JPWO2015177893A1 - Cleaning method for cleaning object and cleaning device for cleaning object - Google Patents

Abstract

An object of the present invention is to enable a cleaning medium such as a cleaning liquid or a rinsing liquid remaining in a gap provided in a thin plate-like object to be discharged from the gap, and to increase running costs caused by taking out the cleaning medium in each process. Provided are a method for cleaning an object to be cleaned and a cleaning apparatus for the object to be cleaned, which can prevent the occurrence of problems such as the generation of water spots and the deformation of the object to be cleaned that can be caused by the removal of the cleaning medium. A method for cleaning an object to be cleaned includes a step of cleaning the object to be cleaned with a cleaning liquid (S11), a step of rinsing the object to be cleaned with a rinsing liquid (S15, S18), and a replacement liquid for the object to be cleaned. After the step (S21) of cleaning by the cleaning step and the step of cleaning the target object by the cleaning liquid and before the step of cleaning the target object by the replacement liquid, the target object is taken out from the cleaning medium And step (S12, S14, S16, S17, S19, S20, S22) of discharging the cleaning medium remaining in each gap by reducing the ambient atmosphere communicating with each gap of the object to be cleaned. ing. [Selection] Figure 4

Description

  The present invention relates to a cleaning method and a cleaning apparatus used for cleaning a thin plate-like object having a gap.

  Conventionally, various methods have been studied as a method for cleaning an electronic circuit board having a complicated shape or a metal workpiece processed into a thin plate shape. For example, the following Patent Document 1 proposes a cleaning method including a cleaning process using a cleaning liquid, a rinsing cleaning (rinsing cleaning) process for rinsing the cleaning liquid from an object to be cleaned, and a drying process for drying the object to be cleaned after rinsing cleaning. ing.

  In the above cleaning method, in order to improve the cleaning efficiency, when cleaning the object to be cleaned and rinsing the object to be cleaned, the tank is immersed in the cleaning liquid and the rinsing liquid. The inside is depressurized. By carrying out the cleaning under reduced pressure in this way, it becomes possible to spread the cleaning medium such as the cleaning liquid and the rinsing liquid to each part of the object to be cleaned, and further expand the air contained in the object to be cleaned. It is possible to push out dirt that has entered a minute gap or the like of an object to be cleaned into a cleaning medium. However, in the cleaning method described in Patent Document 1, no consideration is given to bringing a cleaning medium between the steps, and the following points are problematic.

  For example, when an object to be cleaned having a bag-like minute gap is applied as an object to be cleaned, the cleaning liquid may remain in the gap of the object to be cleaned after the cleaning process. In this state, if the object to be cleaned is transported to a rinsing tank where rinsing is performed, the rinsing liquid stored in the rinsing tank is mixed with the rinsing liquid, which contaminates the rinsing liquid and reduces the cleaning efficiency. There is a risk of it. Further, in the industrial field, as a method for final cleaning of an object to be cleaned, a method of evaporating and cleaning a cleaning liquid and a rinsing liquid using a volatile substitution liquid is generally performed. For example, when performing such final cleaning, if a relatively large amount of cleaning liquid or rinsing liquid remains in the gap between the objects to be cleaned, the contact area between the object to be cleaned and the replacement liquid is reduced. Furthermore, it becomes difficult to allow the replacement liquid used for the finish cleaning to enter the gap. As a result, the cleaning liquid or the rinsing liquid remains on the object to be cleaned as it is, causing water spots on the product surface after drying. In addition to these problems, the cleaning medium is brought into the next process each time cleaning is performed, so that the cleaning medium held in the tank is reduced and the running cost required for cleaning is increased. There is also.

  On the other hand, in Patent Document 2 below, after the rinsing cleaning process, air blow is performed on the object to be cleaned, and the cleaning medium attached to the object to be cleaned is drained and removed by evaporation. For example, it is considered that each of the above-described problems can be solved by performing such an air blow after the cleaning process or the rinsing process.

Japanese Patent Laid-Open No. 6-101080 JP 7-124529 A

  However, it is difficult to achieve sufficient air distribution within the gap simply by blowing air against the object to be cleaned, and even if the cleaning medium can be evaporated, vapor remains in the gap. Therefore, there arises a problem that liquid draining is not sufficiently performed. Further, depending on the object to be cleaned, the shape of the object to be cleaned may be deformed by the blow pressure when air blowing is performed, and the product shape may be damaged.

  Therefore, the present invention makes it possible to discharge the cleaning medium such as the cleaning liquid and the rinsing liquid remaining in the gap provided in the thin plate-like object to be washed from the gap, and the running cost caused by taking out the cleaning medium in each step. Provided are a method for cleaning an object to be cleaned, and a cleaning apparatus for the object to be cleaned, which can prevent the occurrence of problems such as an increase in the amount of water stains and the deformation of the object to be cleaned that may occur when the cleaning medium is removed. For the purpose.

  A method for cleaning an object to be cleaned of the present invention to achieve the above object is a cleaning method for cleaning a thin plate-like object to be cleaned having a gap, and the object to be cleaned is immersed in a cleaning liquid as a cleaning medium. The step of cleaning with a cleaning liquid, the step of immersing the object to be cleaned in a rinsing liquid as a cleaning medium and rinsing with the rinsing liquid, and the object of cleaning to be immersed in a volatile replacement liquid And washing with. Further, after the step of cleaning the object to be cleaned with the cleaning liquid and before the step of cleaning the object to be cleaned with the replacement liquid, the gap between the objects to be cleaned is removed from the cleaning medium. A step of discharging the cleaning medium remaining in the gap by reducing the pressure of the ambient atmosphere communicating with

  In addition, a cleaning apparatus for an object to be cleaned according to the present invention for achieving the above object is a cleaning apparatus for cleaning a thin plate-shaped object to be cleaned having a gap, and stores a cleaning liquid as a cleaning medium. A storage tank, a cleaning tank including a first holding space for separating and holding an object to be cleaned from the cleaning liquid, a second storage part for storing a rinsing liquid as a cleaning medium, and an object to be cleaned from the rinsing liquid. Rinse and wash tank provided with a second holding space to hold, a third storage section for storing a volatile replacement liquid for cleaning the object to be cleaned, and the object to be cleaned away from the replacement liquid And a finishing cleaning tank having a third holding space for holding. Furthermore, in the state where the object to be cleaned is held in any one of the first holding space, the second holding space, and the third holding space, an ambient atmosphere communicating with the gap portion of the object to be cleaned is created. A pressure adjusting unit is provided for discharging the cleaning medium remaining in the gap by reducing the pressure.

