JPH0573975B2 - - Google Patents

Info

Publication number
JPH0573975B2
JPH0573975B2 JP61014472A JP1447286A JPH0573975B2 JP H0573975 B2 JPH0573975 B2 JP H0573975B2 JP 61014472 A JP61014472 A JP 61014472A JP 1447286 A JP1447286 A JP 1447286A JP H0573975 B2 JPH0573975 B2 JP H0573975B2
Authority
JP
Japan
Prior art keywords
cleaning
cleaning area
air
perforated plate
supplied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61014472A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62172126A (ja
Inventor
Shozo Ito
Katsuhiko Mihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP61014472A priority Critical patent/JPS62172126A/ja
Publication of JPS62172126A publication Critical patent/JPS62172126A/ja
Publication of JPH0573975B2 publication Critical patent/JPH0573975B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
JP61014472A 1986-01-25 1986-01-25 清浄化装置 Granted JPS62172126A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61014472A JPS62172126A (ja) 1986-01-25 1986-01-25 清浄化装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61014472A JPS62172126A (ja) 1986-01-25 1986-01-25 清浄化装置

Publications (2)

Publication Number Publication Date
JPS62172126A JPS62172126A (ja) 1987-07-29
JPH0573975B2 true JPH0573975B2 (ko) 1993-10-15

Family

ID=11861999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61014472A Granted JPS62172126A (ja) 1986-01-25 1986-01-25 清浄化装置

Country Status (1)

Country Link
JP (1) JPS62172126A (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104048359A (zh) * 2014-06-24 2014-09-17 南通惠然生物科技有限公司 一种医药、食品及生物技术用的洁净空气装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55134239A (en) * 1979-04-04 1980-10-18 Toshiba Corp Clean box

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140841U (ja) * 1984-02-29 1985-09-18 株式会社椿本チエイン 物品搬送装置を収納した空気清浄室内の塵埃除去装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55134239A (en) * 1979-04-04 1980-10-18 Toshiba Corp Clean box

Also Published As

Publication number Publication date
JPS62172126A (ja) 1987-07-29

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