JPH0558063B2 - - Google Patents

Info

Publication number
JPH0558063B2
JPH0558063B2 JP11019985A JP11019985A JPH0558063B2 JP H0558063 B2 JPH0558063 B2 JP H0558063B2 JP 11019985 A JP11019985 A JP 11019985A JP 11019985 A JP11019985 A JP 11019985A JP H0558063 B2 JPH0558063 B2 JP H0558063B2
Authority
JP
Japan
Prior art keywords
evaporation
channel
plate
film thickness
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11019985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61270371A (ja
Inventor
Yoshio Shimozato
Kenichi Yanagi
Mitsuo Kato
Heizaburo Furukawa
Norio Tsukiji
Takuya Aiko
Takehiko Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Nippon Steel Nisshin Co Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd, Nisshin Steel Co Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP11019985A priority Critical patent/JPS61270371A/ja
Publication of JPS61270371A publication Critical patent/JPS61270371A/ja
Publication of JPH0558063B2 publication Critical patent/JPH0558063B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11019985A 1985-05-24 1985-05-24 真空蒸着装置 Granted JPS61270371A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11019985A JPS61270371A (ja) 1985-05-24 1985-05-24 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11019985A JPS61270371A (ja) 1985-05-24 1985-05-24 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPS61270371A JPS61270371A (ja) 1986-11-29
JPH0558063B2 true JPH0558063B2 (cg-RX-API-DMAC7.html) 1993-08-25

Family

ID=14529558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11019985A Granted JPS61270371A (ja) 1985-05-24 1985-05-24 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPS61270371A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016012779A1 (de) 2015-11-02 2017-05-04 Fanuc Corporation Offline-Roboterprogrammiervorrichtung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016012779A1 (de) 2015-11-02 2017-05-04 Fanuc Corporation Offline-Roboterprogrammiervorrichtung

Also Published As

Publication number Publication date
JPS61270371A (ja) 1986-11-29

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