JPH0566978B2 - - Google Patents
Info
- Publication number
- JPH0566978B2 JPH0566978B2 JP60221351A JP22135185A JPH0566978B2 JP H0566978 B2 JPH0566978 B2 JP H0566978B2 JP 60221351 A JP60221351 A JP 60221351A JP 22135185 A JP22135185 A JP 22135185A JP H0566978 B2 JPH0566978 B2 JP H0566978B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- silicon
- based insulating
- layer
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 23
- 229910052710 silicon Inorganic materials 0.000 claims description 23
- 239000010703 silicon Substances 0.000 claims description 23
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 12
- 239000010409 thin film Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 claims 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 8
- 229920002545 silicone oil Polymers 0.000 description 5
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22135185A JPS6281539A (ja) | 1985-10-04 | 1985-10-04 | 圧力測定装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22135185A JPS6281539A (ja) | 1985-10-04 | 1985-10-04 | 圧力測定装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6281539A JPS6281539A (ja) | 1987-04-15 |
| JPH0566978B2 true JPH0566978B2 (de) | 1993-09-22 |
Family
ID=16765437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22135185A Granted JPS6281539A (ja) | 1985-10-04 | 1985-10-04 | 圧力測定装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6281539A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014033099A (ja) * | 2012-08-03 | 2014-02-20 | Azbil Corp | シリコンチューブの製造方法 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6421330A (en) * | 1987-07-16 | 1989-01-24 | Teijin Ltd | Pressure detector |
| JP4882369B2 (ja) * | 2005-12-27 | 2012-02-22 | 横浜ゴム株式会社 | 空気圧検知システム |
| DE102013102206B4 (de) * | 2013-03-06 | 2016-04-07 | Epcos Ag | Bauelement mit gestapelten funktionalen Strukturen und Verfahren zur Herstellung |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56140231A (en) * | 1980-03-06 | 1981-11-02 | Bosch Gmbh Robert | Pressure measuring gauge |
-
1985
- 1985-10-04 JP JP22135185A patent/JPS6281539A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56140231A (en) * | 1980-03-06 | 1981-11-02 | Bosch Gmbh Robert | Pressure measuring gauge |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014033099A (ja) * | 2012-08-03 | 2014-02-20 | Azbil Corp | シリコンチューブの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6281539A (ja) | 1987-04-15 |
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