JPH0575963B2 - - Google Patents

Info

Publication number
JPH0575963B2
JPH0575963B2 JP1415688A JP1415688A JPH0575963B2 JP H0575963 B2 JPH0575963 B2 JP H0575963B2 JP 1415688 A JP1415688 A JP 1415688A JP 1415688 A JP1415688 A JP 1415688A JP H0575963 B2 JPH0575963 B2 JP H0575963B2
Authority
JP
Japan
Prior art keywords
light receiving
actuators
displacement
light
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1415688A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01189504A (ja
Inventor
Tsutomu Fujita
Toshio Takitani
Shigeo Takamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanadevia Corp
Original Assignee
Hitachi Shipbuilding and Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Shipbuilding and Engineering Co Ltd filed Critical Hitachi Shipbuilding and Engineering Co Ltd
Priority to JP1415688A priority Critical patent/JPH01189504A/ja
Publication of JPH01189504A publication Critical patent/JPH01189504A/ja
Publication of JPH0575963B2 publication Critical patent/JPH0575963B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP1415688A 1988-01-25 1988-01-25 ２次元変位計測方法 Granted JPH01189504A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1415688A JPH01189504A (ja) 1988-01-25 1988-01-25 ２次元変位計測方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1415688A JPH01189504A (ja) 1988-01-25 1988-01-25 ２次元変位計測方法

Publications (2)

Publication Number Publication Date
JPH01189504A JPH01189504A (ja) 1989-07-28
JPH0575963B2 true JPH0575963B2 (enExample) 1993-10-21

Family

ID=11853291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1415688A Granted JPH01189504A (ja) 1988-01-25 1988-01-25 ２次元変位計測方法

Country Status (1)

Country Link
JP (1) JPH01189504A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018124342A1 (de) * 2018-10-02 2020-04-02 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren zur Strahlwinkelmessung eines von einer Strahlführungsoptik geführten Lichtstrahls

Also Published As

Publication number Publication date
JPH01189504A (ja) 1989-07-28

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