JPS61139758A - 半導体加速度センサ - Google Patents

半導体加速度センサ

Info

Publication number
JPS61139758A
JPS61139758A JP26078384A JP26078384A JPS61139758A JP S61139758 A JPS61139758 A JP S61139758A JP 26078384 A JP26078384 A JP 26078384A JP 26078384 A JP26078384 A JP 26078384A JP S61139758 A JPS61139758 A JP S61139758A
Authority
JP
Japan
Prior art keywords
resistors
acceleration sensor
piezoresistors
damaged
bridge circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26078384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0564747B2 (OSRAM
Inventor
Koichi Murakami
浩一 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP26078384A priority Critical patent/JPS61139758A/ja
Publication of JPS61139758A publication Critical patent/JPS61139758A/ja
Publication of JPH0564747B2 publication Critical patent/JPH0564747B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP26078384A 1984-12-12 1984-12-12 半導体加速度センサ Granted JPS61139758A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26078384A JPS61139758A (ja) 1984-12-12 1984-12-12 半導体加速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26078384A JPS61139758A (ja) 1984-12-12 1984-12-12 半導体加速度センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP6169533A Division JP2650623B2 (ja) 1994-07-21 1994-07-21 半導体加速度センサ

Publications (2)

Publication Number Publication Date
JPS61139758A true JPS61139758A (ja) 1986-06-27
JPH0564747B2 JPH0564747B2 (OSRAM) 1993-09-16

Family

ID=17352666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26078384A Granted JPS61139758A (ja) 1984-12-12 1984-12-12 半導体加速度センサ

Country Status (1)

Country Link
JP (1) JPS61139758A (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63124964A (ja) * 1986-11-14 1988-05-28 Nippon Denso Co Ltd 半導体式加速度検出装置
JPS6410664U (OSRAM) * 1987-07-08 1989-01-20
DE3816628A1 (de) * 1987-09-30 1989-04-20 Aisin Seiki Beschleunigungsmessvorrichtung
JPH02307064A (ja) * 1989-05-23 1990-12-20 Nippondenso Co Ltd 半導体式加速度検出装置
JPH0413975A (ja) * 1990-05-07 1992-01-17 Nec Corp 半導体加速度センサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5634109A (en) * 1979-08-29 1981-04-06 Fujitsu Ltd Magnetic recording apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5634109A (en) * 1979-08-29 1981-04-06 Fujitsu Ltd Magnetic recording apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63124964A (ja) * 1986-11-14 1988-05-28 Nippon Denso Co Ltd 半導体式加速度検出装置
JPS6410664U (OSRAM) * 1987-07-08 1989-01-20
DE3816628A1 (de) * 1987-09-30 1989-04-20 Aisin Seiki Beschleunigungsmessvorrichtung
JPH02307064A (ja) * 1989-05-23 1990-12-20 Nippondenso Co Ltd 半導体式加速度検出装置
JPH0413975A (ja) * 1990-05-07 1992-01-17 Nec Corp 半導体加速度センサ

Also Published As

Publication number Publication date
JPH0564747B2 (OSRAM) 1993-09-16

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