JPH0564873B2 - - Google Patents
Info
- Publication number
- JPH0564873B2 JPH0564873B2 JP60022860A JP2286085A JPH0564873B2 JP H0564873 B2 JPH0564873 B2 JP H0564873B2 JP 60022860 A JP60022860 A JP 60022860A JP 2286085 A JP2286085 A JP 2286085A JP H0564873 B2 JPH0564873 B2 JP H0564873B2
- Authority
- JP
- Japan
- Prior art keywords
- trapezoid
- internal electrodes
- exposed
- electrostrictive
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims abstract description 28
- 230000000694 effects Effects 0.000 claims description 17
- 239000011521 glass Substances 0.000 abstract description 20
- FKSZLDCMQZJMFN-UHFFFAOYSA-N [Mg].[Pb] Chemical compound [Mg].[Pb] FKSZLDCMQZJMFN-UHFFFAOYSA-N 0.000 abstract description 2
- 239000011230 binding agent Substances 0.000 abstract description 2
- 238000005266 casting Methods 0.000 abstract description 2
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 abstract description 2
- 238000010030 laminating Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 17
- 239000000843 powder Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 239000012212 insulator Substances 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000001962 electrophoresis Methods 0.000 description 4
- 239000002390 adhesive tape Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000003985 ceramic capacitor Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- DHEIAYDROZXXGS-UHFFFAOYSA-N ethanol;iodine Chemical compound [I].CCO DHEIAYDROZXXGS-UHFFFAOYSA-N 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- ZFZQOKHLXAVJIF-UHFFFAOYSA-N zinc;boric acid;dihydroxy(dioxido)silane Chemical compound [Zn+2].OB(O)O.O[Si](O)([O-])[O-] ZFZQOKHLXAVJIF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/501—Piezoelectric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section in stacking direction, e.g. polygonal, trapezoidal
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60022860A JPS61182284A (ja) | 1985-02-08 | 1985-02-08 | 電歪効果素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60022860A JPS61182284A (ja) | 1985-02-08 | 1985-02-08 | 電歪効果素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61182284A JPS61182284A (ja) | 1986-08-14 |
| JPH0564873B2 true JPH0564873B2 (de) | 1993-09-16 |
Family
ID=12094466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60022860A Granted JPS61182284A (ja) | 1985-02-08 | 1985-02-08 | 電歪効果素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61182284A (de) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4803763A (en) * | 1986-08-28 | 1989-02-14 | Nippon Soken, Inc. | Method of making a laminated piezoelectric transducer |
| JP2598301Y2 (ja) * | 1992-06-19 | 1999-08-09 | 株式会社村田製作所 | チップ圧電振動子 |
| DE4332966A1 (de) * | 1993-09-28 | 1995-03-30 | Philips Patentverwaltung | Torsionsaktuator und ein Verfahren zu dessen Herstellung |
| US20030020377A1 (en) | 2001-07-30 | 2003-01-30 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element and piezoelectric/electrostrictive device and production method thereof |
| JP2003046154A (ja) * | 2001-07-30 | 2003-02-14 | Ngk Insulators Ltd | 圧電／電歪素子、圧電／電歪デバイスおよびそれらの製造方法 |
| US7554251B2 (en) * | 2004-03-09 | 2009-06-30 | Kyocera Corporation | Multi-layer piezoelectric element and method for manufacturing the same |
| JP5123491B2 (ja) * | 2005-06-10 | 2013-01-23 | 日本碍子株式会社 | 積層型圧電／電歪素子 |
| JP2007142209A (ja) * | 2005-11-18 | 2007-06-07 | Fujitsu Ltd | 圧電素子及びその製造方法 |
| DE102005061752A1 (de) * | 2005-12-21 | 2007-07-05 | Eads Deutschland Gmbh | Dreidimensionales Stapelpiezoelement und piezoelektrischer Aktuator mit einem solchen Stapelpiezoelement |
| JP2010199272A (ja) * | 2009-02-25 | 2010-09-09 | Kyocera Corp | 積層型圧電素子およびその製法ならびに振動体 |
| JP6141598B2 (ja) * | 2012-01-17 | 2017-06-07 | セイコーエプソン株式会社 | 圧力センサー |
-
1985
- 1985-02-08 JP JP60022860A patent/JPS61182284A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61182284A (ja) | 1986-08-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB2242312A (en) | Laminated displacement device | |
| JPS62274681A (ja) | 電歪効果素子 | |
| JPH0564873B2 (de) | ||
| JPS6317354B2 (de) | ||
| JPS6317355B2 (de) | ||
| JPH0256830B2 (de) | ||
| JPH0256826B2 (de) | ||
| JPS58196069A (ja) | 電歪効果素子 | |
| JPH06105800B2 (ja) | 電歪効果素子 | |
| JPH055387B2 (de) | ||
| JPH0256827B2 (de) | ||
| JPS59115579A (ja) | 電歪効果素子およびその製造方法 | |
| JPH0394487A (ja) | 圧電アクチュエータ | |
| JPH06181343A (ja) | 積層型変位素子及びその製造方法 | |
| JPH01184968A (ja) | 積層型圧電素子の製造法 | |
| JPS6318352B2 (de) | ||
| JPH0256828B2 (de) | ||
| JPS6086883A (ja) | 電歪効果素子の製造方法 | |
| JPH0534122Y2 (de) | ||
| JPH0256829B2 (de) | ||
| JPH11238918A (ja) | 積層型圧電アクチュエータ | |
| JPH0420248B2 (de) | ||
| JPH09148638A (ja) | 積層圧電アクチュエータおよびその製造方法 | |
| JPS6225475A (ja) | 電歪効果素子およびその製造方法 | |
| JPS6086881A (ja) | 電歪効果素子の製造方法 |