JPH0555563B2 - - Google Patents

Info

Publication number
JPH0555563B2
JPH0555563B2 JP62110160A JP11016087A JPH0555563B2 JP H0555563 B2 JPH0555563 B2 JP H0555563B2 JP 62110160 A JP62110160 A JP 62110160A JP 11016087 A JP11016087 A JP 11016087A JP H0555563 B2 JPH0555563 B2 JP H0555563B2
Authority
JP
Japan
Prior art keywords
impregnating agent
resin
air
parts
curing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62110160A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63274704A (ja
Inventor
Shunichiro Saito
Kenji Sugimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DIA FLOC KK
Original Assignee
DIA FLOC KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DIA FLOC KK filed Critical DIA FLOC KK
Priority to JP11016087A priority Critical patent/JPS63274704A/ja
Publication of JPS63274704A publication Critical patent/JPS63274704A/ja
Publication of JPH0555563B2 publication Critical patent/JPH0555563B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Powder Metallurgy (AREA)
JP11016087A 1987-05-06 1987-05-06 樹脂含浸加工方法 Granted JPS63274704A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11016087A JPS63274704A (ja) 1987-05-06 1987-05-06 樹脂含浸加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11016087A JPS63274704A (ja) 1987-05-06 1987-05-06 樹脂含浸加工方法

Publications (2)

Publication Number Publication Date
JPS63274704A JPS63274704A (ja) 1988-11-11
JPH0555563B2 true JPH0555563B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-17

Family

ID=14528570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11016087A Granted JPS63274704A (ja) 1987-05-06 1987-05-06 樹脂含浸加工方法

Country Status (1)

Country Link
JP (1) JPS63274704A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW541586B (en) 2001-05-25 2003-07-11 Tokyo Electron Ltd Substrate table, production method therefor and plasma treating device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928427B2 (ja) * 1979-08-20 1984-07-12 新日本製鐵株式会社 金属の連続鋳造鋳型
JPS59215403A (ja) * 1983-05-20 1984-12-05 Sumitomo Electric Ind Ltd 焼結気密性部品の製造法
JP2776496B2 (ja) * 1984-07-09 1998-07-16 セコム 株式会社 電気錠装置

Also Published As

Publication number Publication date
JPS63274704A (ja) 1988-11-11

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