  According to the present invention, prior to performing the cleaning process with the replacement liquid, the ambient atmosphere of the object to be cleaned is reduced in pressure while the object to be cleaned is taken out from the cleaning medium such as the cleaning liquid and the rinse liquid. The cleaning medium remaining in the gap can be pushed out from the gap and discharged. For this reason, it is possible to prevent the occurrence of problems such as an increase in running cost due to taking out the cleaning medium, generation of water spots, and deformation of an object to be cleaned that can be accompanied by removal of the cleaning medium.

It is the schematic which shows the washing | cleaning apparatus of the to-be-cleaned object which concerns on embodiment of this invention. It is a perspective view which shows the to-be-cleaned object which concerns on embodiment. It is sectional drawing which shows the fuel battery cell to which the to-be-cleaned object which concerns on embodiment is applied. It is a flowchart which shows each process of the washing | cleaning method of the to-be-cleaned object which concerns on embodiment. It is a figure for demonstrating the washing | cleaning method of the to-be-cleaned object which concerns on embodiment, Comprising: It is sectional drawing which shows a mode before immersing a to-be-cleaned object in a washing | cleaning liquid. It is a figure for demonstrating the washing | cleaning method of the to-be-cleaned object which concerns on embodiment, Comprising: It is sectional drawing which shows a mode after immersing a to-be-cleaned object in the washing | cleaning liquid. It is a figure for demonstrating the washing | cleaning method of the to-be-cleaned object which concerns on embodiment, Comprising: It is sectional drawing which shows a mode at the time of discharging the cleaning liquid from the clearance gap part of to-be-cleaned object. It is a figure for demonstrating the washing | cleaning method of the to-be-cleaned object which concerns on embodiment, Comprising: It is sectional drawing which shows a mode after immersing a to-be-cleaned object in a rinse liquid. It is a figure for demonstrating the washing | cleaning method of the to-be-cleaned object which concerns on embodiment, Comprising: It is sectional drawing which shows a mode after the rinsing liquid permeates into the clearance gap part of to-be-cleaned object. It is a figure for demonstrating the washing | cleaning method of the to-be-cleaned object which concerns on embodiment, Comprising: It is sectional drawing which shows a mode at the time of discharging the rinse liquid from the clearance gap part of to-be-cleaned object. It is a figure for demonstrating the washing | cleaning method of the to-be-cleaned object which concerns on embodiment, Comprising: It is sectional drawing which shows a mode after immersing a to-be-cleaned object in substitution liquid. It is a figure for demonstrating the washing | cleaning method of the to-be-cleaned object which concerns on embodiment, Comprising: It is sectional drawing which shows a mode after drying a to-be-cleaned object. It is the schematic which shows the washing | cleaning apparatus of the to-be-cleaned object which concerns on contrast. It is a figure for demonstrating the washing | cleaning method of the to-be-cleaned object which concerns on comparison, Comprising: It is sectional drawing which shows a mode after immersing a to-be-cleaned object in a washing | cleaning liquid. It is a figure for demonstrating the washing | cleaning method of the to-be-cleaned object which concerns on comparison, Comprising: It is sectional drawing which shows a mode after immersing a to-be-cleaned object in the rinse liquid. It is a figure for demonstrating the washing | cleaning method of the to-be-cleaned object which concerns on comparison, Comprising: It is sectional drawing which shows a mode after immersing a to-be-cleaned object in a substitution liquid. It is a figure for demonstrating the washing | cleaning method of the to-be-cleaned object which concerns on comparison, Comprising: It is sectional drawing which shows a mode after wash | cleaning to-be-washed object with a substitution liquid. It is the schematic which shows the washing | cleaning apparatus of the to-be-cleaned object which concerns on a modification.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted. In addition, the dimensional ratios in the drawings are exaggerated for convenience of explanation, and may be different from the actual ratios.

  FIG. 1 is a schematic diagram illustrating an overall configuration of a cleaning apparatus for an object to be cleaned according to the embodiment, FIGS. 2 and 3 are diagrams for explaining the object to be cleaned according to the embodiment, and FIG. FIG. 5A to FIG. 6D are diagrams for explaining the respective steps of the cleaning method for an object to be cleaned according to the embodiment, and FIG. FIG. 8A to FIG. 8D are diagrams for explaining the respective steps of the cleaning method for the object to be cleaned according to the comparative example.

  A cleaning apparatus (hereinafter referred to as a cleaning apparatus) 100 for an object to be cleaned according to the present embodiment is used to clean a predetermined object to be cleaned 10 and remove various kinds of dirt attached to the object to be cleaned 10. It is a device. As shown in FIG. 1, the cleaning apparatus 100 generally includes a cleaning tank 110 that performs cleaning with the cleaning liquid 111 on the object to be cleaned 100, and the temperature of the object to be cleaned 10 after being cleaned in the cleaning tank 110. A temperature adjustment tank 120 to be adjusted, rinse washing tanks 130a and 130b for rinsing and washing the article 10 to be washed with a rinsing liquid 131, a finish washing tank 140 for washing the article 10 to be washed with a volatile replacement liquid 141, and A pressure adjusting unit (indicated by reference symbol P) for variably adjusting the pressure in the tanks 110, 130a, 130b, and 140;

  With reference to FIG. 1, each part of the washing | cleaning apparatus 100 is demonstrated.

  The cleaning tank 110 provided in the cleaning apparatus 100 includes a first storage unit 114 that stores a cleaning liquid 111 as a cleaning medium, a first holding space 115 that holds the object to be cleaned 10 away from the cleaning liquid 111, and the cleaning liquid 111. An ultrasonic cleaner 113 that removes dirt and the like attached to the object 10 to be cleaned by applying an ultrasonic wave to the object 10 to be cleaned, and a pressure adjusting unit P are provided.

  The cleaning tank 110 has an input port for supplying the object to be cleaned 10 into the tank on the upper side, and has a tank structure that holds a predetermined amount of the cleaning liquid 111 on the bottom side. An opening / closing shutter (not shown) is provided at the insertion port. By closing the shutter, the first holding space 115 in the cleaning tank 100 can be sealed and kept airtight. Further, the first cleaning tank 110 has a transport means (not shown) for transporting the object to be cleaned 10 in and out of the first cleaning tank 110 and moving the object to be cleaned 10 in the first cleaning tank 110. Is provided.

