JPH0567380U - Cleaning equipment - Google Patents

Abstract

(57) [Summary] [Purpose] To prevent the cleaning solution from entering the next tank. [Structure] An opening 15 is provided on each of the upper surfaces of the ultrasonic cleaning tank 6, the spray cleaning tank 10, and the warm bath cleaning tank 12, and a lid opening / closing device 18 for opening and closing the opening 15 is provided. Inside each of the cleaning tanks 6, 10 and 12, an elevating table 16 for the object 5 to be cleaned and an air nozzle 19 for injecting air toward the object 5 to be cleaned after the cleaning process are provided. [Effect] After the cleaning process, the cleaning liquid 8 remaining in the cleaning process is removed by draining the water in the cleaning tanks 6, 10 and 12 with the air nozzles 19, so that the cleaning liquid 8 can be prevented from entering the next tank.

Description

[Detailed description of the device]

[0001]

[Industrial application]

 The present invention relates to a cleaning device for cleaning objects to be cleaned such as various precision parts, silicon wafers, and printed circuit boards.

[0002]

[Prior Art]

 As a conventional device of this type, in Japanese Utility Model Laid-Open No. Sho 62-31984, an object to be cleaned suspended from an elevating rod is sequentially carried to a plurality of cleaning tanks arranged along a transfer path of a transfer device. There is disclosed a cleaning device which performs cleaning by immersing in a cleaning liquid contained in a cleaning tank.

[0003]

[Problems to be solved by the device]

 In the above-mentioned conventional example, the cleaning liquid is stored in each cleaning tank, and the object to be cleaned is sequentially immersed in the cleaning liquid for cleaning.However, the cleaning device for cleaning by immersing the cleaning liquid in this type is When the cleaning liquid adheres to the object to be cleaned after the cleaning process and is conveyed to the adjacent cleaning tank in the next process, a small amount of cleaning liquid adhering to the object to be cleaned is mixed into the cleaning liquid in the next tank. have. In this way, when the cleaning liquid of the previous step is mixed with the cleaning liquid of the next tank, for example, an ultrasonic cleaning tank having an ultrasonic cleaning tank and a plurality of water cleaning tanks as a cleaning device and containing an aqueous cleaning solution is used. In a cleaning device in which the type and composition of the cleaning liquid stored in each cleaning tank is different, for example, ultrasonic cleaning is performed, followed by washing with pure water in the next cleaning tank. Due to the mixing of the cleaning liquid, the concentration and components of the cleaning liquid will change, and optimal cleaning cannot be performed.In addition, the cleaning liquid adhering to the cleaning target may drop during the transfer of the cleaning target to the next tank and It has the problem of becoming dirty.

The present invention has been made based on such a problem, and provides a cleaning device capable of preventing the cleaning liquid from entering the next tank as much as possible and preventing the cleaning liquid from leaking. The purpose is to provide.

[0005]

[Means for Solving the Problems]

 The present invention is a cleaning device in which a plurality of cleaning tanks are arranged in parallel along a transfer path of a transfer device, and an object to be cleaned is sequentially transferred to each cleaning tank and cleaned with a cleaning liquid. An opening for inserting the cleaning object is provided, and an elevating table for placing the object to be cleaned sent by the transfer device through the opening and raising and lowering the inside of the cleaning tank is provided at the upper part of each cleaning tank. Is provided with an air nozzle for draining the cleaning liquid for injecting air toward the object to be cleaned placed on the lift, and with a lid opening / closing device for opening / closing the opening.

[0006]

[Action]

 With the above structure, the present invention cleans the object to be cleaned placed on the elevating table with the cleaning liquid in a closed state in which the opening is closed by the lid opening / closing device, and after the cleaning process, the air nozzle remains on the object to be cleaned. The cleaning liquid that adheres is removed, and the cleaning liquid is prevented from entering the next tank.

[0007]

【Example】

 Embodiments of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 and FIG. 2 show an embodiment of the present invention, in which a cleaning table 1 is provided with a loading table 2 on one side and an unloading table 3 on the other side, from the loading table 2 to the unloading table 3. The cleaning target 5 is transported along the transportation path 4 by a transportation device described later. Inside the washing machine 1, an ultrasonic transducer 6A having an ultrasonic transducer 6A at the bottom from the carry-in side and containing an aqueous cleaning solution 8 heated appropriately by a heater 7 A spray-type cleaning tank 10 having an injection nozzle 9 and containing a cleaning solution 8 therein, a warm bath cleaning tank 12 containing the cleaning solution 8 heated to an appropriate temperature by a heater 11, and a pair of far infrared heaters 13. The vacuum type drying tanks 14 are sequentially arranged in parallel. Each of the cleaning tanks 6, 10, 12 and the drying tank 14 is formed in a bottomed box type having an opening on the upper surface, and the cleaning object 5 sent from the transfer device through the opening 15 on the upper surface is transferred to each cleaning tank. The objects to be cleaned 5 placed on the lift table 16 provided in the cleaning tanks 6, 10 and 12 and the receiving table 16A provided in the drying tank 14 and transferred to the cleaning tanks 6, 10 and 12 are moved up and down the lift table 16. It is configured so that it is transferred to the bottom of each of the cleaning tanks 6, 10, 12 by an appropriate driving means (not shown) such as an air cylinder for raising and lowering. Further, a lid 17 for opening and closing the opening 15 is rotatably attached to each of the washing tanks 6, 10, 12 and the drying tank 14 via a shaft 17A. The opening 15 is opened and closed by a lid opening / closing device 18 including a cylinder 18A. Further, air nozzles 19 for ejecting air toward the object to be cleaned 5 and draining the object to be cleaned 5 are arranged in the upper portions of the respective cleaning tanks 6, 10 and 12.

The transfer device 20 for transferring the object to be cleaned 5 includes a guide rail 21 installed along each of the cleaning tanks 6, 10, 12 and the drying tank 14 and a horizontal reciprocating motion along the guide rail 21. The transfer table 22 and the hanging hanger 24 that is provided on the transfer table 22 and is vertically moved by being guided by the guide rod 23. The cleaning basket 25 containing the object to be cleaned 5 is mounted on the hanger 24. It is configured to be suspended and to sequentially convey the object to be cleaned 5 to the cleaning tanks 6, 10, 12 and the drying tank 14 by the transfer device 20.

The operation of the present invention configured as above will be described.

First, in the initial state of cleaning, the lids 17 of the tanks 6, 10, 12, and 14 have their respective openings 15 opened by the lid opening / closing device 18. The cleaning basket 25 accommodating the object 5 is suspended on the hanger 24 of the transfer device 20, and the cleaning basket 25 is transferred along the guide rail 21 to above the ultrasonic cleaning tank 6 and then the transfer device 20 is operated. The cleaning basket 25 is lowered along the guide rod 23 onto the lift 16 in the ultrasonic cleaning tank 6. After that, the transport device 20 is driven to disengage the cleaning basket 25 from the hanger 24, and only the hanger 23 is lifted to place the cleaning basket 25 on the elevating table 16, and the elevating table 16 is lowered to receive the object. A state in which the cleaning object 5 is immersed in the cleaning liquid 8 stored below the ultrasonic cleaning tank 6 and the opening 15 of the ultrasonic cleaning tank 6 is closed by the lid opening / closing device 18 to seal the ultrasonic cleaning tank 6 Then, the object to be cleaned 5 in the cleaning basket 25 is ultrasonically cleaned by exciting the ultrasonic vibrator 6A. After that, the lifting table 16 is raised to transfer the object to be cleaned 5 to the upper part of the ultrasonic cleaning tank 6, that is, to the closed space in which the cleaning liquid 8 is not stored. Air is ejected from the air nozzle 19 toward the cleaning liquid 5, and the cleaning liquid 8 remaining on the cleaning object 5 is removed during the ultrasonic cleaning process. In this way, the lid opening / closing device 18 is actuated to open the opening 15 at the stage when the washing and draining of the object to be cleaned 5 are completed, and the transfer device 20 is actuated so that the hanger 24 in the standby state is locked to the washing basket 25. Then, the cleaning basket 25 is raised above the ultrasonic cleaning tank 6, and then the cleaning basket 25 is conveyed to above the spray-type cleaning tank 10 which is the next tank, in the same manner as the ultrasonic cleaning process described above. After the cleaning basket 25 is placed on the lift table 16 by the operation of the transfer device 20, the lift table 16 is lowered and the opening 15 of the spray-type cleaning tank 10 is closed by the operation of the lid opening / closing device 18. In this state, the object to be cleaned 5 is immersed in the cleaning liquid 8, and the cleaning liquid 8 is sprayed from the spray nozzle 9 toward the object to be cleaned 5 to remove the adhered substances from the surface of the object to be cleaned 5 by peeling. Then, the lifting table 16 is raised to remove the cleaning liquid 8 remaining on the object to be cleaned 5 by the air jetted from the air nozzle 19. After that, the lid opening / closing device 18 is operated to rotate the lid body 17 to open the opening 15, and the cleaning basket 25 is transferred to the hot bath cleaning tank 12 to be the next tank by the operation of the transfer device 20. Similar to the cleaning tanks 6 and 10, the lid opening / closing device 18 is used to immerse the object to be cleaned 5 in the cleaning solution 8 which is heated to an appropriate temperature by the heater 11 while the opening 15 of the warm bath cleaning tank 12 is closed. After that, the water is drained by the air nozzle 19. Then, the object to be cleaned 5 that has been washed and drained in each of the cleaning tanks 6, 10 and 12 is transferred to the drying tank 14 which is the final tank, is dried by the far infrared heater 13 in the drying tank 14, and is then discharged from the carry-out table 3. Carry out. In this case, the drying tank 14 is decompressed by the vacuum pump 26, and by decompressing the drying tank 12 in this way, the object 5 to be cleaned can be dried at a low temperature and the object 5 to be cleaned is heated. Since the cleaning time is shortened, the cleaning target 5 can be efficiently dried, and the preheating time by the heater 11 in the warm bath cleaning tank 12 which is the pre-stage of the drying process is also shortened. The efficiency of the drying process can be improved.

