JPH0571196B2 - - Google Patents

Info

Publication number
JPH0571196B2
JPH0571196B2 JP62123776A JP12377687A JPH0571196B2 JP H0571196 B2 JPH0571196 B2 JP H0571196B2 JP 62123776 A JP62123776 A JP 62123776A JP 12377687 A JP12377687 A JP 12377687A JP H0571196 B2 JPH0571196 B2 JP H0571196B2
Authority
JP
Japan
Prior art keywords
order silane
reaction
silicon
inert gas
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62123776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63289968A (ja
Inventor
Kazufumi Azuma
Masahiro Tanaka
Takeshi Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62123776A priority Critical patent/JPS63289968A/ja
Publication of JPS63289968A publication Critical patent/JPS63289968A/ja
Publication of JPH0571196B2 publication Critical patent/JPH0571196B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/545—Microcrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/548—Amorphous silicon PV cells

Landscapes

  • Photovoltaic Devices (AREA)
JP62123776A 1987-05-22 1987-05-22 非晶質太陽電池の製造方法 Granted JPS63289968A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62123776A JPS63289968A (ja) 1987-05-22 1987-05-22 非晶質太陽電池の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62123776A JPS63289968A (ja) 1987-05-22 1987-05-22 非晶質太陽電池の製造方法

Publications (2)

Publication Number Publication Date
JPS63289968A JPS63289968A (ja) 1988-11-28
JPH0571196B2 true JPH0571196B2 (enrdf_load_stackoverflow) 1993-10-06

Family

ID=14868998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62123776A Granted JPS63289968A (ja) 1987-05-22 1987-05-22 非晶質太陽電池の製造方法

Country Status (1)

Country Link
JP (1) JPS63289968A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0731691U (ja) * 1993-11-25 1995-06-13 ダイヤテックス株式会社 大形収納袋及びその収納補助具

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100093111A1 (en) * 2006-10-13 2010-04-15 Omron Corporation Method for manufacturing electronic device using plasma reactor processing system
WO2008078471A1 (ja) * 2006-12-25 2008-07-03 Sharp Kabushiki Kaisha 光電変換装置及びその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0612835B2 (ja) * 1984-08-20 1994-02-16 三井東圧化学株式会社 光電変換素子の製法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0731691U (ja) * 1993-11-25 1995-06-13 ダイヤテックス株式会社 大形収納袋及びその収納補助具

Also Published As

Publication number Publication date
JPS63289968A (ja) 1988-11-28

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Legal Events

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R350 Written notification of registration of transfer

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LAPS Cancellation because of no payment of annual fees