  The ultrasonic cleaner 113 is configured by a known ultrasonic cleaner used for wet cleaning for cleaning a workpiece such as metal. The pressure adjustment unit P is configured by a known pump that can increase or decrease the pressure in the first holding space 115. You may comprise the pressure adjustment part P so that one thing may be shared by each tank, without providing each tank separately.

  The type of cleaning liquid 111 used for cleaning is not particularly limited, but in the present embodiment, a known inorganic alkaline cleaning agent used for wet cleaning is used. As another cleaning liquid, for example, a known neutral cleaning agent can be used.

  The temperature adjustment tank 120 provided in the cleaning apparatus 100 holds cooling water 121 for cooling the article 10 to be cleaned that has been cleaned by the cleaning tank 110. As the cooling water 121, pure water cooled is used. For example, the temperature adjustment tank 120 can be configured to cool the object to be cleaned 10 with a cooled gas instead of the cooling water 121.

  The temperature adjustment tank 120 includes a conveyance unit (not shown) and a shutter (not shown) that is opened and closed when the object to be cleaned 10 is put into the temperature adjustment tank 120.

  The cleaning apparatus 100 includes two cleaning tanks, a first rinse cleaning tank 130a and a second rinse cleaning tank 130b. Each of the rinsing cleaning tanks 130a and 130b includes a second storage part 134 that stores a rinsing liquid 131 as a cleaning medium, a second holding space 135 that holds the object 10 to be cleaned separately from the rinsing liquid 131, and a rinsing. An ultrasonic cleaning machine 133 that removes the cleaning liquid 111 and the like attached to the object to be cleaned 10 by applying an ultrasonic wave to the object to be cleaned 10 immersed in the liquid 131, and a pressure adjustment unit P are provided. .

  The type of the rinsing liquid 131 used for the rinsing cleaning is not particularly limited, but pure water is used in this embodiment.

  Since each rinse washing tank 130a, 130b is comprised substantially the same as the washing tank 110, description of the structure of each part is abbreviate | omitted.

  The finishing cleaning tank 140 provided in the cleaning apparatus 100 includes a third storage unit 144 that stores the replacement liquid 141 used for the finishing cleaning, and a third holding space 145 that holds the object to be cleaned 10 away from the replacement liquid 141. An ultrasonic cleaner 143 that removes the cleaning liquid 111 and the rinsing liquid 131 adhering to the object to be cleaned 10 by applying an ultrasonic wave to the object 10 to be cleaned immersed in the replacement liquid 141, and a pressure adjusting unit. P.

  The type of the replacement liquid 141 used for the finish cleaning is not particularly limited, but isopropyl alcohol (IPA) is used in the present embodiment.

  Since the finishing cleaning tank 140 is configured substantially the same as the cleaning tank 110, description of the configuration of each part is omitted.

  The cleaning apparatus 100 may include a control unit for automating the operation of each unit. The control unit can be configured by, for example, a known PC (personal computer) including a CPU and the like.

  Next, the cleaning object 10 will be described with reference to FIGS. 2 and 3. FIG. 2 is a schematic perspective view showing the article 10 to be cleaned, and FIG. 3 is a partial cross-sectional view illustrating a fuel cell 100 to which the article 10 is applied. FIG. 3 shows a cross section corresponding to the cross section along the arrow 4-4 shown in FIG.

  As shown in FIGS. 2 and 3, the object to be cleaned 10 is constituted by a separator laminate used as a constituent member of a fuel cell. An object to be cleaned 10 constituting a separator laminate is formed by joining an anode side separator 11 and a pair of separators of a cathode side separator 12 to each other. Although each separator 11 and 12 is comprised with the thin metal plate which has electroconductivity, a material is not specifically limited, A well-known material can be used suitably.

  The fuel cell 100 generates electric power from the supplied fuel gas (hydrogen) and oxidant gas (air containing oxygen or pure oxygen) in a stacked state. The object to be cleaned 10 has a function of energizing power generated in the membrane electrode assembly 30 while isolating the membrane electrode assembly 30 included in the fuel cell 100 from other adjacent membrane electrode assemblies 30. The anode-side separator 11 included in the object to be cleaned 10 is disposed in contact with the anode 32 of the membrane electrode assembly 30, and the cathode-side separator 12 included in the object to be cleaned 10 contacts the cathode 32 of the membrane electrode assembly 30. They are placed in contact.

  The membrane electrode assembly 30 generates electric power by chemically reacting the supplied oxygen and hydrogen. The membrane electrode assembly 30 is formed by joining an anode 32 and a cathode 33 so as to face each other with an electrolyte membrane 31 therebetween. The membrane electrode assembly 30 is generally referred to as MEA (membrane electrode assembly). The electrolyte membrane 31 can be made of a solid polymer material. The anode 32 is formed by laminating an electrode catalyst layer, a water repellent layer, and a gas diffusion layer. The cathode 33 is formed by laminating an electrode catalyst layer, a water repellent layer, and a gas diffusion layer. The electrode catalyst layers of the anode 32 and the cathode 33 include an electrode catalyst in which a catalyst component is supported on a conductive carrier and a polymer electrolyte. The gas diffusion layers of the anode 32 and the cathode 33 are made of carbon cloth, carbon paper, or carbon felt woven with carbon fiber yarns.

  In the center of the anode-side separator 11, an uneven channel forming portion 11 g is formed. As shown in FIG. 3, the closed space defined between the flow path forming portion 11 g of the anode separator 11 and the anode 32 constitutes an anode gas flow path 13 that supplies hydrogen to the anode 32.

  The anode-side separator 11 has a through hole corresponding to the cathode gas supply port 11a, the cooling fluid supply port 11b, and the anode gas supply port 11c at one end in the longitudinal direction. The anode-side separator 11 has a through hole corresponding to the anode gas discharge port 11d, the cooling fluid discharge port 11e, and the cathode gas discharge port 11f at the other end in the longitudinal direction.

  In the center of the cathode separator 12, an uneven channel forming part 12 g is formed. As shown in FIG. 3, the closed space defined between the flow path forming portion 12 g of the cathode separator 12 and the cathode 33 constitutes a cathode gas flow path 15 that supplies an oxidant gas to the cathode 33. .

