JPH0569300B2 - - Google Patents

Info

Publication number
JPH0569300B2
JPH0569300B2 JP6087186A JP6087186A JPH0569300B2 JP H0569300 B2 JPH0569300 B2 JP H0569300B2 JP 6087186 A JP6087186 A JP 6087186A JP 6087186 A JP6087186 A JP 6087186A JP H0569300 B2 JPH0569300 B2 JP H0569300B2
Authority
JP
Japan
Prior art keywords
scanning
foreign matter
optical path
matter inspection
reticle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP6087186A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62219631A (ja
Inventor
Eiichi Murakami
Michio Kono
Akyoshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP61060871A priority Critical patent/JPS62219631A/ja
Publication of JPS62219631A publication Critical patent/JPS62219631A/ja
Priority to US07/348,177 priority patent/US4886975A/en
Priority to US07/406,090 priority patent/US5017798A/en
Publication of JPH0569300B2 publication Critical patent/JPH0569300B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP61060871A 1986-02-14 1986-03-20 異物検査装置 Granted JPS62219631A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP61060871A JPS62219631A (ja) 1986-03-20 1986-03-20 異物検査装置
US07/348,177 US4886975A (en) 1986-02-14 1989-05-02 Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces
US07/406,090 US5017798A (en) 1986-02-14 1989-09-12 Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61060871A JPS62219631A (ja) 1986-03-20 1986-03-20 異物検査装置

Publications (2)

Publication Number Publication Date
JPS62219631A JPS62219631A (ja) 1987-09-26
JPH0569300B2 true JPH0569300B2 (enrdf_load_stackoverflow) 1993-09-30

Family

ID=13154878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61060871A Granted JPS62219631A (ja) 1986-02-14 1986-03-20 異物検査装置

Country Status (1)

Country Link
JP (1) JPS62219631A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011069749A (ja) * 2009-09-28 2011-04-07 Fujitsu Ltd 表面検査装置及び表面検査方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3101290B2 (ja) * 1989-03-15 2000-10-23 キヤノン株式会社 表面状態検査装置、露光装置、及び表面状態検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011069749A (ja) * 2009-09-28 2011-04-07 Fujitsu Ltd 表面検査装置及び表面検査方法

Also Published As

Publication number Publication date
JPS62219631A (ja) 1987-09-26

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees