JPH0564747B2 - - Google Patents

Info

Publication number
JPH0564747B2
JPH0564747B2 JP59260783A JP26078384A JPH0564747B2 JP H0564747 B2 JPH0564747 B2 JP H0564747B2 JP 59260783 A JP59260783 A JP 59260783A JP 26078384 A JP26078384 A JP 26078384A JP H0564747 B2 JPH0564747 B2 JP H0564747B2
Authority
JP
Japan
Prior art keywords
piezoresistors
cantilever
semiconductor
resistors
piezoresistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59260783A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61139758A (ja
Inventor
Koichi Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP26078384A priority Critical patent/JPS61139758A/ja
Publication of JPS61139758A publication Critical patent/JPS61139758A/ja
Publication of JPH0564747B2 publication Critical patent/JPH0564747B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP26078384A 1984-12-12 1984-12-12 半導体加速度センサ Granted JPS61139758A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26078384A JPS61139758A (ja) 1984-12-12 1984-12-12 半導体加速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26078384A JPS61139758A (ja) 1984-12-12 1984-12-12 半導体加速度センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP6169533A Division JP2650623B2 (ja) 1994-07-21 1994-07-21 半導体加速度センサ

Publications (2)

Publication Number Publication Date
JPS61139758A JPS61139758A (ja) 1986-06-27
JPH0564747B2 true JPH0564747B2 (OSRAM) 1993-09-16

Family

ID=17352666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26078384A Granted JPS61139758A (ja) 1984-12-12 1984-12-12 半導体加速度センサ

Country Status (1)

Country Link
JP (1) JPS61139758A (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0713644B2 (ja) * 1986-11-14 1995-02-15 日本電装株式会社 半導体式加速度検出装置
JPH0648421Y2 (ja) * 1987-07-08 1994-12-12 日産自動車株式会社 半導体加速度センサ
DE3816628A1 (de) * 1987-09-30 1989-04-20 Aisin Seiki Beschleunigungsmessvorrichtung
JPH0664085B2 (ja) * 1989-05-23 1994-08-22 日本電装株式会社 半導体式加速度検出装置
JPH0413975A (ja) * 1990-05-07 1992-01-17 Nec Corp 半導体加速度センサ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5634109A (en) * 1979-08-29 1981-04-06 Fujitsu Ltd Magnetic recording apparatus

Also Published As

Publication number Publication date
JPS61139758A (ja) 1986-06-27

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