JPH0575050B2 - - Google Patents

Info

Publication number
JPH0575050B2
JPH0575050B2 JP20765985A JP20765985A JPH0575050B2 JP H0575050 B2 JPH0575050 B2 JP H0575050B2 JP 20765985 A JP20765985 A JP 20765985A JP 20765985 A JP20765985 A JP 20765985A JP H0575050 B2 JPH0575050 B2 JP H0575050B2
Authority
JP
Japan
Prior art keywords
distance
sensor
optical
observation lens
position detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20765985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6266110A (ja
Inventor
Masanori Idesawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP20765985A priority Critical patent/JPS6266110A/ja
Publication of JPS6266110A publication Critical patent/JPS6266110A/ja
Publication of JPH0575050B2 publication Critical patent/JPH0575050B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Automatic Focus Adjustment (AREA)
JP20765985A 1985-09-19 1985-09-19 光学的距離検知装置 Granted JPS6266110A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20765985A JPS6266110A (ja) 1985-09-19 1985-09-19 光学的距離検知装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20765985A JPS6266110A (ja) 1985-09-19 1985-09-19 光学的距離検知装置

Publications (2)

Publication Number Publication Date
JPS6266110A JPS6266110A (ja) 1987-03-25
JPH0575050B2 true JPH0575050B2 (OSRAM) 1993-10-19

Family

ID=16543429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20765985A Granted JPS6266110A (ja) 1985-09-19 1985-09-19 光学的距離検知装置

Country Status (1)

Country Link
JP (1) JPS6266110A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2584630B2 (ja) * 1987-05-29 1997-02-26 理化学研究所 側面形状計測用光触針の構成
JPS63298113A (ja) * 1987-05-29 1988-12-05 Rikagaku Kenkyusho 光学的距離検出装置の結像光学系の構成
JPH0760090B2 (ja) * 1987-07-21 1995-06-28 理化学研究所 光学的距離検出法
JPH0360011U (OSRAM) * 1989-10-16 1991-06-13

Also Published As

Publication number Publication date
JPS6266110A (ja) 1987-03-25

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