JPH0570776B2 - - Google Patents
Info
- Publication number
- JPH0570776B2 JPH0570776B2 JP62109780A JP10978087A JPH0570776B2 JP H0570776 B2 JPH0570776 B2 JP H0570776B2 JP 62109780 A JP62109780 A JP 62109780A JP 10978087 A JP10978087 A JP 10978087A JP H0570776 B2 JPH0570776 B2 JP H0570776B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diaphragm
- receiving diaphragm
- pressure receiving
- receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- 230000005540 biological transmission Effects 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 description 10
- 239000012530 fluid Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 239000012778 molding material Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000037303 wrinkles Effects 0.000 description 2
- 229910000792 Monel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000009993 protective function Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10978087A JPS63274832A (ja) | 1987-05-07 | 1987-05-07 | 受圧ダイヤフラム保護装置およびその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10978087A JPS63274832A (ja) | 1987-05-07 | 1987-05-07 | 受圧ダイヤフラム保護装置およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63274832A JPS63274832A (ja) | 1988-11-11 |
JPH0570776B2 true JPH0570776B2 (zh) | 1993-10-05 |
Family
ID=14519035
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10978087A Granted JPS63274832A (ja) | 1987-05-07 | 1987-05-07 | 受圧ダイヤフラム保護装置およびその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63274832A (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2811552T3 (es) * | 2010-10-22 | 2021-03-12 | C Miethke Gmbh&Co Kg | Implante para la medición de la presión intracorporal con transmisión telemétrica del valor de medición |
US10675451B2 (en) | 2010-10-22 | 2020-06-09 | Christoph Miethke Gmbh & Co Kg | Hydrocephalus shunt arrangement and components thereof for draining cerebrospinal fluid in a patient having hydrocephalus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5536703A (en) * | 1978-09-06 | 1980-03-14 | Toshiba Corp | Transducer for pressure gauge |
-
1987
- 1987-05-07 JP JP10978087A patent/JPS63274832A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5536703A (en) * | 1978-09-06 | 1980-03-14 | Toshiba Corp | Transducer for pressure gauge |
Also Published As
Publication number | Publication date |
---|---|
JPS63274832A (ja) | 1988-11-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0370013B1 (en) | Isolator apparatus | |
US4120206A (en) | Differential pressure sensor capsule with low acceleration sensitivity | |
US5959213A (en) | Semiconductor differential pressure measuring device | |
US4782703A (en) | Temperature compensated pressure signal generator | |
JPS59125032A (ja) | 差圧測定装置 | |
JPH0570776B2 (zh) | ||
CN113916407B (zh) | 用于优化充油压力传感器的膜功能的通道结构 | |
JPS5956137A (ja) | 差圧発信器 | |
JP3070045B2 (ja) | 差圧測定装置 | |
US7073400B2 (en) | Sensor for measuring pressure in a sealed volume | |
JPS6221429A (ja) | 圧力検出器用波形ダイヤフラムの製造方法 | |
JPS5612528A (en) | Pressure transducer | |
JPH08189871A (ja) | 差圧測定装置 | |
JPS5930444Y2 (ja) | 差圧検出器 | |
JP3080212B2 (ja) | 半導体差圧測定装置 | |
JP3900351B2 (ja) | 差圧測定装置 | |
JPH07103841A (ja) | 差圧伝送器 | |
JP3039141B2 (ja) | 差圧測定装置 | |
JP2988077B2 (ja) | 差圧測定装置 | |
JPH10122994A (ja) | 差圧測定装置 | |
JPH0429971B2 (zh) | ||
JP3090175B2 (ja) | 差圧測定装置 | |
JPH0518838A (ja) | 半導体差圧センサ | |
JPS5930438Y2 (ja) | 絶対圧力計の検出部構造 | |
JPS5930445Y2 (ja) | 差圧検出器 |