JPH05623B2 - - Google Patents

Info

Publication number
JPH05623B2
JPH05623B2 JP59146804A JP14680484A JPH05623B2 JP H05623 B2 JPH05623 B2 JP H05623B2 JP 59146804 A JP59146804 A JP 59146804A JP 14680484 A JP14680484 A JP 14680484A JP H05623 B2 JPH05623 B2 JP H05623B2
Authority
JP
Japan
Prior art keywords
temperature
air
clean area
cold air
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59146804A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6127427A (ja
Inventor
Hideyuki Hirose
Tomoaki Tsuboka
Fumio Suzuki
Akitomo Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14680484A priority Critical patent/JPS6127427A/ja
Publication of JPS6127427A publication Critical patent/JPS6127427A/ja
Publication of JPH05623B2 publication Critical patent/JPH05623B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Air-Conditioning Room Units, And Self-Contained Units In General (AREA)
  • Ventilation (AREA)
  • Air-Flow Control Members (AREA)
JP14680484A 1984-07-17 1984-07-17 温調チヤンバ− Granted JPS6127427A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14680484A JPS6127427A (ja) 1984-07-17 1984-07-17 温調チヤンバ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14680484A JPS6127427A (ja) 1984-07-17 1984-07-17 温調チヤンバ−

Publications (2)

Publication Number Publication Date
JPS6127427A JPS6127427A (ja) 1986-02-06
JPH05623B2 true JPH05623B2 (en, 2012) 1993-01-06

Family

ID=15415900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14680484A Granted JPS6127427A (ja) 1984-07-17 1984-07-17 温調チヤンバ−

Country Status (1)

Country Link
JP (1) JPS6127427A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3924947B2 (ja) * 1998-09-17 2007-06-06 ダイキン工業株式会社 空気調和装置
JP4712910B1 (ja) * 2010-12-28 2011-06-29 株式会社朝日工業社 精密空調機

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427770A (en) * 1977-08-04 1979-03-02 Takasago Thermal Engineering Constant temperature clean bench
JPS56146940A (en) * 1980-04-15 1981-11-14 Hitachi Plant Eng & Constr Co Ltd Method of cooling and air-conditioning by utilizing atmospheric air

Also Published As

Publication number Publication date
JPS6127427A (ja) 1986-02-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term