  As shown in FIG. 3, the separators 11 and 12 are arranged to face each other such that the flow path forming portions 11 g and 12 g face each other. The closed space formed between the flow path forming portion 11g of the anode side separator 11 and the flow path forming portion 12g of the cathode side separator 12 is a cooling water flow path (corresponding to the flow path portion) through which cooling water can flow. 15) is configured. The separators 11 and 12 are joined to each other in a state in which the cooling water channel 15 is formed. The joining location 18 can be provided in each flow path formation part adjacent to the flow path formation parts 11g and 12g which form the cooling water flow path 15, for example. Although welding is adopted as the joining method, the joining method can be appropriately selected according to the material of the separators 11 and 12 and is not particularly limited.

  Here, as shown in FIG. 5A, a plurality of gaps g <b> 1 and g <b> 2 are formed in the object to be cleaned 10 including the anode side separator 11 and the cathode side separator 12. 5A shows the configuration of the end portions of the separators 11 and 12 corresponding to the portion surrounded by the broken line portion 5 shown in FIG. 2 for the sake of simplicity.

  The gap portion g1 is a cooling water flow path 15 formed between the separators 11 and 12. The gap part g <b> 2 is a minute gap that communicates between the coolant channel 15 and the welded part 18. The gap portion g2 is gripped when the separators 11 and 12 are arranged to face each other, when the separators 11 and 12 are slightly different in product shape or when the separators 11 and 12 are positioned and gripped at the time of joining. It is a minute thing that can be caused by a difference in force. In the object 10 to be cleaned, a minute gap is also formed in the butting portion 19 located on the opposite side of the position where the welded portion 18 is formed as viewed from the gap portion g1. As shown in the figure, the article to be cleaned 10 formed by joining the separators 11 and 12 has a bag structure in which the gaps g1 and g2 communicate with the outside through a butting portion 19.

  When cleaning the article 10 to be cleaned, liquid cleaning media such as the cleaning liquid 111 and the rinsing liquid 131 are allowed to enter the gaps g1 and g2, thereby staying in the gaps g1 and g2, or the gaps g1. , Dirt attached to each part of the separators 11 and 12 facing g2 can be cleaned. However, since the gaps g1 and g2 are formed in a bag shape by the abutting part 19, once the cleaning medium enters the gaps g1 and g2, the cleaning medium is discharged due to the influence of surface tension and the like. Cannot be done easily. If the cleaning medium is not discharged from the gaps g1 and g2, and the cleaning medium is taken out between the processes, and brought in, problems such as a decrease in cleaning performance and an increase in running cost occur. In the cleaning method according to the present embodiment, it is possible to suitably discharge the cleaning medium from the gaps g1 and g2, thereby preventing the cleaning medium from remaining in the gaps g1 and g2. ing.

  The cleaning method according to the present embodiment will be described with reference to FIGS. 1 and 4. In addition, each code | symbol of S11-S22 shown in FIG. 1 respond | corresponds to each step shown in FIG. 4, and has shown the place where each step is implemented in the washing | cleaning apparatus 100. FIG.

  As shown in FIG. 4, in the cleaning method according to the present embodiment, the object to be cleaned 10 is immersed in the cleaning liquid 111 and the cleaning liquid 111 is cleaned (S 11), and the object 10 to be cleaned is immersed in the rinsing liquid 131. And rinsing and washing with the rinsing liquid 131 (S15, S18), and immersing the article to be cleaned 10 in the volatile substitution liquid 141 and washing with the substitution liquid 141 (S21). Yes. Then, after the step (S11) of cleaning the object 10 with the cleaning liquid 111 and before the step (S21) of cleaning with the replacement liquid 141, the object 10 to be cleaned is taken out from the cleaning medium. A step (S12, S14, S16, S17, S19, S20, and a step of discharging the cleaning medium remaining in the gaps g1 and g2 by reducing the ambient atmosphere communicating with the gaps g1 and g2 of the article 10 to be cleaned. S22) is performed. In the following description, each step (S12, S14, S16, S17, S19, S20, S22) for discharging the cleaning medium is referred to as a liquid draining step by decompression for convenience.

  Each step of the cleaning method will be described with reference to FIGS. 1, 4, and 5 </ b> A to 6 </ b> D. FIG. 5A to FIG. 6D are conceptual diagrams for explaining the cleaning method, and the state of the object to be cleaned 10 in each process (the state of contamination and the state of attachment of the cleaning medium) is limited to the illustrated state. There is no.

  First, cleaning with the cleaning liquid 111 is performed (S11).

  At the time of cleaning, the article to be cleaned 10 is immersed in the cleaning liquid 111 stored in the first storage unit 114 of the cleaning tank 110. When the object 10 to be cleaned is immersed in the cleaning liquid 111, the inside of the cleaning tank 110 is set to atmospheric pressure (about 100 kPa). Immersion is performed by setting a plurality of objects to be cleaned 10 on a cleaning rod (not shown). By using the cleaning basket, a plurality of objects to be cleaned 10 are simultaneously cleaned.

  As shown in FIG. 5A, before the object to be cleaned 10 is immersed in the cleaning liquid 111, the gaps g1 and g2 of the object to be cleaned 10 are filled with a gas such as air. As shown in FIG. 5B, when the article to be cleaned 10 is immersed in the cleaning liquid 111, the cleaning liquid 111 enters the gaps g1 and g2. A predetermined amount of air a filled in the gaps g1 and g2 is dissolved in the cleaning liquid 111 that has entered the gaps g1 and g2.

  In a state where the object to be cleaned 10 is immersed in the cleaning liquid 111, the ultrasonic cleaner 113 is operated to clean the object 10 to be cleaned. During cleaning, the inside of the cleaning tank 110 is maintained at atmospheric pressure.

  The object to be cleaned 10 is lifted to the first holding space 115 after being cleaned. The object 110 to be cleaned is exposed to a gas (for example, air) staying in the first holding space 115. The cleaning liquid 111 that has entered during cleaning is left in the gaps g1 and g2 of the object 10 after cleaning.

  Next, liquid draining by depressurization is performed in the cleaning tank 110 (S12).

