JPH0577185B2 - - Google Patents

Info

Publication number
JPH0577185B2
JPH0577185B2 JP61037791A JP3779186A JPH0577185B2 JP H0577185 B2 JPH0577185 B2 JP H0577185B2 JP 61037791 A JP61037791 A JP 61037791A JP 3779186 A JP3779186 A JP 3779186A JP H0577185 B2 JPH0577185 B2 JP H0577185B2
Authority
JP
Japan
Prior art keywords
layer
wiring
film
hole
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61037791A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62194647A (ja
Inventor
Junichi Arima
Shigeru Harada
Masanori Obata
Junichi Morya
Hidefumi Kuroki
Reiji Tamaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3779186A priority Critical patent/JPS62194647A/ja
Publication of JPS62194647A publication Critical patent/JPS62194647A/ja
Publication of JPH0577185B2 publication Critical patent/JPH0577185B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP3779186A 1986-02-20 1986-02-20 半導体装置 Granted JPS62194647A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3779186A JPS62194647A (ja) 1986-02-20 1986-02-20 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3779186A JPS62194647A (ja) 1986-02-20 1986-02-20 半導体装置

Publications (2)

Publication Number Publication Date
JPS62194647A JPS62194647A (ja) 1987-08-27
JPH0577185B2 true JPH0577185B2 (enrdf_load_stackoverflow) 1993-10-26

Family

ID=12507314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3779186A Granted JPS62194647A (ja) 1986-02-20 1986-02-20 半導体装置

Country Status (1)

Country Link
JP (1) JPS62194647A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62281451A (ja) * 1986-05-30 1987-12-07 Fujitsu Ltd 半導体装置
JPH0279447A (ja) * 1988-09-14 1990-03-20 Mitsubishi Electric Corp 半導体装置の製造方法
JPH0373531A (ja) * 1989-08-14 1991-03-28 Nec Corp 多層配線構造を有する半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH065674B2 (ja) * 1985-07-10 1994-01-19 松下電子工業株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS62194647A (ja) 1987-08-27

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