IX in Fig. 8;; Fig. 10 is a perspective view showing the general arrangement of a fourth embodiment of the present invention; Fig. 11 is a Plan view showing the arrangement of a related art proposed br the Present applicant in Japanese Patent Application No. 61-191532; Fig. 12 is a chart showing the dependence of the S/N ratio of the detection signal-on the grating gap in the aforementioned related art; Fig. 13 is a sectional view in the direction indicated by the arrows XIII in Fig.lO, showing the theoretical arrangement of one example of the first aspect of the present invention; Fig. 14 is a sectional view showing the theoretical arrangement of another example of the first aspect of the present invention; ; Fig. 15 is a sectional view showing the arrangement of an example of the reflection type encoder using the conventional collimated lighting rays; and Fig. 16 is a sectional view showing the arrangement of an example of the reflection type encoder using the diffusive light source as it is, which has been proposed by the Present applicant in JaPanese Patent Application No. 61-194183.

Embodiments of the reflection type encoder, to which is applied the present invention vill hereunder be described in detail vith reference to the accompanying dravings.

According to the first embodiment of the present invention, as shown in Figs. 3 to 5, in a reflection type linear encoder comprising: a diffusive light source 30 including an LD tip 34 (Refer to Fig. 4) received in a container 32; a main scale 16 formed with a first grating 18 of a pitch P; a light transmitting index scale 20 formed with corresponding four second gratings 22A, 22B, 22C, 22D (Refer to Fig. 5); and four light-receiving elements 24 (Refer to Fig. 4) for photoelectricalYy transducing a light emitted from the diffusive light source 30, reflected by the first grating 18 and transmitted through the respective second gratings 22A to 22D; wherein two detection signals a and b are produced in accordance with a relative displacement between the main scale 16 and the index scale 20, the size of each of the light-receiving elements 24 in the widthwise direction of the scales is set at a size, within which two rars B1 and 82 (Refer to Fig. 1) having a center interval V and satisfying the relationship between the aforementioned equations (5) and (6) can be received at the positions of the respective second gratings 22A to 22D.

As shown in Fig. 4 in detail, the diffusive light source 30 includes: the LD tip 34 as being the primary point light source; and a columnar distributed refractive index tYPe lens 40 as being a condensing lens for focusing the deffused rays from the LD tip 34 to form a secondary point light source.

Further, the secondary point light source is adapted to position on a plane (chromium-deposited surface) 42 where the second grating 22A to 22D in the index scale 20 is formed.

The main scale 16 is made of a glass plate, and, as shown in Fig. 3, is formed at one surface (outer surface) thereof vith the first grating 18 formed of a fringe-shaped periodical graduation of a pitch P.

As shown in Fig. 5 in detail, in the index scale 20, the second gratings 22A, 22B, 22C and 22D having pitches equal to one another and formed into four sections corresponding in phase to 0 , 180- , 90" and 270 , and a central opening 52 at which the secondary light source is positioned and the light is passed therethrough are formed in the chromiumdeposited surface 42.

The central opening 52 has a height of 0.4 mm and a width of 0.1 mm for example. Focused in this central opening 52 by the distrilbuted refractive index type lens 40 (e.g.

Selfoclens (trade mark), a product of Nippon Sheet Glass Co., Ltd.) are the diffused rays from the LD tip 34, whereby a secondary point light source 54 is formed (Refer to Fig. 4).

As shown in Fig. 4, the four light-receiving elements 24 corresponding to the second gratings 22A to 22D, respectively, are arranged on a light-receiving board 56. The second gratings 22A to 22D are in a positional relationship indicated br broken lines in Fig. 5, whereby the respective two second gratings constitute each of pairs, and detection signals a and b are produced therefrom by differential amplifiers 60 and 62.

The distributed refractive index type lens 40 is also inserted into the center of the light-receiving board 56.

For example, when the grating pitch P = 8 ,c m, the wave length of the light source # = 0.8 m, m = n = 1, u = v = d = 5 mm, and # 1 = 80 in this first embodiment, dl, d2 and 6 2 in the afore-mentioned equations (5) and (6) become as shown below.

dl = d/cos 81 . 5.049 mm d2 = 2P2 / + dl 5.209 mm 2 = 16.3 because cos # 2 # 5/5.209 When these are substituted into the equation (6), W # 1.518 . 1.5 mm. Consequently, if the size of each of the light-receiving elements 24 in the widthwise direction of the scales is set at a size within which the two rays BI and B2 that have the center interval W # 1.5 ma can be received or at a size multiplied by integers at the positions of the respective second gratings 22A to 22D, then the geometric image can be substantially offset.

In this embodiment, necessity of increasing the number of the light-receiving elements can be eliminated, so that the encoder can be simplified in construction.

Furthermore, in this embodiment, the secondary point light source 54 is formed by use of the distributed refractive index type lens 40, so that the substantially ideal diffused rays can be obtained. Incidentally, the method of forming the diffusive light source 30 need not be limited to this, and a laser diode may be directly adopted as the diffusive light source, or a tungsten lamp and a light-emitting diode other then the laser diode can be used.

The second embodiment of the present invention will hereunder be described in detail.

According to this second embodiment, in the reflection type encoder similar to the one in the first embodiment, as shown in Fig. 6, two light-receiving elements 24 (24A and 24B) corresponding to the respective second gratings 22A to 22D are provided, the center interval of the respective lightreceiving elements 24A and 24B in the widthwise direction of the scale is set at a size corresponding to the interval L in the equation (8) so that the two rays C1 and C2 (Refer to Fig.

2) satisfying the relationship between the afore-mentiond equation (7) and (8) can be received at the position of the corresponding second gratings 22A to 22D, further, the sums of outputs from the respective light-receiving elements 24A and 24B are obtained by means of adders 64A to 64D, the results are differentially amplified by means of the differential amplifiers 60 and 62 which are similar to the ones shown in the first embodiment, and two detection signals a and b for making directional discrimination, phase division, etc. are obtained.

In this second embodiment, for example, if the grating pitch P = 8 > tm, the wave length of the light source A . 0.8 > rm, m = n = 1, u = v = d = 5 mm, and #1 = : 8" . then dl, d2 and # 2 of the equations (7) and (8) become as shown below.

dl . 5.049 mm d2 = 5.129 mii 92 f 12.9" when these are substituted into the equation (8), L ,- 0.884 0.9 mm. Therefore, if the center interval between the respective light-receiving elements 24A and 24B in the widthwise direction of the scale are about 0.9 mm or 0.9 mm multiplied by integers at the positions of the second gratings 22A to 22D, then the geometric image can be substantially offset by taking the sum of the outputs.

The third-embodiment of the present invention will hereunder be described in detail.

As shown in Fig. 7, the main scale 16 of the third embodiment is formed with: the first grating 18 similar to the one shown in the first embodiment: a track 43 for first absolute zero point (ABS) marks, including the first ABS marks 44 made of a random pattern and a chromium-deposited section 45 formed therebetween; and a chromium-deposited surface 46 for producing a reference signal of an ABS signal.

Furthermore, as shown in Fig. 9 in detail, the index scale 18 of the third embodiment is formed with; the second gratings 22A, 22B, 22C and 22D, and the opening 52 similar to those shown in the first embodiment; a second ABS mark 48 made of a pattern obtained by doubling the first ABS marks 44; and a reference ABS mark 50 being in fringed shape in a direction Perpendicular to the second gratings 20A to 20D so that the value of the transmitted light is decreased to be balanced with the value of light transmitted through the ABS marks 44 and 48.

As shown in Fig. 8, 6 light-receiving elements 22 corresponding to the four second gratings 22A to 22D, the second ABS mark 48 and the reference ABS mark 50, respectively, are provided on the light-receiving board 56 in a positional relationship indicated by broken lines in Fig. 9, with 2 light-receiving elements 22 constituting a pair, respectively. A signal produced by the second ABS mark 48 is comPared with a signal produced by the reference ABS mark 50 in a comparator 58 to be turned into the ABS signal Z, and signals produced by the second gratings 22A to 22D are turned into the two detection signals a and b by means of the differential amplifiers 60 and 62.

Here, the gap v between the plane where the first grating 18 is formed and the plane where the second grating is formed (chromium-deposited surface 42) coincides with the gap u between the secondary point light source 54 and the plane where the first grating 18 is formed. In the experiments, when u (v) = 6 m, P = 8 jt m and Q = 8 fin, pitches of the detection signals a and b were 4 vim and the S/N ratio was satisfactory.

The distributed refractive index type lens 40 is adopted as the condesing lens in this embodiment, so that the detector can be rendered compact in size in Particular. Incidentally, the construction of the condensing lens need not be limited to this, and an ordinary glass lens may be adopted.

Incidentally, when the condensing lens is used in this way, the encoder is considered as becoming large-sized in the thicknesswise direction at a glance. However, the condensing lens can be small-sized, so t-hat even this anangement can be smaller in size than the case where the collimated rays are obtained by means of the conventional collimator lens.

Since the secondary point light source 54 is provided at the central position of the four sections of the second gratings 22A to 22D in this embodiment, the respective second gratings can be illuminated substantially uniformly, and moreover, the encoder can be rendered compact in size.

