JPH0555277B2 - - Google Patents
Info
- Publication number
- JPH0555277B2 JPH0555277B2 JP61018865A JP1886586A JPH0555277B2 JP H0555277 B2 JPH0555277 B2 JP H0555277B2 JP 61018865 A JP61018865 A JP 61018865A JP 1886586 A JP1886586 A JP 1886586A JP H0555277 B2 JPH0555277 B2 JP H0555277B2
- Authority
- JP
- Japan
- Prior art keywords
- pad
- surface plate
- jig
- hole
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 claims description 15
- 238000005553 drilling Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61018865A JPS62176774A (ja) | 1986-01-30 | 1986-01-30 | 研磨用パツドの穿孔兼取付用治具 |
| DK024598A DK24598A (da) | 1986-01-24 | 1998-02-23 | Antibiotiske glycopeptider og fremgangsmåde til deres fremstilling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61018865A JPS62176774A (ja) | 1986-01-30 | 1986-01-30 | 研磨用パツドの穿孔兼取付用治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62176774A JPS62176774A (ja) | 1987-08-03 |
| JPH0555277B2 true JPH0555277B2 (forum.php) | 1993-08-16 |
Family
ID=11983429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61018865A Granted JPS62176774A (ja) | 1986-01-24 | 1986-01-30 | 研磨用パツドの穿孔兼取付用治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62176774A (forum.php) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6273806B1 (en) * | 1997-05-15 | 2001-08-14 | Applied Materials, Inc. | Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus |
| JP2007266052A (ja) * | 2006-03-27 | 2007-10-11 | Nec Electronics Corp | 研磨パッド、ｃｍｐ装置、研磨パッドの製造方法 |
-
1986
- 1986-01-30 JP JP61018865A patent/JPS62176774A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62176774A (ja) | 1987-08-03 |
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