JPH0562684B2 - - Google Patents
Info
- Publication number
- JPH0562684B2 JPH0562684B2 JP13408685A JP13408685A JPH0562684B2 JP H0562684 B2 JPH0562684 B2 JP H0562684B2 JP 13408685 A JP13408685 A JP 13408685A JP 13408685 A JP13408685 A JP 13408685A JP H0562684 B2 JPH0562684 B2 JP H0562684B2
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- filter
- detection optical
- detection
- illumination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 50
- 238000005286 illumination Methods 0.000 claims description 31
- 238000001514 detection method Methods 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 20
- 230000007547 defect Effects 0.000 claims description 14
- 238000007689 inspection Methods 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 7
- 239000000428 dust Substances 0.000 description 6
- 239000003086 colorant Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60134086A JPS61292508A (ja) | 1985-06-21 | 1985-06-21 | 欠陥検査方法およびその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60134086A JPS61292508A (ja) | 1985-06-21 | 1985-06-21 | 欠陥検査方法およびその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61292508A JPS61292508A (ja) | 1986-12-23 |
| JPH0562684B2 true JPH0562684B2 (enrdf_load_html_response) | 1993-09-09 |
Family
ID=15120085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60134086A Granted JPS61292508A (ja) | 1985-06-21 | 1985-06-21 | 欠陥検査方法およびその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61292508A (enrdf_load_html_response) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001108630A (ja) * | 1999-10-12 | 2001-04-20 | Sumitomo Chem Co Ltd | 光学透明フィルムの検査方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2963890B2 (ja) | 1998-03-09 | 1999-10-18 | 株式会社スーパーシリコン研究所 | ウェーハの光学式形状測定器 |
-
1985
- 1985-06-21 JP JP60134086A patent/JPS61292508A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001108630A (ja) * | 1999-10-12 | 2001-04-20 | Sumitomo Chem Co Ltd | 光学透明フィルムの検査方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61292508A (ja) | 1986-12-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |