JPH01216213A - 光学式変位検出器 - Google Patents

光学式変位検出器

Info

Publication number
JPH01216213A
JPH01216213A JP4262688A JP4262688A JPH01216213A JP H01216213 A JPH01216213 A JP H01216213A JP 4262688 A JP4262688 A JP 4262688A JP 4262688 A JP4262688 A JP 4262688A JP H01216213 A JPH01216213 A JP H01216213A
Authority
JP
Japan
Prior art keywords
grating
light source
gratings
light
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4262688A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0577967B2 (enrdf_load_stackoverflow
Inventor
Soji Ichikawa
宗次 市川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Original Assignee
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp, Mitsutoyo Kiko Co Ltd filed Critical Mitutoyo Corp
Priority to JP4262688A priority Critical patent/JPH01216213A/ja
Priority to US07/298,430 priority patent/US4943716A/en
Priority to IN56CA1989 priority patent/IN172342B/en
Priority to GB8901266A priority patent/GB2216650B/en
Priority to CN89101060.2A priority patent/CN1014935B/zh
Priority to CN 91105460 priority patent/CN1017658B/zh
Priority to DE3901869A priority patent/DE3901869C2/de
Publication of JPH01216213A publication Critical patent/JPH01216213A/ja
Priority to US07/490,389 priority patent/US4985623A/en
Priority to US07/490,463 priority patent/US4983825A/en
Priority to GB9117366A priority patent/GB2246430B/en
Priority to GB9117368A priority patent/GB2246431B/en
Publication of JPH0577967B2 publication Critical patent/JPH0577967B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
JP4262688A 1987-09-16 1988-02-25 光学式変位検出器 Granted JPH01216213A (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP4262688A JPH01216213A (ja) 1988-02-25 1988-02-25 光学式変位検出器
US07/298,430 US4943716A (en) 1988-01-22 1989-01-18 Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations
IN56CA1989 IN172342B (enrdf_load_stackoverflow) 1987-09-16 1989-01-18
GB8901266A GB2216650B (en) 1988-01-22 1989-01-20 Optical encoder
CN 91105460 CN1017658B (zh) 1988-01-22 1989-01-21 光学编码器
CN89101060.2A CN1014935B (zh) 1988-01-22 1989-01-21 光学编码器
DE3901869A DE3901869C2 (de) 1988-01-22 1989-01-23 Optischer Codierer
US07/490,389 US4985623A (en) 1988-01-22 1990-03-08 Diffraction-type optical encoder with improved detection signal insensitivity to optical grating gap variations
US07/490,463 US4983825A (en) 1988-01-22 1990-03-08 Diffraction type optical encoder with improved detection signal insensitivity to optical grating gap variations
GB9117366A GB2246430B (en) 1988-01-22 1991-08-12 Optical encoder
GB9117368A GB2246431B (en) 1988-01-22 1991-08-12 Optical encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4262688A JPH01216213A (ja) 1988-02-25 1988-02-25 光学式変位検出器

Publications (2)

Publication Number Publication Date
JPH01216213A true JPH01216213A (ja) 1989-08-30
JPH0577967B2 JPH0577967B2 (enrdf_load_stackoverflow) 1993-10-27

Family

ID=12641225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4262688A Granted JPH01216213A (ja) 1987-09-16 1988-02-25 光学式変位検出器

Country Status (1)

Country Link
JP (1) JPH01216213A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2015068662A1 (ja) * 2013-11-05 2017-03-09 日本精工株式会社 光学式エンコーダユニット及び光学式エンコーダ
CN107764193A (zh) * 2016-08-19 2018-03-06 株式会社斯库林集团 位移检测装置、位移检测方法及基板处理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2015068662A1 (ja) * 2013-11-05 2017-03-09 日本精工株式会社 光学式エンコーダユニット及び光学式エンコーダ
CN107764193A (zh) * 2016-08-19 2018-03-06 株式会社斯库林集团 位移检测装置、位移检测方法及基板处理装置
US10580163B2 (en) 2016-08-19 2020-03-03 SCREEN Holdings Co., Ltd. Displacement detecting apparatus, displacement detecting method and substrate processing apparatus

Also Published As

Publication number Publication date
JPH0577967B2 (enrdf_load_stackoverflow) 1993-10-27

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Legal Events

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