JPH0564357B2 - - Google Patents
Info
- Publication number
- JPH0564357B2 JPH0564357B2 JP59180597A JP18059784A JPH0564357B2 JP H0564357 B2 JPH0564357 B2 JP H0564357B2 JP 59180597 A JP59180597 A JP 59180597A JP 18059784 A JP18059784 A JP 18059784A JP H0564357 B2 JPH0564357 B2 JP H0564357B2
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- display
- electrode
- thin film
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 19
- 239000011159 matrix material Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 9
- 239000004973 liquid crystal related substance Substances 0.000 claims description 4
- 230000005693 optoelectronics Effects 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 239000010408 film Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000012769 display material Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59180597A JPS6159474A (ja) | 1984-08-31 | 1984-08-31 | アクティブマトリクスディスプレイ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59180597A JPS6159474A (ja) | 1984-08-31 | 1984-08-31 | アクティブマトリクスディスプレイ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6159474A JPS6159474A (ja) | 1986-03-26 |
| JPH0564357B2 true JPH0564357B2 (de) | 1993-09-14 |
Family
ID=16086041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59180597A Granted JPS6159474A (ja) | 1984-08-31 | 1984-08-31 | アクティブマトリクスディスプレイ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6159474A (de) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62280890A (ja) * | 1986-05-30 | 1987-12-05 | 松下電器産業株式会社 | アクテイブマトリツクスアレイ |
| US6462722B1 (en) | 1997-02-17 | 2002-10-08 | Seiko Epson Corporation | Current-driven light-emitting display apparatus and method of producing the same |
| JP4207979B2 (ja) * | 1997-02-17 | 2009-01-14 | セイコーエプソン株式会社 | 表示装置 |
| KR100544821B1 (ko) | 1997-02-17 | 2006-01-24 | 세이코 엡슨 가부시키가이샤 | 유기 ｅｌ 장치 |
-
1984
- 1984-08-31 JP JP59180597A patent/JPS6159474A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6159474A (ja) | 1986-03-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |