JPH056122B2 - - Google Patents
Info
- Publication number
- JPH056122B2 JPH056122B2 JP16353587A JP16353587A JPH056122B2 JP H056122 B2 JPH056122 B2 JP H056122B2 JP 16353587 A JP16353587 A JP 16353587A JP 16353587 A JP16353587 A JP 16353587A JP H056122 B2 JPH056122 B2 JP H056122B2
- Authority
- JP
- Japan
- Prior art keywords
- sampling
- electrode
- deflection
- observation device
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005070 sampling Methods 0.000 claims description 135
- 238000010894 electron beam technology Methods 0.000 claims description 68
- 230000003287 optical effect Effects 0.000 claims description 61
- 238000010408 sweeping Methods 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 12
- 230000001360 synchronised effect Effects 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 claims description 2
- 239000000835 fiber Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 16
- 230000035945 sensitivity Effects 0.000 description 11
- UJKPHYRXOLRVJJ-MLSVHJFASA-N CC(O)C1=C(C)/C2=C/C3=N/C(=C\C4=C(CCC(O)=O)C(C)=C(N4)/C=C4\N=C(\C=C\1/N\2)C(C)=C4C(C)O)/C(CCC(O)=O)=C3C Chemical class CC(O)C1=C(C)/C2=C/C3=N/C(=C\C4=C(CCC(O)=O)C(C)=C(N4)/C=C4\N=C(\C=C\1/N\2)C(C)=C4C(C)O)/C(CCC(O)=O)=C3C UJKPHYRXOLRVJJ-MLSVHJFASA-N 0.000 description 5
- 230000003111 delayed effect Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000003252 repetitive effect Effects 0.000 description 5
- 230000002123 temporal effect Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J11/00—Measuring the characteristics of individual optical pulses or of optical pulse trains
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16353587A JPS649323A (en) | 1987-06-30 | 1987-06-30 | Light waveform observing instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16353587A JPS649323A (en) | 1987-06-30 | 1987-06-30 | Light waveform observing instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS649323A JPS649323A (en) | 1989-01-12 |
| JPH056122B2 true JPH056122B2 (fr) | 1993-01-25 |
Family
ID=15775726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16353587A Granted JPS649323A (en) | 1987-06-30 | 1987-06-30 | Light waveform observing instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS649323A (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100871876B1 (ko) * | 2006-09-26 | 2008-12-03 | 나노전광 주식회사 | 광검출기를 이용한 포토마스크 표면의 헤이즈 검출장치 및그 검출방법 |
-
1987
- 1987-06-30 JP JP16353587A patent/JPS649323A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS649323A (en) | 1989-01-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313532 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080125 Year of fee payment: 15 |