JPH0565776B2 - - Google Patents

Info

Publication number
JPH0565776B2
JPH0565776B2 JP15871684A JP15871684A JPH0565776B2 JP H0565776 B2 JPH0565776 B2 JP H0565776B2 JP 15871684 A JP15871684 A JP 15871684A JP 15871684 A JP15871684 A JP 15871684A JP H0565776 B2 JPH0565776 B2 JP H0565776B2
Authority
JP
Japan
Prior art keywords
helium
compressor
gas
valve
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15871684A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138364A (ja
Inventor
Shigeto Kawamura
Hirotake Kajiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15871684A priority Critical patent/JPS6138364A/ja
Publication of JPS6138364A publication Critical patent/JPS6138364A/ja
Publication of JPH0565776B2 publication Critical patent/JPH0565776B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation By Low-Temperature Treatments (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP15871684A 1984-07-31 1984-07-31 ヘリウム冷凍機 Granted JPS6138364A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15871684A JPS6138364A (ja) 1984-07-31 1984-07-31 ヘリウム冷凍機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15871684A JPS6138364A (ja) 1984-07-31 1984-07-31 ヘリウム冷凍機

Publications (2)

Publication Number Publication Date
JPS6138364A JPS6138364A (ja) 1986-02-24
JPH0565776B2 true JPH0565776B2 (enrdf_load_stackoverflow) 1993-09-20

Family

ID=15677786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15871684A Granted JPS6138364A (ja) 1984-07-31 1984-07-31 ヘリウム冷凍機

Country Status (1)

Country Link
JP (1) JPS6138364A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4762202A (en) * 1986-07-18 1988-08-09 Toyota Jidosha Kabushiki Kaisha Elastic energy storing device
JP5946749B2 (ja) * 2012-11-01 2016-07-06 住友重機械工業株式会社 冷凍装置

Also Published As

Publication number Publication date
JPS6138364A (ja) 1986-02-24

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