Incidentally, the number of sections of-the second gratings and the position where the secondary point light source 54 is formed need not be limited to this.

Further, since the secondary point light source 54 is focused at the small square opening 52 on the plane where the second grating is formed in this embodiment, no excessive diffused rars are illuminated on the grating 18 and the detection signals a and b having the satisfactory S/N ratios can be obtained. Incidentally, the shape and size of the opening 52 for transmitting therethrough the illuminating rays need not be limited to this.

Furthermore, since the main scale 16 is made of glass and the first grating 18 and the like are formed on the outer surface of the main scale 16 in this embodiment, the encoder can be rendered compact in size by a value of thickness of the main scale 16. Incidentally, the arrangement of the main scale need not be limited to this, and a metallic reflection type scale may be adopted.

Further, since the ABS marks 44 and 48 are combinedly used to obtain the ABS signal Z in this embodiment, correction may be made through the detection of an absolute zero point.

Incidentally, the arrangement for obtaining the ABS signal Z such as the ABS marks may be dispensed with.

The fourth embodiment of the present invention will hereunder be described in detail.

As shown in Fig. 10, according to this fourth embodiment, in an optical encoder comprising: a coherent collimated lighting system 10 having an effective wave length x , including an LED 12 and a collimator lens 14; a main scale 16 formed with a first grating 18 of a pitch P; an index scale 20 formed with two second gratings 22 of a pitch Q corresponding to the higher harmonic of 2n order (n is a natural number) of the first grating 18, with said two second gratings being shifted by 90" in phase from each other; light-receiving elements 24 for photoelectrically transducing rays emitted from the collinated lighting system 10 and filtered through the first and second gratings 18 and 22; and a preamplifier 26 for amplifying outputs from the lightreceiving elements 24, respectively, to obtain the detection signals a and b shifted by 90" in phase from each other; as shown in Fig. 13 in detail, the index scale 20 is leaned to the main scale 16 by a leaned value g = m 3 (m is a natural number) so that a component of fluctuations in the detection signals a and b due to the grating gap v of the geometric image of the first grating 18 can be removed.

As the light source of the collimated lighting system 10, a laser diode is ideal. However, a tungsten lamP or the LED 12 used in the embodiment may be adopted.

Now, when the pitch P of the first grating 18 is set at 20 A n, the pitch Q of the second gratings 22 may be set at 10 Am (m = 1) or 5 ytm (m = 2) . . . for example.

Since a component of fluctuations due to a geometric image indicated by a one-dot chain line C in Fig. 12 is removed fron a component of fluctuations due to the grating gap v of the detection signals as indicated by a solid line A in Fig.12 in this fourth embodiment, detection signals can be obtained which are indicated by a broken line B in Fig.12 and have a high S/N ratio due to the diffractive image, which is substantially constant irrespective of the grating gap.

The fifth embodiment will hereunder be described in detail.

As has shown in Fig. 14, in this fifth embodiment, the light-receiving element is vertically divided into two elements 24A and 24B and one of the detection signals, e.g.

the detection signal b is obtained after the addition is performed in the adder 28. The other a of the detection signals is similarly obtained as a sum signal of the two light-receiving elements.

In this fifth embodiment, a leaned value g between the centers of gravity of distribution of the value of illuminating light to the light-receiving elements 24A and 24B of the index scale 20 is set at mQ2 /(2A).

Other respects of the arrangement and action are similar to those shown in the fourth embodiment, so that description will be omitted.

Incidentally, in all of the above embodiments, the present invention has been applied to the encoders including the scales made of glass, however, the scope of application of the present invention need not be limited to this, and the present invention can be applied to an encoder including a metallic scale and to a rotary encoder.

Claims

1. A reflection type optical encoder comprising a lighting system; a main scale formed with a periodical first grating; a light-transmitting index scale formed with corresponding periodical second gratings; and a lightreceiving element for photoelectrically transducing a light emitted from the lighting system, reflected by the first grating and transmitted through the second grating; wherein a periodical detection signal is produced in accordance with a relative displacement between the two scales; characterised in that the lighting system includes a point light source and a condensing lens for focusing diffused rays from the point light source to form.a.secondary point light source; and the secondary poiri't point light source is positioned on a plane where the second grating of the index scale is formed.

2. A reflection type optical encoder according to claim 6, wherein the condensing lens is a columnar distributed refractive index type lens.

3. A reflection type optical encoder according to claim 1 or claim 2, wherein the second gratings are divided into four sections 900 different in phase from one another, and the secondary point light source is formed at the center of the second gratings of the four sections.

4. A reflection type optical encoder according to any one of the preceding claims, wherein the secondary point light source is positioned at an opening on a plane where the second gratings are formed.