JPH01189504A - 2次元変位計測方法 - Google Patents
2次元変位計測方法Info
- Publication number
- JPH01189504A JPH01189504A JP1415688A JP1415688A JPH01189504A JP H01189504 A JPH01189504 A JP H01189504A JP 1415688 A JP1415688 A JP 1415688A JP 1415688 A JP1415688 A JP 1415688A JP H01189504 A JPH01189504 A JP H01189504A
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- light
- axis
- guide surface
- receiving surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1415688A JPH01189504A (ja) | 1988-01-25 | 1988-01-25 | 2次元変位計測方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1415688A JPH01189504A (ja) | 1988-01-25 | 1988-01-25 | 2次元変位計測方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01189504A true JPH01189504A (ja) | 1989-07-28 |
| JPH0575963B2 JPH0575963B2 (enExample) | 1993-10-21 |
Family
ID=11853291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1415688A Granted JPH01189504A (ja) | 1988-01-25 | 1988-01-25 | 2次元変位計測方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01189504A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022504295A (ja) * | 2018-10-02 | 2022-01-13 | カール・ツァイス・エスエムティー・ゲーエムベーハー | ビーム誘導光学ユニットによって誘導された光ビームのビーム角を測定するためのデバイスおよび方法 |
-
1988
- 1988-01-25 JP JP1415688A patent/JPH01189504A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022504295A (ja) * | 2018-10-02 | 2022-01-13 | カール・ツァイス・エスエムティー・ゲーエムベーハー | ビーム誘導光学ユニットによって誘導された光ビームのビーム角を測定するためのデバイスおよび方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0575963B2 (enExample) | 1993-10-21 |
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