  The pressure adjusting unit P is operated in a state where the object to be cleaned 110 is disposed in the first holding space 115. By operating the pressure adjusting unit P and reducing the pressure inside the cleaning tank 110, the atmosphere around the object to be cleaned 10 is reduced in pressure. When the surrounding atmosphere of the article to be cleaned 10 is depressurized, the insides of the gaps g1 and g2 communicating with the surrounding atmosphere are depressurized. Then, as shown in FIG. 5C, the air dissolved in the cleaning liquid 111 remaining in the gaps g1 and g2 expands, and the remaining cleaning liquid 111 is physically pushed out from the gaps g1 and g2 and discharged. . At this time, since the air is ejected to the surrounding atmosphere (in the gas) decompressed with the expanded force, the cleaning liquid 111 having a volume larger than the actual volume of the air is discharged to the outside of the object to be cleaned 10. For example, when the pressure is reduced while being immersed in the cleaning liquid 111, the amount of the cleaning liquid 111 pushed out by the expanded air is reduced as compared with the case where the pressure is reduced in the surrounding atmosphere. By reducing the pressure in the ambient atmosphere, a larger amount of the cleaning liquid 111 can be discharged from the gaps g1 and g2. By performing liquid drainage utilizing the expansion action of gas, the cleaning liquid 111 remaining in the gaps g1 and g2 can be efficiently discharged.

  The pressure in the cleaning tank 110 under reduced pressure (pressure in the surrounding atmosphere) is not particularly limited as long as the cleaning liquid 111 can be pushed out by gas expansion as described above, but is set to about 10 to 40 kPa, for example. Can do.

  When the inside of the cleaning tank 110 is depressurized, the volatilization point of the cleaning liquid 111 attached to the object to be cleaned 10 is lowered, so that a predetermined amount of the cleaning liquid 111 can be evaporated by the heat amount of the object to be cleaned 10 itself. Therefore, a part of the cleaning liquid 111 can be removed from the object to be cleaned 10 by evaporation. However, when an inorganic cleaning liquid is used as the cleaning liquid 111, if the cleaning liquid 111 attached to the object to be cleaned 10 is completely dried, the components of the cleaning liquid 111 remain on the surface of the object to be cleaned 10, and the product quality May be reduced. For this reason, when there is a concern about deterioration in quality due to remaining components of the cleaning liquid 111, it is possible to proceed to the next process without performing the process (S12) of discharging the cleaning liquid 111.

  After discharging the cleaning liquid 111, the pressure in the first cleaning tank 110 is returned to atmospheric pressure.

  Next, the temperature of the article 10 to be cleaned is adjusted (S13).

  The object 10 to be cleaned after being cleaned with the cleaning liquid 111 is taken out from the cleaning tank 110 and immersed in the cooling water 121 stored in the temperature adjustment tank 120.

  When the temperature of the article to be cleaned 10 is lowered using the temperature adjustment tank 120, the temperature of the cleaning liquid 111 attached and remaining on the article to be cleaned 10 together with the object to be cleaned 10 is decreased. When the temperature of the cleaning liquid 111 is relatively high, the dissolved amount of gas such as air dissolved in the cleaning liquid 111 decreases. In such a state, if the liquid draining step (S14) by depressurization is performed before the rinsing cleaning step (S15), the dischargeability of the cleaning liquid 111 due to gas expansion will be reduced. In addition, as described above, the cleaning liquid 111 remaining on the object to be cleaned 10 is volatilized and completely dried during the liquid draining step (S14) by decompression, so that the remaining component of the cleaning liquid 111 remains. There is a risk of quality degradation due to. For this reason, the process of cooling the to-be-cleaned object 10 is implemented prior to implementing the liquid removal process (S14) by pressure reduction. In addition, the temperature of the to-be-cleaned object 10 after cooling is not specifically limited as long as the temperature which can prevent complete drying and the increase of the dissolved amount of gas can be aimed at. For example, when the object to be cleaned 10 is in an excessively cooled state, the object to be cleaned 10 may be warmed within a predetermined temperature range so that it can be suitably dried in a drying process described later. . In such a case, the temperature adjustment tank 120 can be appropriately changed to a configuration capable of heating.

  Next, liquid drainage by depressurization is performed in the first rinse cleaning tank 130a (S14).

  The object 10 to be cleaned whose temperature is adjusted by the temperature adjustment tank 120 is arranged in the second holding space 135 of the first rinse cleaning tank 130a. The atmosphere around the object to be cleaned 10 is depressurized by the pressure adjusting unit P, and the cleaning liquid 111 is discharged from the gaps g1 and g2.

  After the liquid draining step by depressurization (S14), the object to be cleaned 10 is immersed in the rinsing liquid 131 while the inside of the first rinsing bath 130a is maintained in a depressurized state. Here, when the cleaning liquid 111 is pushed out from the gaps g1 and g2 by performing liquid drainage by decompression, as shown in FIG. 5D, spaces s corresponding to the pushed-out volume are generated in the gaps g1 and g2. In addition, the space s is in a state of being depressurized by performing liquid draining. Therefore, when the article to be cleaned 10 is immersed in the rinsing liquid 131, the rinsing liquid 131 invades vigorously toward the spaces s in the gaps g1 and g2. As a result, as shown in FIG. 6A, the rinsing liquid 131 can be easily filled in the gaps g1 and g2.

  Next, rinsing with the rinsing liquid 131 stored in the first rinsing tank 130a is performed (S15).

  The pressure in the first rinse tank 130 a is returned to atmospheric pressure after the article to be cleaned 10 is immersed in the rinse liquid 131. Then, with the article to be cleaned 10 immersed in the rinsing liquid 131, the ultrasonic cleaning machine 133 is operated to rinse and wash the article to be cleaned 10.

  Next, liquid drainage by depressurization is performed in the first rinse tank 130a (S16).

  The object to be cleaned 10 is rinsed and then pulled up to the second holding space 135. Then, the atmosphere around the object to be cleaned 10 is depressurized by the pressure adjusting unit P, and the cleaning liquid 111 and the rinsing liquid 131 are discharged from the gaps g1 and g2, as shown in FIG. 6B. By depressurizing the surrounding atmosphere and expanding a gas such as air dissolved in the rinsing liquid 131, the cleaning liquid 111 and the rinsing liquid 131 can be efficiently discharged.

  In the first rinsing cleaning tank 130a, draining by reduced pressure, immersing the article to be cleaned 10 in the rinsing liquid 131 under reduced pressure, and rinsing cleaning under atmospheric pressure can be repeated a plurality of times. By repeating these steps, it is possible to discharge most of the cleaning liquid 111 remaining in the gaps g1 and g2 of the article 10 to be cleaned, thereby further enhancing the cleaning effect of the rinsing liquid 131. Can do.

