JPH0560250B2 - - Google Patents
Info
- Publication number
- JPH0560250B2 JPH0560250B2 JP26881384A JP26881384A JPH0560250B2 JP H0560250 B2 JPH0560250 B2 JP H0560250B2 JP 26881384 A JP26881384 A JP 26881384A JP 26881384 A JP26881384 A JP 26881384A JP H0560250 B2 JPH0560250 B2 JP H0560250B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- polished
- wafer
- bonding
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 60
- 239000004065 semiconductor Substances 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 18
- 238000005452 bending Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26881384A JPS61145839A (ja) | 1984-12-20 | 1984-12-20 | 半導体ウエ−ハの接着方法および接着治具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26881384A JPS61145839A (ja) | 1984-12-20 | 1984-12-20 | 半導体ウエ−ハの接着方法および接着治具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61145839A JPS61145839A (ja) | 1986-07-03 |
JPH0560250B2 true JPH0560250B2 (de) | 1993-09-01 |
Family
ID=17463609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26881384A Granted JPS61145839A (ja) | 1984-12-20 | 1984-12-20 | 半導体ウエ−ハの接着方法および接着治具 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61145839A (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6271215A (ja) * | 1985-09-25 | 1987-04-01 | Toshiba Corp | ウエハ接合装置 |
JP2642645B2 (ja) * | 1987-11-19 | 1997-08-20 | 株式会社日立製作所 | 半導体基板の製造方法及び半導体装置の製造方法 |
JP2589994B2 (ja) * | 1987-12-24 | 1997-03-12 | 富士通株式会社 | ウェーハの接着方法 |
US4837177A (en) * | 1987-12-28 | 1989-06-06 | Motorola Inc. | Method of making bipolar semiconductor device having a conductive recombination layer |
US6635941B2 (en) * | 2001-03-21 | 2003-10-21 | Canon Kabushiki Kaisha | Structure of semiconductor device with improved reliability |
TWI283906B (en) * | 2001-12-21 | 2007-07-11 | Esec Trading Sa | Pick-up tool for mounting semiconductor chips |
WO2003097552A1 (en) | 2002-04-30 | 2003-11-27 | Agency For Science Technology And Research | A method of wafer/substrate bonding |
US7259466B2 (en) | 2002-12-17 | 2007-08-21 | Finisar Corporation | Low temperature bonding of multilayer substrates |
US7361593B2 (en) | 2002-12-17 | 2008-04-22 | Finisar Corporation | Methods of forming vias in multilayer substrates |
FR2860178B1 (fr) * | 2003-09-30 | 2005-11-04 | Commissariat Energie Atomique | Procede de separation de plaques collees entre elles pour constituer une structure empilee. |
US7650688B2 (en) | 2003-12-31 | 2010-01-26 | Chippac, Inc. | Bonding tool for mounting semiconductor chips |
US7153759B2 (en) | 2004-04-20 | 2006-12-26 | Agency For Science Technology And Research | Method of fabricating microelectromechanical system structures |
KR101422867B1 (ko) | 2006-06-29 | 2014-07-23 | 가부시키가이샤 니콘 | 웨이퍼 접합 장치 |
WO2010055730A1 (ja) * | 2008-11-14 | 2010-05-20 | 東京エレクトロン株式会社 | 貼り合わせ装置及び貼り合わせ方法 |
US7927975B2 (en) | 2009-02-04 | 2011-04-19 | Micron Technology, Inc. | Semiconductor material manufacture |
JP6501447B2 (ja) | 2013-03-26 | 2019-04-17 | 芝浦メカトロニクス株式会社 | 貼合装置および貼合基板の製造方法 |
US10586727B2 (en) | 2013-09-25 | 2020-03-10 | Shibaura Mechatronics Corporation | Suction stage, lamination device, and method for manufacturing laminated substrate |
EP3501037B1 (de) * | 2017-09-21 | 2020-01-29 | EV Group E. Thallner GmbH | Vorrichtung und verfahren zum verbinden von substraten |
-
1984
- 1984-12-20 JP JP26881384A patent/JPS61145839A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61145839A (ja) | 1986-07-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |