JPH057239Y2 - - Google Patents

Info

Publication number
JPH057239Y2
JPH057239Y2 JP1987008306U JP830687U JPH057239Y2 JP H057239 Y2 JPH057239 Y2 JP H057239Y2 JP 1987008306 U JP1987008306 U JP 1987008306U JP 830687 U JP830687 U JP 830687U JP H057239 Y2 JPH057239 Y2 JP H057239Y2
Authority
JP
Japan
Prior art keywords
ring
fluid supply
quartz tube
collar
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987008306U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63119667U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987008306U priority Critical patent/JPH057239Y2/ja
Publication of JPS63119667U publication Critical patent/JPS63119667U/ja
Application granted granted Critical
Publication of JPH057239Y2 publication Critical patent/JPH057239Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1987008306U 1987-01-23 1987-01-23 Expired - Lifetime JPH057239Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987008306U JPH057239Y2 (en:Method) 1987-01-23 1987-01-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987008306U JPH057239Y2 (en:Method) 1987-01-23 1987-01-23

Publications (2)

Publication Number Publication Date
JPS63119667U JPS63119667U (en:Method) 1988-08-02
JPH057239Y2 true JPH057239Y2 (en:Method) 1993-02-24

Family

ID=30792564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987008306U Expired - Lifetime JPH057239Y2 (en:Method) 1987-01-23 1987-01-23

Country Status (1)

Country Link
JP (1) JPH057239Y2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10027461A1 (de) * 2000-06-02 2001-12-06 Glatt Gmbh Explosionssichere Behälter

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4855247U (en:Method) * 1971-10-29 1973-07-16
JPS48111790U (en:Method) * 1972-04-01 1973-12-21

Also Published As

Publication number Publication date
JPS63119667U (en:Method) 1988-08-02

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