JPH0575063B2 - - Google Patents

Info

Publication number
JPH0575063B2
JPH0575063B2 JP60096594A JP9659485A JPH0575063B2 JP H0575063 B2 JPH0575063 B2 JP H0575063B2 JP 60096594 A JP60096594 A JP 60096594A JP 9659485 A JP9659485 A JP 9659485A JP H0575063 B2 JPH0575063 B2 JP H0575063B2
Authority
JP
Japan
Prior art keywords
filter
color separation
light
separation filter
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60096594A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61256241A (ja
Inventor
Kazuo Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP60096594A priority Critical patent/JPS61256241A/ja
Publication of JPS61256241A publication Critical patent/JPS61256241A/ja
Publication of JPH0575063B2 publication Critical patent/JPH0575063B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Optical Filters (AREA)
JP60096594A 1985-05-09 1985-05-09 色分解フイルタの検査装置 Granted JPS61256241A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60096594A JPS61256241A (ja) 1985-05-09 1985-05-09 色分解フイルタの検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60096594A JPS61256241A (ja) 1985-05-09 1985-05-09 色分解フイルタの検査装置

Publications (2)

Publication Number Publication Date
JPS61256241A JPS61256241A (ja) 1986-11-13
JPH0575063B2 true JPH0575063B2 (enrdf_load_stackoverflow) 1993-10-19

Family

ID=14169222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60096594A Granted JPS61256241A (ja) 1985-05-09 1985-05-09 色分解フイルタの検査装置

Country Status (1)

Country Link
JP (1) JPS61256241A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07101195B2 (ja) * 1991-01-23 1995-11-01 共同印刷株式会社 カラーフィルタの検査方法
TW200702656A (en) * 2005-05-25 2007-01-16 Olympus Corp Surface defect inspection apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58143249A (ja) * 1982-02-19 1983-08-25 Toshiba Corp 欠陥検査装置

Also Published As

Publication number Publication date
JPS61256241A (ja) 1986-11-13

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