  Next, liquid drainage by depressurization is performed in the second rinse cleaning tank 130b (S17). In addition, since each process (S17-S19) implemented in the 2nd rinse washing tank 130b is substantially the same as each process (S14-S16) implemented in the 1st rinse washing tank 130a, description is one. Omitted.

  The object 10 to be cleaned after being rinsed and washed by the first rinse tank 130a is arranged in the second holding space 135 of the second rinse tank 130b. The atmosphere around the object to be cleaned 10 is depressurized by the pressure adjusting unit P, and the cleaning liquid 111 is discharged from the gaps g1 and g2. After the liquid draining step by depressurization (S17), the object to be cleaned 10 is immersed in the rinsing liquid 131 whose liquid quality is controlled while maintaining the pressure in the second rinsing tank 130b.

  Next, rinsing with the rinsing liquid 131 stored in the second rinsing bath 130b is performed (S18).

  After the object to be cleaned 10 is immersed in the rinsing liquid 131, the pressure in the second rinse cleaning tank 130b is returned to atmospheric pressure. Then, the object to be cleaned 10 is rinsed and cleaned by operating the ultrasonic cleaner 133.

  Next, liquid drainage by depressurization is performed in the second rinse cleaning tank 130b (S19).

  The object to be cleaned 10 is rinsed and then pulled up to the second holding space 135. Then, the atmosphere around the object to be cleaned 10 is depressurized by the pressure adjusting unit P, and the cleaning liquid 111 and the rinsing liquid 131 are discharged from the gaps g1 and g2. In the second rinsing bath 130b, draining by depressurization, immersing the article to be cleaned 10 in the rinsing liquid 131 under reduced pressure, and rinsing cleaning under atmospheric pressure can be repeated a plurality of times. is there.

  Next, liquid drainage by depressurization is performed in the finish cleaning tank 140 (S20).

  The article 10 to be cleaned rinsed by the second rinse cleaning tank 130 is disposed in the third holding space 145 of the finish cleaning tank 140. Then, the atmosphere around the object to be cleaned 10 is depressurized by the pressure adjusting unit P, and the rinsing liquid 131 remaining in the gaps g1 and g2 is discharged.

  After the liquid draining step by depressurization (S20), the object to be cleaned 10 is immersed in the replacement liquid 141 while maintaining the pressure in the finish cleaning tank 140 reduced.

  Prior to immersing the object to be cleaned 10 in the replacement liquid 141, the liquid removal by decompression is performed a plurality of times, so that the amount of the cleaning medium remaining in the gaps g1 and g2 of the object to be cleaned 10 is greatly increased. Has been reduced. For this reason, as shown in FIG. 6C, a sufficient amount of the replacement liquid 141 can be infiltrated into the gaps g1 and g2 of the article 10 to be cleaned. Moreover, since each clearance gap part g1, g2 of the to-be-cleaned object 10 is immersed in the substitution liquid 141 in the pressure-reduced state, the substitution liquid 141 can be easily filled in each clearance gap part g1, g2.

  Next, cleaning is performed with the replacement liquid 141 stored in the finishing cleaning tank 140 (S21).

  The pressure in the finish cleaning tank 140 is returned to atmospheric pressure after the article to be cleaned 10 is immersed in the replacement liquid 141. Then, the object to be cleaned 10 is cleaned by operating the ultrasonic cleaner 143 while the object to be cleaned 10 is immersed in the replacement liquid 141.

  Next, liquid drainage by depressurization is performed in the finish cleaning tank 140 (S22).

  The object to be cleaned 10 is washed with the replacement liquid 141 and then pulled up to the third holding space 145. Then, the ambient atmosphere around the object to be cleaned 10 is depressurized by the pressure adjusting unit P, and the rinsing liquid 131 slightly remaining in the gaps g1 and g2 is discharged. In the finish cleaning tank 140, it is possible to repeatedly perform liquid draining by depressurization, immersion of the article to be cleaned 10 in the replacement liquid 141 under reduced pressure, and cleaning under atmospheric pressure a plurality of times. By repeating these steps a plurality of times, it is possible to more reliably prevent the rinsing liquid 131 from remaining on the object 10 to be cleaned.

  After removing the rinsing liquid 131 from the object to be cleaned 10, the object to be cleaned 10 is pulled up from the replacement liquid 141 and placed in the third holding space 145. Then, the replacement liquid 141 adhering to the object to be cleaned 10 is volatilized and subjected to evaporative cleaning to finish the surface of the object 10 to be cleaned.

  Next, the article to be cleaned 10 is dried in the finish cleaning tank 140 (S23).

  Drying is performed by depressurizing the interior of the finishing cleaning tank 140 in a state where the object to be cleaned 10 is disposed in the third holding space 145. Although the pressure in the finishing washing tank 140 at the time of drying is not specifically limited, For example, it sets to about 10 kPa. As shown in FIG. 6D, by performing the drying step (S23), the replacement liquid 141 attached to the object to be cleaned 10 evaporates.

  For example, in the case where a plurality of objects to be cleaned 10 are cleaned, if the drying under reduced pressure is performed with a large amount of the cleaning medium adhering to each object 10 to be cleaned, the cleaning medium can be dried only by the heat quantity of the object 10 itself. There are things that cannot be done. In such a case, the object to be cleaned 10 needs to be heated excessively using an external heat source during the drying under reduced pressure. However, if heating is performed, problems such as variations in product quality may occur. May occur. In addition, since the time required for drying becomes long, work delay occurs. On the other hand, in the cleaning method according to the present embodiment, the amount of the cleaning medium such as the cleaning liquid 111 and the rinsing liquid 131 is removed by removing the liquid by decompression and remains in the gaps g1 and g2 of the object 10 to be cleaned. Can be greatly reduced. Accordingly, it is possible to suitably suppress the occurrence of water spots due to the remaining cleaning medium.

  FIG. 7 shows a cleaning apparatus 400 according to the proportionality, and FIGS. 8A to 8B show a cleaning method according to the proportionality.

  The cleaning apparatus 400 according to the comparative example includes a cleaning tank 410 storing the cleaning liquid 111, a plurality of rinsing cleaning tanks 430a, 430b, and 430c storing the rinsing liquid 131, a liquid draining tank 440 that performs liquid draining by air blow, A plurality of finish cleaning tanks 450a and 450b that perform cleaning with the replacement liquid 141 are provided. In addition, although illustration is abbreviate | omitted, each tank is equipped with the ultrasonic cleaner.

