JPH056340B2 - - Google Patents
Info
- Publication number
- JPH056340B2 JPH056340B2 JP58187391A JP18739183A JPH056340B2 JP H056340 B2 JPH056340 B2 JP H056340B2 JP 58187391 A JP58187391 A JP 58187391A JP 18739183 A JP18739183 A JP 18739183A JP H056340 B2 JPH056340 B2 JP H056340B2
- Authority
- JP
- Japan
- Prior art keywords
- deflection
- electron beam
- exposed
- height
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 24
- 238000010894 electron beam technology Methods 0.000 claims description 19
- 238000003384 imaging method Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 description 9
- 238000005259 measurement Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18739183A JPS6079722A (ja) | 1983-10-06 | 1983-10-06 | 電子線露光方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18739183A JPS6079722A (ja) | 1983-10-06 | 1983-10-06 | 電子線露光方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6079722A JPS6079722A (ja) | 1985-05-07 |
JPH056340B2 true JPH056340B2 (zh) | 1993-01-26 |
Family
ID=16205200
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18739183A Granted JPS6079722A (ja) | 1983-10-06 | 1983-10-06 | 電子線露光方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6079722A (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2339960B (en) * | 1998-07-16 | 2001-01-17 | Advantest Corp | Charged particle beam exposure apparatus and exposure method capable of highly accurate exposure in the presence of partial surface unevenness of the specimen |
JP2000091225A (ja) | 1998-07-16 | 2000-03-31 | Advantest Corp | 荷電粒子ビ―ム露光装置及び露光方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5760205A (en) * | 1980-09-30 | 1982-04-12 | Jeol Ltd | Exposure be electron beam |
JPS58119642A (ja) * | 1981-12-31 | 1983-07-16 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 電子線自動焦点装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57140734U (zh) * | 1981-02-27 | 1982-09-03 |
-
1983
- 1983-10-06 JP JP18739183A patent/JPS6079722A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5760205A (en) * | 1980-09-30 | 1982-04-12 | Jeol Ltd | Exposure be electron beam |
JPS58119642A (ja) * | 1981-12-31 | 1983-07-16 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 電子線自動焦点装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6079722A (ja) | 1985-05-07 |
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