JPH057239Y2 - - Google Patents

Description

[Detailed explanation of the invention] [Purpose of the invention] (Field of industrial application) This invention relates to quartz tubes used in CVD and epitaxial growth equipment used in semiconductor manufacturing. This invention relates to a sealing device.

(Prior art) In recent years, vertical furnaces have been used in which the axial direction of quartz tubes are arranged vertically by a manifold, but these furnaces are equipped with a sealing device to prevent the reaction gas inside the quartz tubes from leaking to the outside. It is provided.

As shown in FIG. 4, the conventional sealing device holds a ring-shaped collar 2 of a quartz tube 1 between an upper manifold 3 and a lower manifold 4, and an O-ring 6 fitted into a ring groove 5 of the lower manifold 4. And the lower manifold 4
The ring groove 5 of the quartz tube 1 is press-sealed to the lower surface of the collar of the quartz tube 1.

Note that 7 is a cap that opens and closes the opening of the quartz tube 1, and 8 is a seal ring that seals between the lower manifold 4 and the cap 7.

(Problems to be Solved by the Invention) The conventional sealing device for a quartz tube has a flange 2, so it is easy to seal, but on the other hand, since the flange 2 is made of quartz, it is extremely weak against tension.

Therefore, the O protruding from the upper surface of the lower manifold 4
When the ring 6 is crushed by the collar 2, if the collar 2 is tilted and a large bending moment is applied to the collar 2, there is a risk of damage.

Also, since the quartz tube is manufactured by hand, the tsuba 2
The bottom surface of the machine is difficult to flatten, unlike when machined.

Therefore, when crushing the O-ring, quartz tube 1
Since tension is applied locally to the tsuba 2, the tsuba 2 becomes more and more easily broken. In addition, when processing wafers while increasing or decreasing the pressure in the quartz tube, the pressure force of the O-ring 6 is determined by the atmospheric pressure pressing the seal portion according to the pressure inside the quartz tube, and the pressure of the O-ring 6, which is a sealing member, being pressed. The pressing force changes.

Therefore, the sealing force may be too strong or too weak, and it is not possible to always maintain an appropriate sealing force by adjusting the sealing force.

In view of the above circumstances, the purpose of this invention is to prevent the breakage of the fragile quartz tube collar and to adjust the sealing force.

[Structure of the idea]

(Means for Solving the Problem) This invention provides a sealing device for a container in which the container is evacuated to a predetermined pressure. an annular seal member made of a tubular elastic body inserted and provided with a fluid supply/exhaust port; a fluid supply/exhaust pipe connected to the fluid supply/exhaust port; and a fluid supplied to the annular seal member through the fluid supply/exhaust pipe. This sealing device is characterized by being provided with a fluid supply/exhaust device for introducing the fluid.

(Function) After fitting a tubular elastic ring into the ring structure of the lower manifold and removing the air inside the tubular elastic ring so that the ring does not protrude above the upper surface of the lower manifold, the collar of the quartz tube is connected to the upper manifold. Clamp and fix with the lower manifold.

Next, air is supplied from the fluid supply/discharge port into the tubular elastic ring to expand the elastic ring, which is then pressed against the underside of the flange to form a seal.

(Embodiment) An embodiment of this invention will be described with reference to the accompanying drawings, where the same reference numerals have the same names and functions.

A CVD quartz tube 10 is installed vertically with an opening 11 facing downward, and a ring-shaped collar 12 is formed on the outer periphery of this opening 11.

The collar 12 is held between an upper manifold 13 and a lower manifold 14, and the manifolds 13 and 14 are fixed by assembly bolts (not shown).

A ring groove 16 is formed on the lower surface 12a of the collar 12 of the lower manifold 14 at an opposing portion, and this ring groove 16 communicates with the notch 15.

A tubular elastic ring 17 having a fluid chamber 17a is fitted into this groove 16, and the fluid chamber 17a of this ring 17 is provided with a fluid supply/discharge port 18. , is connected to a pipe 19 fitted into the notch 15.

The ring groove 16 is formed to a depth D that is greater than the thickness d of the elastic ring 17 in its natural state. 2
0 is a cap, and 21 is a seal ring for sealing between the lower manifold 14 and the cap 20.

Next, to explain the operation of this embodiment, a supply/discharge device (not shown) is driven to remove fluid, e.g., air, from the fluid chamber 17a through the pipe 19 and deflate the elastic ring. ring 17
Insert.

The collar 12 of the quartz tube 10 is placed on the upper surface of the lower manifold 14, and the collar 12 of the quartz tube 10 is pressed down by the upper manifold 13, and the manifolds 13 and 14 are screwed together with assembly bolts (not shown) to form the state shown in FIG.

At this time, since the ring 17 is completely separated from the lower surface 12a of the collar, no large bending moment is applied to the collar 12.

Next, the opening 11 is covered with the cap 20, and the elastic ring is inflated by supplying air to the fluid chamber by the supply/discharge device, and the ring 17 is pressed against the lower surface 12a of the collar 12 to form a seal as shown in FIG. At this time, since the collar 12 is fixed by the manifolds 13 and 14, it will not be damaged even if it receives the pressing force of the elastic ring 17.

The strength of this pressing force, that is, the strength of the sealing force, is adjusted by the amount of air supplied to the fluid chamber 17a.
The strength required for sealing is sufficient, so adjust the strength to correspond to the pressure inside the quartz tube.

This invention is not limited to the above-mentioned embodiment, and it goes without saying that it may be used, for example, in a horizontal furnace in which quartz tubes are arranged horizontally in place of the vertical furnace.

[Effect of idea]

Since this invention is constructed as described above, it has the following remarkable effects.

(1) When sealing the brim of a container that is fragile and easily damaged, such as a quartz tube, use a fluid supply/exhaust device to draw out the fluid from the annular seal member, collect it, and then insert the member into the annular groove. The flange of the quartz tube is held between the upper and lower mani bolts, and the annular seal member is inflated by supplying fluid to the annular seal member using the fluid supply/exhaust device, and is pressed against the lower surface of the flange for sealing.

Therefore, unlike the conventional example, an excessive bending moment etc. is not applied to the flange, so even if the seal portion is made of a brittle and easily damaged member, occurrence of breakage accidents can be prevented.

(2) Since the sealing pressure can be adjusted by adjusting the degree of inflation of the annular seal member using the fluid supply/exhaust device, it is possible to maintain an optimal sealing force commensurate with the pressure inside the container.

[Brief explanation of the drawing]

Fig. 1 is a longitudinal sectional view showing the main part of an embodiment of this invention, Fig. 2 is a view showing another state of Fig. 1, Fig. 3 is a perspective view of the elastic ring, and Fig. 4 is It is a partial sectional view of a plan view showing a conventional example. 10...Quartz tube, 12...Brim, 13...Upper manifold, 14...Lower manifold, 16...Ring groove, 17...Elastic ring.

Claims (1)

[Scope of utility model registration request] A sealing device for a container in which the container is evacuated to a predetermined pressure, comprising: an annular groove provided on at least one surface of the seal-facing portion of the container; and a tubular elastic body inserted into the groove and provided with a fluid supply/exhaust port. a fluid supply/exhaust pipe connected to the fluid supply/exhaust port; and a fluid supply/exhaust device for introducing fluid to the annular seal member through the fluid supply/exhaust pipe. Features a sealing device.