  The cleaning apparatus 400 is premised on bringing the cleaning liquid 110 remaining on the object to be cleaned 10 into the rinsing process. For this reason, in order to remove the cleaning liquid 110 reliably, the cleaning device 400 is provided with three rinse cleaning tanks 430a to 430c. Similarly, it is assumed that the rinsing liquid 131 remaining on the object to be cleaned 10 is brought into the cleaning process using the replacement liquid 141. Therefore, in order to reliably remove the rinsing liquid 110, the cleaning device 400 is provided with two finish cleaning tanks 450a and 450b. In the cleaning apparatus 400 according to the proportionality, an increase in equipment cost due to the addition of the rinse cleaning tank and the finishing cleaning tank and an increase in running cost due to bringing each cleaning medium into the next process become problems.

  Further, after the rinsing cleaning, the liquid is drained by air blow. However, with this method, it is difficult to discharge the cleaning medium from the minute gaps g1 and g2 of the object 10 to be cleaned. There is a risk of generating. Furthermore, there is a possibility that the product quality may be deteriorated by deforming the thin plate-like object 10 to be cleaned by the blow pressure. In the cleaning method according to the present embodiment, the liquid draining is performed by applying a pressure reducing action uniformly to the entire object to be cleaned 10 without locally applying pressure to each part of the object 10 to be cleaned. Deformation of the object to be cleaned 10 that may occur by performing draining does not occur.

  Further, in the comparative cleaning method, as shown in FIG. 8A, once the cleaning liquid 111 enters the gaps g1 and g2, the cleaning liquid 111 cannot be easily discharged. Therefore, a large amount of the cleaning liquid 111 remains. For this reason, as shown in FIG. 8B, when the rinsing cleaning is performed, the rinsing liquid 131 cannot sufficiently enter the gaps g1 and g2. As shown in FIG. 8C, the cleaning liquid 111 and the rinsing liquid 131 remain in the gaps g1 and g2 in a large amount even when the cleaning with the replacement liquid 141 is performed. As a result, as shown in FIG. 8D, the cleaning liquid 111 and the rinsing liquid 131 cannot be cleaned with the replacement liquid 141, and water stains are generated on the object 10 to be cleaned.

  As described above, according to the method for cleaning the object to be cleaned 10 according to the present embodiment, the object to be cleaned 10 is taken out from the cleaning medium such as the cleaning liquid 111 and the rinsing liquid 131 prior to performing the cleaning process with the replacement liquid 141. By reducing the atmosphere around the object to be cleaned 10, the cleaning medium remaining in the gaps g1 and g2 of the object to be cleaned 10 can be pushed out and discharged from the gaps g1 and g2. For this reason, it is possible to prevent problems such as an increase in running cost, generation of water stains, and deformation of the object to be cleaned 10 that may occur when the cleaning medium is removed due to the cleaning medium being taken out.

  In addition, after the step of cleaning with the cleaning liquid 111 and before the step of rinsing with the rinsing liquid 131, rinsing is performed by discharging the cleaning liquid 111 remaining in the gaps g1 and g2. It is preferable to prevent an increase in running cost due to bringing the cleaning liquid 111 into the cleaning process, contamination of the rinsing liquid 131 by mixing the cleaning liquid 111 into the rinsing liquid 131, and deterioration in cleaning quality due to contamination of the rinsing liquid 131. can do.

  Moreover, the process of adjusting the temperature of the to-be-cleaned object 10 after the process of cleaning with the cleaning liquid 111, and the process of discharging the cleaning liquid 111 remaining in the gaps g1 and g2 after the process of adjusting the temperature of the to-be-cleaned object 10 By performing the above, it is possible to prevent the cleaning liquid 111 remaining on the object to be cleaned 10 from being volatilized and completely dried during the liquid draining process by the reduced pressure, and the components of the cleaning liquid 111 It is possible to prevent deterioration of quality due to the rest. In addition to this, by increasing the dissolved amount of gas such as air dissolved in the cleaning liquid 111, it is possible to increase the discharge efficiency of the cleaning medium when the liquid draining step by decompression is performed.

  In addition, the object 10 to be cleaned is immersed in the rinsing liquid 131 and the substitution liquid 141 in a state where the gaps g1 and g2 are decompressed, whereby the rinsing liquid 131 and the substitution liquid 141 are introduced into the gaps g1 and g2. The rinsing liquid 131 and the replacement liquid 141 can be easily filled in the gaps g1 and g2.

  Moreover, the to-be-washed | cleaned material 10 provided with the fine clearance gaps g1 and g2 like the separator laminated body used for a fuel cell can be implemented suitably.

  Further, prior to performing the cleaning process with the replacement liquid 141, the cleaning medium remaining in the gaps g1 and g2 of the article to be cleaned 10 can be pushed out and discharged from the gaps g1 and g2. Provided is a cleaning apparatus 100 capable of preventing problems such as an increase in running cost, water stains, and deformation of an object 10 that may occur due to removal of a cleaning medium. be able to.

  In addition, since the cleaning apparatus 100 includes the temperature adjustment tank 120 for adjusting the temperature of the object 10 after being cleaned by the cleaning tank 110, the cleaning apparatus 100 is subjected to the liquid draining process during the decompression process. It is possible to prevent the cleaning liquid 111 remaining on the cleaning object 10 from being volatilized and completely dried, and to prevent the quality from being deteriorated due to the remaining components of the cleaning liquid 111. Furthermore, by increasing the dissolved amount of gas such as air dissolved in the cleaning liquid 111, it is possible to increase the discharge efficiency of the cleaning medium when the liquid draining process by decompression is performed.

<Modification>
Next, a modified example of the cleaning apparatus 100 according to the above-described embodiment will be described. In the description of the modification, the same components as those already described are denoted by the same reference numerals and the description thereof is omitted.

  As shown in FIG. 9, the cleaning device 200 according to the modification includes a first communication path 251 that hermetically communicates between the first rinse cleaning tank 130 a and the second rinse cleaning tank 130 b, and the second The cleaning apparatus 100 is different from the above-described cleaning apparatus 100 in that it has a second communication passage 252 that communicates between the rinse cleaning tank 130b and the finish cleaning tank 140 in an airtight manner.