As described above, according to the present invention, immediately after the cleaning with the cleaning liquid 8 is completed in each of the cleaning tanks 6, 10 and 12, the object to be cleaned 5 is cleaned in each of the cleaning tanks 6, 10 and 12 by each cleaning process. The cleaning liquid remaining on the surface is blown off by the air nozzle 19 to remove water, and then transported to the next tank to prevent the cleaning liquid 8 from mixing into the next tank and prevent deterioration of the cleaning degree. . Further, at the time of the draining process with the air nozzle 19, the lid opening / closing device 18 closes the openings 15 of the respective washing tanks 6, 10, 12 with the lid 17 so that the washing liquid 8 blown off by the air nozzle 19 is washed. It does not scatter in 1 and is excellent in maintainability.

Although one embodiment of the present invention has been described in detail above, the present invention is not limited to the above embodiment, and various modifications can be made within the scope of the present invention. For example, the structure, layout and number of each washing tank may be set appropriately. Further, the lid opening / closing device that opens and closes the opening of each cleaning tank is not limited to a structure in which the lid is rotatably attached, and for example, a shutter-type lid is provided and the opening is opened and closed by sliding the lid. The driving means is not limited to the cylinder, and various mechanisms such as an actuator may be used. Further, as the transfer device, various types such as transfer by a chain may be used.

[0014]

[Effect of the device]

 The present invention is a cleaning device in which a plurality of cleaning tanks are arranged in parallel along a transfer path of a transfer device, and an object to be cleaned is sequentially transferred to each cleaning tank and cleaned with a cleaning liquid. An opening for inserting the cleaning object is provided, and an elevating table for placing the object to be cleaned sent by the transfer device through the opening and raising and lowering the inside of the cleaning tank is provided at the upper part of each cleaning tank. Is equipped with an air nozzle for draining the cleaning liquid that sprays air toward the object to be cleaned that is placed on the lift, and a lid opening / closing device that opens and closes the opening, so that the cleaning liquid for the next tank It is possible to provide a cleaning device capable of preventing the contamination of

[Brief description of drawings]

FIG. 1 is a schematic explanatory view showing an embodiment of the present invention.

FIG. 2 is a sectional view of the same machine to be cleaned.

[Explanation of symbols] 2 Carry-in stand 3 Carry-out stand 4 Conveyance path 5 Cleaning object 8 Cleaning solution 6 Ultrasonic cleaning tank 10 Spray cleaning tank 12 Hot bath cleaning tank 15 Opening part 16 Lifting table 18 Lid opening / closing device 19 Air nozzle 20 Transfer device

Claims (1)

[Scope of utility model registration request] 1. A cleaning device in which a plurality of cleaning tanks are arranged in parallel along a transfer path of a transfer device, and an object to be cleaned is sequentially transferred to each of the cleaning tanks to be cleaned with a cleaning liquid, on the upper surface of each cleaning tank. An opening for inserting the article to be cleaned is provided, and an elevating table for placing the article to be cleaned sent by the transfer device through the opening and raising and lowering the inside of the washing tank is provided at the upper part of each cleaning tank. Is provided with an air nozzle for draining a cleaning liquid for injecting air toward an object to be cleaned placed on a lift, and a lid opening / closing device for opening / closing the opening.