JPH0575325B2 - - Google Patents

Info

Publication number
JPH0575325B2
JPH0575325B2 JP62097489A JP9748987A JPH0575325B2 JP H0575325 B2 JPH0575325 B2 JP H0575325B2 JP 62097489 A JP62097489 A JP 62097489A JP 9748987 A JP9748987 A JP 9748987A JP H0575325 B2 JPH0575325 B2 JP H0575325B2
Authority
JP
Japan
Prior art keywords
total reflection
reflection surface
light
displacement
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62097489A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63263401A (ja
Inventor
Masakazu Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP9748987A priority Critical patent/JPS63263401A/ja
Publication of JPS63263401A publication Critical patent/JPS63263401A/ja
Publication of JPH0575325B2 publication Critical patent/JPH0575325B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Measurement Of Optical Distance (AREA)
JP9748987A 1987-04-22 1987-04-22 変位測定方法 Granted JPS63263401A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9748987A JPS63263401A (ja) 1987-04-22 1987-04-22 変位測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9748987A JPS63263401A (ja) 1987-04-22 1987-04-22 変位測定方法

Publications (2)

Publication Number Publication Date
JPS63263401A JPS63263401A (ja) 1988-10-31
JPH0575325B2 true JPH0575325B2 (enrdf_load_stackoverflow) 1993-10-20

Family

ID=14193685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9748987A Granted JPS63263401A (ja) 1987-04-22 1987-04-22 変位測定方法

Country Status (1)

Country Link
JP (1) JPS63263401A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2685591B2 (ja) * 1989-07-24 1997-12-03 株式会社日立製作所 磁気ヘツドスライダの浮上量測定装置
US5239183A (en) * 1991-04-30 1993-08-24 Dainippon Screen Mfg. Co., Ltd. Optical gap measuring device using frustrated internal reflection
JP2802868B2 (ja) * 1992-12-22 1998-09-24 大日本スクリーン製造株式会社 半導体ウエハの非接触電気測定用センサおよびその製造方法、並びに、そのセンサを用いた測定方法
JPH06349920A (ja) * 1993-06-08 1994-12-22 Dainippon Screen Mfg Co Ltd 半導体ウェハの電荷量測定方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3873209A (en) * 1973-12-10 1975-03-25 Bell Telephone Labor Inc Measurement of thin films by optical waveguiding technique
JPS63111403A (ja) * 1986-10-30 1988-05-16 Toshiba Corp 変位測定装置

Also Published As

Publication number Publication date
JPS63263401A (ja) 1988-10-31

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Legal Events

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LAPS Cancellation because of no payment of annual fees