  The first rinsing bath 130a, the second rinsing bath 130b, and the finish washing bath 140 are arranged in a predetermined vacuum furnace 250. The communication paths 251 and 252 formed in the decompression furnace 250 constitute a part of the holding spaces 135 and 145, respectively. The holding spaces 135 and 145 communicate with each other through the communication paths 251 and 252. Each communication path 251 and 252 is provided with openable and closable shutters 261 and 262 for isolating the tanks 130a, 130b, and 140 in an airtight state.

  In the cleaning method using the cleaning device 200 according to the modified example, the object 10 to be cleaned is transported from the first rinse cleaning tank 130a to the second rinse cleaning tank 130b, and from the second rinse cleaning tank 130b. While the object to be cleaned 10 is conveyed to the finish cleaning tank 140, the ambient atmosphere of the object to be cleaned 10 can be maintained in a reduced pressure state. For example, after rinsing and washing in the first rinsing tank 130a, draining by decompression is performed, the shutter 261 is opened, and the object to be cleaned 10 is moved to the second rinsing tank 130b side. Without reducing the pressure in the rinsing washing tank 130b, it becomes possible to perform liquid draining by reducing the pressure as it is. In other words, since it is possible to drain the liquid while the article to be cleaned 10 is being moved to the second rinsing tank 130b, the liquid is drained each time it is moved into an individual tank. Compared with this, workability can be improved. In the case where the article to be cleaned 10 is transported from the second rinse cleaning tank 130b to the finishing cleaning tank 140, liquid draining can be similarly performed. For this reason, in the cleaning method using the cleaning device 200 according to the modification, the implementation of the liquid draining step (S17, S20) in each tank, which has been performed by the cleaning method by the cleaning device 100 described above, may be omitted. It becomes possible. In addition, since it can move between each tank 130a, 130b, 140 in the pressure-reduced state, it also becomes possible to save the effort required when performing immersion in a pressure-reduced state.

  As mentioned above, although the cleaning method and the cleaning apparatus according to the present invention have been described through the embodiments, the present invention is not limited only to the configuration described in each embodiment, and may be appropriately changed based on the description of the claims. It is possible.

  For example, the step of performing liquid drainage by decompression may be performed after the cleaning with the cleaning liquid and before the cleaning with the replacement liquid, and the timing and number of times to perform are not particularly limited and may be changed as appropriate. Is possible.

  In addition, for example, although the embodiment in which the rinsing cleaning is performed using two rinsing cleaning tanks has been shown, the rinsing cleaning tank only needs to be performed using at least one tank. The number of rinsing baths is not limited, as is the case with the cleaning device according to the modification.

  In addition, for example, the object to be cleaned is not particularly limited as long as the object to be cleaned is a thin plate having a gap into which each cleaning medium can enter, for example, various metal workpieces with complicated shapes, It may be a circuit board or the like.

10 Object to be cleaned (separator laminate),
11 Anode-side separator,
12 Cathode side separator,
14 Cooling water channel (channel part),
18 joints,
19 Butting part,
100 cleaning equipment,
110 Cleaning tank,
111 cleaning liquid (cleaning medium),
114 first reservoir,
115 first holding space;
120 temperature control tank,
121 cooling water,
130a 1st rinse washing tank (rinse washing tank),
130b 2nd rinse washing tank (rinse washing tank),
131 Rinse solution (cleaning medium),
134 second reservoir,
135 second holding space,
140 finish washing tank,
141 substitution solution,
144 third reservoir,
145 third holding space,
250 vacuum furnace,
251 1st communication path,
252 second communication path,
a air,
s space,
g1, g2 gap,
P Pressure adjustment unit.

Claims (8)

A cleaning method for cleaning a thin plate-like object having a gap,
Immersing the object to be cleaned in a cleaning liquid as a cleaning medium, and cleaning with the cleaning liquid;
Immersing the article to be cleaned in a rinsing liquid as a cleaning medium, and rinsing with the rinsing liquid;
Immersing the article to be cleaned in a substitution liquid having volatility and washing with the substitution liquid;
After the step of cleaning the object to be cleaned with the cleaning liquid and before the step of cleaning the object to be cleaned with the replacement liquid, the object to be cleaned is taken out from the cleaning medium in a state of being removed from the cleaning medium. And a step of discharging the cleaning medium remaining in the gap portion by depressurizing the ambient atmosphere communicating with the gap portion of the cleaning object. The step of discharging the cleaning medium includes
The method according to claim 1, further comprising a step of discharging the cleaning liquid as the cleaning medium remaining in the gap after the step of cleaning with the cleaning liquid and before the step of rinsing with the rinse liquid. The washing | cleaning method of the to-be-washed object of description. Adjusting the temperature of the object to be cleaned after the step of cleaning with the cleaning liquid;
The method for cleaning an object to be cleaned according to claim 2, further comprising a step of discharging the cleaning liquid remaining in the gap after the step of adjusting the temperature of the object to be cleaned.   The method for cleaning an object to be cleaned according to any one of claims 1 to 3, wherein the object to be cleaned is immersed in the rinse liquid and / or the replacement liquid in a state where the inside of the gap is decompressed.   The object to be cleaned is a separator laminated body in which a pair of fuel cell separators are arranged to face each other and are joined to each other in a state in which a flow path portion through which a fluid can flow is formed between the separators. The washing | cleaning method of the to-be-washed | cleaned object of any one of Claims 1-4. A cleaning device for cleaning a thin plate-like object having a gap,
A first storage section that stores a cleaning liquid as a cleaning medium, and a cleaning tank that includes a first holding space that holds the object to be cleaned away from the cleaning liquid;
A rinsing tank having a second storage section for storing a rinsing liquid as a cleaning medium, and a second holding space for separating and holding the object to be cleaned from the rinsing liquid;
A third cleaning section for storing a volatile replacement liquid for cleaning the object to be cleaned, and a finish cleaning tank including a third holding space for holding the object to be cleaned away from the replacement liquid; ,
The object to be cleaned communicates with a gap portion of the object to be cleaned in a state where the object to be cleaned is held in any one of the first holding space, the second holding space, and the third holding space. An apparatus for cleaning an object to be cleaned, comprising: a pressure adjusting unit that discharges the cleaning medium remaining in the gap by depressurizing a surrounding atmosphere.   The apparatus for cleaning an object to be cleaned according to claim 6, further comprising a temperature adjusting tank for adjusting the temperature of the object to be cleaned after being cleaned by the cleaning tank.   The apparatus for cleaning an object to be cleaned according to claim 6 or 7, further comprising a communication passage that airtightly communicates between the rinse cleaning tank and the finish cleaning tank.