JPH0557653B2 - - Google Patents

Info

Publication number
JPH0557653B2
JPH0557653B2 JP30384786A JP30384786A JPH0557653B2 JP H0557653 B2 JPH0557653 B2 JP H0557653B2 JP 30384786 A JP30384786 A JP 30384786A JP 30384786 A JP30384786 A JP 30384786A JP H0557653 B2 JPH0557653 B2 JP H0557653B2
Authority
JP
Japan
Prior art keywords
arm
chuck
disk member
attached
arms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP30384786A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63157382A (ja
Inventor
Hitoshi Mineo
Nobuo Morita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP30384786A priority Critical patent/JPS63157382A/ja
Publication of JPS63157382A publication Critical patent/JPS63157382A/ja
Publication of JPH0557653B2 publication Critical patent/JPH0557653B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
  • Manipulator (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP30384786A 1986-12-22 1986-12-22 デイスク部材のチヤツク装置 Granted JPS63157382A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30384786A JPS63157382A (ja) 1986-12-22 1986-12-22 デイスク部材のチヤツク装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30384786A JPS63157382A (ja) 1986-12-22 1986-12-22 デイスク部材のチヤツク装置

Publications (2)

Publication Number Publication Date
JPS63157382A JPS63157382A (ja) 1988-06-30
JPH0557653B2 true JPH0557653B2 (cs) 1993-08-24

Family

ID=17926019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30384786A Granted JPS63157382A (ja) 1986-12-22 1986-12-22 デイスク部材のチヤツク装置

Country Status (1)

Country Link
JP (1) JPS63157382A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06278072A (ja) * 1993-03-25 1994-10-04 Ngk Insulators Ltd 把持方法及び把持装置

Also Published As

Publication number Publication date
JPS63157382A (ja) 1988-06-30

Similar Documents

Publication Publication Date Title
US4892455A (en) Wafer alignment and transport mechanism
JPS6225325Y2 (cs)
CN106573353A (zh) 工件的自动定心装置以及自动定心方法
US4923185A (en) Vertical-lift screw drive mechanism
KR910007248B1 (ko) 크램프 장치
JP2002359277A (ja) ウェハのノッチ合せ装置
JPH0557653B2 (cs)
US6062953A (en) Wafer positioning method and apparatus
JP6551576B2 (ja) ワークの自動芯出し装置及び自動芯出し方法、並びに、検査又は測定装置及び検査又は測定方法
US4256428A (en) Apparatus for automatically fitting runner bricks
CN111331415A (zh) 一种浮动手爪
JPH05329702A (ja) 刃先位置検出装置
JPH0611728Y2 (ja) ワーククランプ装置
JP2004255568A (ja) ウェーハ位置決め方法及び装置
JPH07237051A (ja) シャフト芯出し装置
JPH1177473A (ja) 送り装置
JP2704585B2 (ja) ワーク位置決め機構を設けた研磨装置
JP2694164B2 (ja) 板状体の保持装置
JP2939698B2 (ja) 移動体の案内機構
JP2905341B2 (ja) ワーク移載装置
JPS6327949Y2 (cs)
JP4338286B2 (ja) トランスファー型切削加工機
JPH0629552Y2 (ja) フランジ回転機構
JPS5936331B2 (ja) 回転軸のクランプおよび微少角度調整装置
CN120587980A (zh) 一种法兰盘加工用定位工装