JPH055796B2 - - Google Patents

Info

Publication number
JPH055796B2
JPH055796B2 JP21058285A JP21058285A JPH055796B2 JP H055796 B2 JPH055796 B2 JP H055796B2 JP 21058285 A JP21058285 A JP 21058285A JP 21058285 A JP21058285 A JP 21058285A JP H055796 B2 JPH055796 B2 JP H055796B2
Authority
JP
Japan
Prior art keywords
crucible
magnetic field
magnetic
raw material
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP21058285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6270286A (ja
Inventor
Shigeo Nonaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP21058285A priority Critical patent/JPS6270286A/ja
Publication of JPS6270286A publication Critical patent/JPS6270286A/ja
Publication of JPH055796B2 publication Critical patent/JPH055796B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP21058285A 1985-09-24 1985-09-24 単結晶製造装置 Granted JPS6270286A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21058285A JPS6270286A (ja) 1985-09-24 1985-09-24 単結晶製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21058285A JPS6270286A (ja) 1985-09-24 1985-09-24 単結晶製造装置

Publications (2)

Publication Number Publication Date
JPS6270286A JPS6270286A (ja) 1987-03-31
JPH055796B2 true JPH055796B2 (de) 1993-01-25

Family

ID=16591699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21058285A Granted JPS6270286A (ja) 1985-09-24 1985-09-24 単結晶製造装置

Country Status (1)

Country Link
JP (1) JPS6270286A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2572070B2 (ja) * 1987-07-20 1997-01-16 東芝セラミツクス株式会社 単結晶の製造方法
JPH10297994A (ja) * 1997-04-25 1998-11-10 Sumitomo Sitix Corp シリコン単結晶育成方法
DE10102126A1 (de) * 2001-01-18 2002-08-22 Wacker Siltronic Halbleitermat Verfahren und Vorrichtung zum Herstellen eines Einkristalls aus Silicium
JP7160006B2 (ja) * 2019-09-19 2022-10-25 信越半導体株式会社 単結晶引上げ装置および単結晶引上げ方法

Also Published As

Publication number Publication date
JPS6270286A (ja) 1987-03-31

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