JPH0573641B2 - - Google Patents

Info

Publication number
JPH0573641B2
JPH0573641B2 JP60248286A JP24828685A JPH0573641B2 JP H0573641 B2 JPH0573641 B2 JP H0573641B2 JP 60248286 A JP60248286 A JP 60248286A JP 24828685 A JP24828685 A JP 24828685A JP H0573641 B2 JPH0573641 B2 JP H0573641B2
Authority
JP
Japan
Prior art keywords
plate
wafer
cartridge
wafers
basket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60248286A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62111837A (ja
Inventor
Seijiro Kawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denkoh Co Ltd
Original Assignee
Denkoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denkoh Co Ltd filed Critical Denkoh Co Ltd
Priority to JP60248286A priority Critical patent/JPS62111837A/ja
Publication of JPS62111837A publication Critical patent/JPS62111837A/ja
Publication of JPH0573641B2 publication Critical patent/JPH0573641B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP60248286A 1985-11-06 1985-11-06 板状体取出し装置 Granted JPS62111837A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60248286A JPS62111837A (ja) 1985-11-06 1985-11-06 板状体取出し装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60248286A JPS62111837A (ja) 1985-11-06 1985-11-06 板状体取出し装置

Publications (2)

Publication Number Publication Date
JPS62111837A JPS62111837A (ja) 1987-05-22
JPH0573641B2 true JPH0573641B2 (cg-RX-API-DMAC7.html) 1993-10-14

Family

ID=17175833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60248286A Granted JPS62111837A (ja) 1985-11-06 1985-11-06 板状体取出し装置

Country Status (1)

Country Link
JP (1) JPS62111837A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0512576B1 (en) * 1991-05-10 1995-08-09 Mazda Motor Corporation Vehicle assembling method and vehicle body structure

Also Published As

Publication number Publication date
JPS62111837A (ja) 1987-05-22

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