JPS63263401A - 変位測定方法 - Google Patents

変位測定方法

Info

Publication number
JPS63263401A
JPS63263401A JP9748987A JP9748987A JPS63263401A JP S63263401 A JPS63263401 A JP S63263401A JP 9748987 A JP9748987 A JP 9748987A JP 9748987 A JP9748987 A JP 9748987A JP S63263401 A JPS63263401 A JP S63263401A
Authority
JP
Japan
Prior art keywords
light
total reflection
displacement
reflection surface
optical component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9748987A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0575325B2 (enrdf_load_stackoverflow
Inventor
Masakazu Hayashi
正和 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP9748987A priority Critical patent/JPS63263401A/ja
Publication of JPS63263401A publication Critical patent/JPS63263401A/ja
Publication of JPH0575325B2 publication Critical patent/JPH0575325B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Measurement Of Optical Distance (AREA)
JP9748987A 1987-04-22 1987-04-22 変位測定方法 Granted JPS63263401A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9748987A JPS63263401A (ja) 1987-04-22 1987-04-22 変位測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9748987A JPS63263401A (ja) 1987-04-22 1987-04-22 変位測定方法

Publications (2)

Publication Number Publication Date
JPS63263401A true JPS63263401A (ja) 1988-10-31
JPH0575325B2 JPH0575325B2 (enrdf_load_stackoverflow) 1993-10-20

Family

ID=14193685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9748987A Granted JPS63263401A (ja) 1987-04-22 1987-04-22 変位測定方法

Country Status (1)

Country Link
JP (1) JPS63263401A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0354405A (ja) * 1989-07-24 1991-03-08 Hitachi Ltd 磁気ヘツドスライダの浮上量測定装置
US5239183A (en) * 1991-04-30 1993-08-24 Dainippon Screen Mfg. Co., Ltd. Optical gap measuring device using frustrated internal reflection
US5475319A (en) * 1993-06-08 1995-12-12 Dainippon Screen Mfg. Co., Ltd. Method of measuring electric charge of semiconductor wafer
US5554939A (en) * 1992-12-22 1996-09-10 Dainippon Screen Manufacturing Co., Ltd. Non-destructive measuring sensor for semiconductor wafer and method of manufacturing the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3873209A (en) * 1973-12-10 1975-03-25 Bell Telephone Labor Inc Measurement of thin films by optical waveguiding technique
JPS63111403A (ja) * 1986-10-30 1988-05-16 Toshiba Corp 変位測定装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3873209A (en) * 1973-12-10 1975-03-25 Bell Telephone Labor Inc Measurement of thin films by optical waveguiding technique
JPS63111403A (ja) * 1986-10-30 1988-05-16 Toshiba Corp 変位測定装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0354405A (ja) * 1989-07-24 1991-03-08 Hitachi Ltd 磁気ヘツドスライダの浮上量測定装置
US5239183A (en) * 1991-04-30 1993-08-24 Dainippon Screen Mfg. Co., Ltd. Optical gap measuring device using frustrated internal reflection
US5554939A (en) * 1992-12-22 1996-09-10 Dainippon Screen Manufacturing Co., Ltd. Non-destructive measuring sensor for semiconductor wafer and method of manufacturing the same
US5475319A (en) * 1993-06-08 1995-12-12 Dainippon Screen Mfg. Co., Ltd. Method of measuring electric charge of semiconductor wafer

Also Published As

Publication number Publication date
JPH0575325B2 (enrdf_load_stackoverflow) 1993-10-20

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