JPS63119667U - - Google Patents
Info
- Publication number
- JPS63119667U JPS63119667U JP830687U JP830687U JPS63119667U JP S63119667 U JPS63119667 U JP S63119667U JP 830687 U JP830687 U JP 830687U JP 830687 U JP830687 U JP 830687U JP S63119667 U JPS63119667 U JP S63119667U
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- collar
- manifold
- ring
- sealing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims 3
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は、この考案の実施例を示す縦断面図の
要部を示す図、第２図は、第１図の他の状態を示
す図、第３図は、弾性リングの斜視図、第４図は
従来例を示す平面図の一部断面図である。
１０…石英管、１２…鍔、１３…上マニホルド
、１４…下マニホルド、１６…リング溝、１７…
弾性リング。
FIG. 1 is a longitudinal sectional view showing the main part of an embodiment of the invention, FIG. 2 is a view showing another state of FIG. 1, and FIG. 3 is a perspective view of an elastic ring. FIG. 4 is a partial sectional view of a plan view showing a conventional example. 10...Quartz tube, 12...Brim, 13...Upper manifold, 14...Lower manifold, 16...Ring groove, 17...
elastic ring.
Claims (1)
挾持し、該下マニホルドのリング溝に嵌着したリ
ング状のシール部材で該鍔の下面を押圧する石英
管のシール装置において、該シール部材が流体給
排口を備えた管状の弾性リングであることを特徴
とする石英管のシール装置。 In a quartz tube sealing device, a collar of a quartz tube is held between an upper manifold and a lower manifold, and a ring-shaped sealing member fitted into a ring groove of the lower manifold presses the lower surface of the collar. A quartz tube sealing device characterized by being a tubular elastic ring equipped with a supply and discharge port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987008306U JPH057239Y2 (en) | 1987-01-23 | 1987-01-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987008306U JPH057239Y2 (en) | 1987-01-23 | 1987-01-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63119667U true JPS63119667U (en) | 1988-08-02 |
| JPH057239Y2 JPH057239Y2 (en) | 1993-02-24 |
Family
ID=30792564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987008306U Expired - Lifetime JPH057239Y2 (en) | 1987-01-23 | 1987-01-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057239Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004500979A (en) * | 2000-06-02 | 2004-01-15 | グラツト ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Explosion-proof container |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4855247U (en) * | 1971-10-29 | 1973-07-16 | ||
| JPS48111790U (en) * | 1972-04-01 | 1973-12-21 |
-
1987
- 1987-01-23 JP JP1987008306U patent/JPH057239Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4855247U (en) * | 1971-10-29 | 1973-07-16 | ||
| JPS48111790U (en) * | 1972-04-01 | 1973-12-21 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004500979A (en) * | 2000-06-02 | 2004-01-15 | グラツト ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Explosion-proof container |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057239Y2 (en) | 1993-02-24 |