JPH056641B2 - - Google Patents

Info

Publication number
JPH056641B2
JPH056641B2 JP59187750A JP18775084A JPH056641B2 JP H056641 B2 JPH056641 B2 JP H056641B2 JP 59187750 A JP59187750 A JP 59187750A JP 18775084 A JP18775084 A JP 18775084A JP H056641 B2 JPH056641 B2 JP H056641B2
Authority
JP
Japan
Prior art keywords
thin film
measured
inductance
measurement
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59187750A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6166104A (ja
Inventor
Shiro Fukushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP18775084A priority Critical patent/JPS6166104A/ja
Publication of JPS6166104A publication Critical patent/JPS6166104A/ja
Publication of JPH056641B2 publication Critical patent/JPH056641B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP18775084A 1984-09-07 1984-09-07 金属薄膜膜厚測定方法 Granted JPS6166104A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18775084A JPS6166104A (ja) 1984-09-07 1984-09-07 金属薄膜膜厚測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18775084A JPS6166104A (ja) 1984-09-07 1984-09-07 金属薄膜膜厚測定方法

Publications (2)

Publication Number Publication Date
JPS6166104A JPS6166104A (ja) 1986-04-04
JPH056641B2 true JPH056641B2 (US06420036-20020716-C00037.png) 1993-01-27

Family

ID=16211542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18775084A Granted JPS6166104A (ja) 1984-09-07 1984-09-07 金属薄膜膜厚測定方法

Country Status (1)

Country Link
JP (1) JPS6166104A (US06420036-20020716-C00037.png)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3519806B2 (ja) * 1994-11-29 2004-04-19 株式会社小野測器 厚さ弁別装置
SE517293C2 (sv) * 1999-06-30 2002-05-21 Abb Ab Förfarande och anordning för induktiv mätning av geometrisk dimension och elektrisk egenskap med motriktade magnetfält
JP3907414B2 (ja) * 2000-01-17 2007-04-18 株式会社荏原製作所 ポリッシング装置
TWI241398B (en) * 2000-03-28 2005-10-11 Toshiba Corp Eddy current loss measuring sensor, film thickness measuring device, film thickness measuring method and recording medium
JP4514942B2 (ja) * 2000-12-07 2010-07-28 株式会社アルバック 成膜装置
US7205166B2 (en) * 2002-06-28 2007-04-17 Lam Research Corporation Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties
US7112961B2 (en) * 2002-12-13 2006-09-26 Applied Materials, Inc. Method and apparatus for dynamically measuring the thickness of an object
US6788050B2 (en) * 2002-12-23 2004-09-07 Lam Research Corp. System, method and apparatus for thin-film substrate signal separation using eddy current
TWI681184B (zh) * 2017-12-21 2020-01-01 國立虎尾科技大學 應用於ｐｃｂ多層板之非接觸式上下層銅厚的量測方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5425755A (en) * 1977-07-27 1979-02-26 Measurex Corp Thickness meter for measuring sheettlike body
JPS5753604A (en) * 1980-09-18 1982-03-30 Yokogawa Hokushin Electric Corp Thickness gauge

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5425755A (en) * 1977-07-27 1979-02-26 Measurex Corp Thickness meter for measuring sheettlike body
JPS5753604A (en) * 1980-09-18 1982-03-30 Yokogawa Hokushin Electric Corp Thickness gauge

Also Published As

Publication number Publication date
JPS6166104A (ja) 1986-04-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term