JPH0558483B2 - - Google Patents

Info

Publication number
JPH0558483B2
JPH0558483B2 JP22584985A JP22584985A JPH0558483B2 JP H0558483 B2 JPH0558483 B2 JP H0558483B2 JP 22584985 A JP22584985 A JP 22584985A JP 22584985 A JP22584985 A JP 22584985A JP H0558483 B2 JPH0558483 B2 JP H0558483B2
Authority
JP
Japan
Prior art keywords
lens
optical sensor
measured
light
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP22584985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6283612A (ja
Inventor
Kenta Mikurya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP22584985A priority Critical patent/JPS6283612A/ja
Publication of JPS6283612A publication Critical patent/JPS6283612A/ja
Publication of JPH0558483B2 publication Critical patent/JPH0558483B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Automatic Focus Adjustment (AREA)
JP22584985A 1985-10-09 1985-10-09 変位変換器 Granted JPS6283612A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22584985A JPS6283612A (ja) 1985-10-09 1985-10-09 変位変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22584985A JPS6283612A (ja) 1985-10-09 1985-10-09 変位変換器

Publications (2)

Publication Number Publication Date
JPS6283612A JPS6283612A (ja) 1987-04-17
JPH0558483B2 true JPH0558483B2 (US06342305-20020129-C00040.png) 1993-08-26

Family

ID=16835799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22584985A Granted JPS6283612A (ja) 1985-10-09 1985-10-09 変位変換器

Country Status (1)

Country Link
JP (1) JPS6283612A (US06342305-20020129-C00040.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0794984B2 (ja) * 1989-06-28 1995-10-11 大日本スクリーン製造株式会社 位置検出装置
US6313915B1 (en) * 1998-08-27 2001-11-06 Murata Manufacturing Co., Ltd. Displacement measuring method and apparatus

Also Published As

Publication number Publication date
JPS6283612A (ja) 1987-04-17

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