JPH0554705B2 - - Google Patents

Info

Publication number
JPH0554705B2
JPH0554705B2 JP59223665A JP22366584A JPH0554705B2 JP H0554705 B2 JPH0554705 B2 JP H0554705B2 JP 59223665 A JP59223665 A JP 59223665A JP 22366584 A JP22366584 A JP 22366584A JP H0554705 B2 JPH0554705 B2 JP H0554705B2
Authority
JP
Japan
Prior art keywords
vibrating beam
vibrating
diode
type
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59223665A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61100626A (ja
Inventor
Kyoichi Ikeda
Katsumi Isozaki
Tetsuya Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP59223665A priority Critical patent/JPS61100626A/ja
Publication of JPS61100626A publication Critical patent/JPS61100626A/ja
Publication of JPH0554705B2 publication Critical patent/JPH0554705B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/387—Devices controllable only by the variation of applied heat

Landscapes

  • Pressure Sensors (AREA)
JP59223665A 1984-10-24 1984-10-24 振動式センサ Granted JPS61100626A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59223665A JPS61100626A (ja) 1984-10-24 1984-10-24 振動式センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59223665A JPS61100626A (ja) 1984-10-24 1984-10-24 振動式センサ

Publications (2)

Publication Number Publication Date
JPS61100626A JPS61100626A (ja) 1986-05-19
JPH0554705B2 true JPH0554705B2 (enrdf_load_stackoverflow) 1993-08-13

Family

ID=16801728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59223665A Granted JPS61100626A (ja) 1984-10-24 1984-10-24 振動式センサ

Country Status (1)

Country Link
JP (1) JPS61100626A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0682106B2 (ja) * 1988-09-28 1994-10-19 セイコー電子工業株式会社 熱特性計測方法及び装置
US6878269B2 (en) 1996-01-31 2005-04-12 Kaneka Corporation Device for body fluid purification and system for body fluid purification
JP5110885B2 (ja) 2007-01-19 2012-12-26 キヤノン株式会社 複数の導電性の領域を有する構造体

Also Published As

Publication number Publication date
JPS61100626A (ja) 1986-05-19

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