JPH0563230B2 - - Google Patents

Info

Publication number
JPH0563230B2
JPH0563230B2 JP11206985A JP11206985A JPH0563230B2 JP H0563230 B2 JPH0563230 B2 JP H0563230B2 JP 11206985 A JP11206985 A JP 11206985A JP 11206985 A JP11206985 A JP 11206985A JP H0563230 B2 JPH0563230 B2 JP H0563230B2
Authority
JP
Japan
Prior art keywords
film
substrate
water
water surface
monomolecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11206985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61271060A (ja
Inventor
Toshihiko Myazaki
Kunihiro Sakai
Yoshinori Tomita
Hiroyuki Sugata
Hiroshi Matsuda
Yukio Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP11206985A priority Critical patent/JPS61271060A/ja
Publication of JPS61271060A publication Critical patent/JPS61271060A/ja
Priority to US07/157,146 priority patent/US4840821A/en
Publication of JPH0563230B2 publication Critical patent/JPH0563230B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Integrated Circuits (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Magnetic Record Carriers (AREA)
JP11206985A 1985-05-27 1985-05-27 成膜方法 Granted JPS61271060A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11206985A JPS61271060A (ja) 1985-05-27 1985-05-27 成膜方法
US07/157,146 US4840821A (en) 1985-05-27 1988-02-11 Method of and apparatus for forming film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11206985A JPS61271060A (ja) 1985-05-27 1985-05-27 成膜方法

Publications (2)

Publication Number Publication Date
JPS61271060A JPS61271060A (ja) 1986-12-01
JPH0563230B2 true JPH0563230B2 (OSRAM) 1993-09-10

Family

ID=14577282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11206985A Granted JPS61271060A (ja) 1985-05-27 1985-05-27 成膜方法

Country Status (1)

Country Link
JP (1) JPS61271060A (OSRAM)

Also Published As

Publication number Publication date
JPS61271060A (ja) 1986-12-01

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