JPS61271060A - 成膜方法 - Google Patents

成膜方法

Info

Publication number
JPS61271060A
JPS61271060A JP11206985A JP11206985A JPS61271060A JP S61271060 A JPS61271060 A JP S61271060A JP 11206985 A JP11206985 A JP 11206985A JP 11206985 A JP11206985 A JP 11206985A JP S61271060 A JPS61271060 A JP S61271060A
Authority
JP
Japan
Prior art keywords
substrate
film
water
water surface
monomolecular film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11206985A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0563230B2 (OSRAM
Inventor
Toshihiko Miyazaki
俊彦 宮崎
Kunihiro Sakai
酒井　邦裕
Yoshinori Tomita
佳紀 富田
Hiroyuki Sugata
裕之 菅田
Hiroshi Matsuda
宏 松田
Yukio Nishimura
征生 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP11206985A priority Critical patent/JPS61271060A/ja
Publication of JPS61271060A publication Critical patent/JPS61271060A/ja
Priority to US07/157,146 priority patent/US4840821A/en
Publication of JPH0563230B2 publication Critical patent/JPH0563230B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Integrated Circuits (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Magnetic Record Carriers (AREA)
JP11206985A 1985-05-27 1985-05-27 成膜方法 Granted JPS61271060A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11206985A JPS61271060A (ja) 1985-05-27 1985-05-27 成膜方法
US07/157,146 US4840821A (en) 1985-05-27 1988-02-11 Method of and apparatus for forming film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11206985A JPS61271060A (ja) 1985-05-27 1985-05-27 成膜方法

Publications (2)

Publication Number Publication Date
JPS61271060A true JPS61271060A (ja) 1986-12-01
JPH0563230B2 JPH0563230B2 (OSRAM) 1993-09-10

Family

ID=14577282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11206985A Granted JPS61271060A (ja) 1985-05-27 1985-05-27 成膜方法

Country Status (1)

Country Link
JP (1) JPS61271060A (OSRAM)

Also Published As

Publication number Publication date
JPH0563230B2 (OSRAM) 1993-09-10

Similar Documents

Publication Publication Date Title
US4840821A (en) Method of and apparatus for forming film
US4783348A (en) Method and apparatus for depositing monomolecular layers on a substrate
CN102439508B (zh) 制造光学显示器的方法
JPS59183861A (ja) 交互形単分子層の形成法及び形成装置
KR20110048556A (ko) 미립자 코팅 방법
JPS61271060A (ja) 成膜方法
JPS61271053A (ja) 成膜装置
JPS61271052A (ja) 成膜装置
JPS61271051A (ja) 成膜装置
US4674436A (en) Film forming apparatus
JPS60223117A (ja) 単分子累積膜形成方法
US5021268A (en) Method of making asymmetric Langmuir-Blodgett films
JPH0475065B2 (OSRAM)
JPS60222170A (ja) 成膜装置
JPS61271049A (ja) 成膜装置
WO2023035449A1 (zh) 一种钙钛矿太阳能电池原位闪蒸成膜装置
JPS60222169A (ja) 成膜装置
JPS61291058A (ja) 成膜装置
JPS61278374A (ja) Ｌｂ膜作成方法
JPS60222171A (ja) 成膜装置
JPS62286576A (ja) 成膜方法
JPS60261569A (ja) 成膜装置
JPS60225636A (ja) 成膜方法
RS1725U1 (sr) Uređaj za nanošenje grafena na ciljano mesto na podlozi
JPS60193537A (ja) 単分子累積膜成膜方法