JPH0562459B2 - - Google Patents

Info

Publication number
JPH0562459B2
JPH0562459B2 JP58231497A JP23149783A JPH0562459B2 JP H0562459 B2 JPH0562459 B2 JP H0562459B2 JP 58231497 A JP58231497 A JP 58231497A JP 23149783 A JP23149783 A JP 23149783A JP H0562459 B2 JPH0562459 B2 JP H0562459B2
Authority
JP
Japan
Prior art keywords
thin film
film device
planarization
etching
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58231497A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60124825A (ja
Inventor
Yasuhiro Nagai
Keiichi Yanagisawa
Tomoyuki Toshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP23149783A priority Critical patent/JPS60124825A/ja
Publication of JPS60124825A publication Critical patent/JPS60124825A/ja
Publication of JPH0562459B2 publication Critical patent/JPH0562459B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
JP23149783A 1983-12-09 1983-12-09 薄膜デバイスの平担化方法 Granted JPS60124825A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23149783A JPS60124825A (ja) 1983-12-09 1983-12-09 薄膜デバイスの平担化方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23149783A JPS60124825A (ja) 1983-12-09 1983-12-09 薄膜デバイスの平担化方法

Publications (2)

Publication Number Publication Date
JPS60124825A JPS60124825A (ja) 1985-07-03
JPH0562459B2 true JPH0562459B2 (enrdf_load_stackoverflow) 1993-09-08

Family

ID=16924413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23149783A Granted JPS60124825A (ja) 1983-12-09 1983-12-09 薄膜デバイスの平担化方法

Country Status (1)

Country Link
JP (1) JPS60124825A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5882536A (ja) * 1981-11-10 1983-05-18 Fujitsu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS60124825A (ja) 1985-07-03

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